JP4117762B2 - 基板の位置決め方法と装置 - Google Patents

基板の位置決め方法と装置 Download PDF

Info

Publication number
JP4117762B2
JP4117762B2 JP2001203499A JP2001203499A JP4117762B2 JP 4117762 B2 JP4117762 B2 JP 4117762B2 JP 2001203499 A JP2001203499 A JP 2001203499A JP 2001203499 A JP2001203499 A JP 2001203499A JP 4117762 B2 JP4117762 B2 JP 4117762B2
Authority
JP
Japan
Prior art keywords
substrate
positioning
axis
inclination
corner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001203499A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003017545A5 (enrdf_load_stackoverflow
JP2003017545A (ja
Inventor
秀夫 原口
衛 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2001203499A priority Critical patent/JP4117762B2/ja
Publication of JP2003017545A publication Critical patent/JP2003017545A/ja
Publication of JP2003017545A5 publication Critical patent/JP2003017545A5/ja
Application granted granted Critical
Publication of JP4117762B2 publication Critical patent/JP4117762B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2001203499A 2001-07-04 2001-07-04 基板の位置決め方法と装置 Expired - Fee Related JP4117762B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001203499A JP4117762B2 (ja) 2001-07-04 2001-07-04 基板の位置決め方法と装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001203499A JP4117762B2 (ja) 2001-07-04 2001-07-04 基板の位置決め方法と装置

Publications (3)

Publication Number Publication Date
JP2003017545A JP2003017545A (ja) 2003-01-17
JP2003017545A5 JP2003017545A5 (enrdf_load_stackoverflow) 2005-07-28
JP4117762B2 true JP4117762B2 (ja) 2008-07-16

Family

ID=19040124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001203499A Expired - Fee Related JP4117762B2 (ja) 2001-07-04 2001-07-04 基板の位置決め方法と装置

Country Status (1)

Country Link
JP (1) JP4117762B2 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4719124B2 (ja) * 2006-10-31 2011-07-06 三菱重工業株式会社 基板の位置決め方法、基板の位置決め装置、搬送装置及びプロセス装置
JP2008112902A (ja) * 2006-10-31 2008-05-15 Mitsubishi Heavy Ind Ltd 基板の支持方法及び支持構造
JP6075993B2 (ja) * 2012-08-02 2017-02-08 株式会社ディスコ 板状ワーク中心検出方法
US9929029B2 (en) * 2015-10-15 2018-03-27 Applied Materials, Inc. Substrate carrier system
JP6714477B2 (ja) * 2016-09-09 2020-06-24 株式会社アドテックエンジニアリング 基板角位置特定方法
JP6276449B1 (ja) 2017-03-30 2018-02-07 株式会社荏原製作所 基板処理装置、基板処理装置の制御方法、プログラムを格納した記憶媒体
JP7030497B2 (ja) * 2017-12-13 2022-03-07 株式会社荏原製作所 基板処理装置、基板処理装置の制御方法、プログラムを格納した記憶媒体
JP7094115B2 (ja) * 2018-02-16 2022-07-01 日本電産サンキョー株式会社 産業用ロボットの補正値算出方法
JP7436251B2 (ja) * 2020-03-16 2024-02-21 ファスフォードテクノロジ株式会社 ダイボンディング装置および半導体装置の製造方法

Also Published As

Publication number Publication date
JP2003017545A (ja) 2003-01-17

Similar Documents

Publication Publication Date Title
KR101613135B1 (ko) 반도체 기판의 위치 검출 장치 및 위치 검출 방법
US20050036863A1 (en) Transfer robot and inspection method for thin substrate
JP2008203280A (ja) 欠陥検査装置
JP2002516238A (ja) 自動基板処理システム
JP4117762B2 (ja) 基板の位置決め方法と装置
JP4385419B2 (ja) 外観検査方法及び外観検査装置
JP2009218622A (ja) 基板処理装置及び基板処理装置における基板位置ずれ補正方法
JPH10340940A (ja) 基板搬送システム及び半導体製造装置
JP2002151568A (ja) 被処理体の処理システム及び搬送方法
CN115326817A (zh) 基板检查方法和基板检查装置
WO2018147016A1 (ja) 搬送システム
JP2007088110A (ja) 基板搬送ロボットの基準位置教示方法
JPH0620920A (ja) 基板位置補正装置
JP7624819B2 (ja) 搬送システム
JPH11312725A (ja) 基板搬入搬出装置
JP2009022823A (ja) 検査装置および基板処理システム
JP4580719B2 (ja) 基板搬送装置及び基板搬送方法
JP4271874B2 (ja) 真空処理装置のロードロック室での基板位置決め方法とその装置
JPH08316288A (ja) 自動搬送装置
JP7489368B2 (ja) アライメント装置
JP2022019003A (ja) 球状物体外観検査装置
CN210923504U (zh) 载盘翻面检测系统
JPH0936201A (ja) 基板移載方法および基板移載装置
JPH0724662A (ja) 部品供給装置
JPH09270451A (ja) 基板搬送方法、基板位置ぎめ装置および基板の検査装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041210

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20041210

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070904

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070911

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20071109

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20071204

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080111

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080201

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20080318

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20080417

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110502

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees