JP4096177B2 - Foupへのfoupドアの不適切挿入防止システム - Google Patents
Foupへのfoupドアの不適切挿入防止システム Download PDFInfo
- Publication number
- JP4096177B2 JP4096177B2 JP2002550295A JP2002550295A JP4096177B2 JP 4096177 B2 JP4096177 B2 JP 4096177B2 JP 2002550295 A JP2002550295 A JP 2002550295A JP 2002550295 A JP2002550295 A JP 2002550295A JP 4096177 B2 JP4096177 B2 JP 4096177B2
- Authority
- JP
- Japan
- Prior art keywords
- pod
- door
- foup
- latch
- orientation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S292/00—Closure fasteners
- Y10S292/12—Closure operators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T292/00—Closure fasteners
- Y10T292/08—Bolts
- Y10T292/096—Sliding
- Y10T292/0961—Multiple head
- Y10T292/0962—Operating means
- Y10T292/0964—Cam
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Closures For Containers (AREA)
Description
HEWLETT-PACKARD 社が提供するSMIFシステムは、米国特許第4,532,970号および第2,534,389号で開示されている。SMIFシステムの目的は、半導体の製造過程でウエハーを格納および運搬する際に、半導体ウエハーへの粒子束を減少させることである。これは、格納・運搬の際に物理的にウエハー周囲の気体(空気や窒素など)をウエハーに対して本質的に静止させ、また粒子を周囲環境からウエハーの近接環境に侵入させないことにより部分的に可能になる。
Claims (15)
- 物品を格納・運搬するためのポッドであって、
ポッドドアと、
複数の配向性で該ポッドドアを受領する開口部およびラッチ係合スロットを含むポッド外殻と、
前記ポッドドア上に提供されており、該ポッドドアが前記ポッド外殻内の前記開口部内に前記複数の配向性から選択された1配向性で挿入された場合にのみ前記ラッチ係合スロットと係合するラッチ手段と、
を含むことを特徴とするポッド。 - ラッチ手段に連結し、該ラッチ手段を開放位置と係合位置との間で往来させるラッチ作動装置をさらに含むことを特徴とする請求項1記載のポッド。
- ラッチ手段は2本のラッチフィンガーを備え、
該2本のラッチフィンガーはポッドドアがポッドに、前記複数の配向性から選択された1配向性で挿入された場合にラッチ係合スロットと整合することを特徴とする請求項1記載のポッド。 - ポッドドアが選択された配向性以外で挿入された場合に、ラッチ係合スロットはラッチ手段が開放位置から係合位置へ移動することを阻止することを特徴とする請求項3記載のポッド。
- ポッド外殻開口部から少なくとも一つのラッチ係合スロットのへの距離は、ポッド外殻開口部からその他のラッチ係合スロットへの距離と異なることを特徴とする請求項1記載のポッド。
- ポッド外殻開口部の端部から少なくとも1ラッチ係合スロットへの距離は、その他のラッチ係合スロットへの距離と異なることを特徴とする請求項1記載のポッド。
- ポッドドアがポッド外殻へ選択された配向性以外で挿入された場合に、該ポッド外殻はラッチ手段が開放位置から係合位置へ移動することを阻止することを特徴とする請求項6記載のポッド。
- 物品を格納・運搬するポッドであって
ドア開口部を有するポッド外殻と、
第1配向性および第2配向性で該ドア開口部と係合するように該ドア開口部の形状に補完的な形状で提供されるポッドドアと、
該ポッドドア内に提供されており、係止位置および開放位置を有し、該ポッドドアが前記ポッドドア開口部に前記第1配向性で挿入された場合のみ該係止位置に移動するラッチ手段と、
を含むことを特徴とするポッド。 - ラッチ手段に接続し、該ラッチ手段を係止位置と開放位置の間で往来させるラッチ作動装置をさらに含むことを特徴とする請求項8記載のポッド。
- ポッド外殻はラッチ係合スロットを含み、
ラッチ手段は2本のラッチフィンガーを有し、
該2本のラッチフィンガーは、ポッドドアがポッドに第1配向性で挿入された場合にそれぞれ前記ラッチ係合スロットと整合する、
ことを特徴とする請求項8記載のポッド。 - ポッドドアがポッドに第1配向性以外で挿入された場合、ポッド外殻はラッチ手段が開放位置から係止位置へ移動することを阻止することを特徴とする請求項10記載のポッド。
- ドア開口部から少なくとも一つのラッチ係合スロットへの距離は、ドア開口部からその他のラッチ係合スロットへの距離と異なることを特徴とする請求項10記載のポッド。
- ドア開口部の1端部から少なくとも1ラッチ係合スロットへの距離は、その他のラッチ係合スロットへの距離と異なることを特徴とする請求項10記載のポッド。
- ポッドドアがポッド外殻に第1配向性以外で挿入された場合、該ポッド外殻はラッチ手段が開放位置から係止位置に移動することを阻止することを特徴とする請求項13記載のポッド。
- 物品を格納・運搬するためのポッドであって、
複数の物品整合用突起部を備えた内部を持つポッドドアと、
該ポッドドアを第1配向性および第2配向性で受領し、ラッチ係合スロットを含む開口部を有するポッド外殻と、
前記ポッドドア内に提供されており、前記ポッドドアが前記ポッド外殻の前記開口部に前記第1配向性で挿入された場合のみ前記ラッチ係合スロットと係合するラッチ手段と、
を含むことを特徴とするポッド。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US25546700P | 2000-12-13 | 2000-12-13 | |
PCT/US2001/048513 WO2002049079A2 (en) | 2000-12-13 | 2001-12-11 | System for preventing improper insertion of foup door into foup |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004525502A JP2004525502A (ja) | 2004-08-19 |
JP4096177B2 true JP4096177B2 (ja) | 2008-06-04 |
Family
ID=22968449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002550295A Expired - Fee Related JP4096177B2 (ja) | 2000-12-13 | 2001-12-11 | Foupへのfoupドアの不適切挿入防止システム |
Country Status (8)
Country | Link |
---|---|
US (1) | US6663148B2 (ja) |
EP (1) | EP1349794A4 (ja) |
JP (1) | JP4096177B2 (ja) |
KR (1) | KR100846399B1 (ja) |
CN (1) | CN1304253C (ja) |
AU (1) | AU2002227395A1 (ja) |
TW (1) | TW502369B (ja) |
WO (1) | WO2002049079A2 (ja) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7048127B2 (en) * | 2001-07-23 | 2006-05-23 | Kakizaki Manufacturing Co., Ltd. | Lid unit for thin-plate holding container, thin-plate holding container, and simplified attaching/detaching mechanism |
US20040060582A1 (en) * | 2002-09-18 | 2004-04-01 | Dainippon Screen Mfg.Co., Ltd. | Substrate processing apparatus |
TWI239931B (en) * | 2003-05-19 | 2005-09-21 | Miraial Co Ltd | Lid unit for thin plate supporting container and thin plate supporting container |
US7455181B2 (en) * | 2003-05-19 | 2008-11-25 | Miraial Co., Ltd. | Lid unit for thin plate supporting container |
US7325685B2 (en) * | 2003-11-25 | 2008-02-05 | International Business Machines Corporation | Secondary latchkey mechanism and method for reticle SMIF pods |
US7077270B2 (en) * | 2004-03-10 | 2006-07-18 | Miraial Co., Ltd. | Thin plate storage container with seal and cover fixing means |
US7578407B2 (en) * | 2004-04-18 | 2009-08-25 | Entegris, Inc. | Wafer container with sealable door |
US9821344B2 (en) | 2004-12-10 | 2017-11-21 | Ikan Holdings Llc | Systems and methods for scanning information from storage area contents |
JP4540529B2 (ja) | 2005-04-18 | 2010-09-08 | 信越ポリマー株式会社 | 収納容器 |
KR100755370B1 (ko) | 2006-04-17 | 2007-09-04 | 삼성전자주식회사 | 반도체 메모리 장치 |
KR100772845B1 (ko) * | 2006-06-21 | 2007-11-02 | 삼성전자주식회사 | 반도체 디바이스 제조설비에서의 웨이퍼 수납장치 |
JP4841383B2 (ja) * | 2006-10-06 | 2011-12-21 | 信越ポリマー株式会社 | 蓋体及び基板収納容器 |
JP4278699B1 (ja) * | 2008-03-27 | 2009-06-17 | Tdk株式会社 | 密閉容器及び該密閉容器の蓋開閉システム、ウエハ搬送システム、及び密閉容器の蓋閉鎖方法 |
JP5518513B2 (ja) * | 2010-02-04 | 2014-06-11 | 平田機工株式会社 | フープオープナ及びその動作方法 |
CN102237289B (zh) * | 2010-05-07 | 2013-07-24 | 家登精密工业股份有限公司 | 一种具有椭圆门闩结构的前开式圆片盒 |
KR101714051B1 (ko) * | 2010-11-12 | 2017-03-08 | 삼성전자주식회사 | 휴대 단말기의 커버 로킹 장치 |
TWI430929B (zh) * | 2011-04-19 | 2014-03-21 | Gudeng Prec Ind Co Ltd | 傳送盒 |
TWI473752B (zh) * | 2011-12-13 | 2015-02-21 | Gudeng Prec Ind Co Ltd | 大型前開式晶圓盒之門閂結構 |
TWM434763U (en) * | 2012-03-22 | 2012-08-01 | Gudeng Prec Ind Co Ltd | Containers for packaging semiconductor components |
WO2013187104A1 (ja) * | 2012-06-14 | 2013-12-19 | 村田機械株式会社 | 蓋開閉装置 |
EP3782931A1 (de) * | 2019-08-23 | 2021-02-24 | Jungheinrich Aktiengesellschaft | Stapellageranordnung |
EP3782930B1 (de) * | 2019-08-23 | 2022-07-06 | Jungheinrich Aktiengesellschaft | Stapellageranordnung |
EP4238895B1 (de) * | 2022-03-03 | 2024-07-10 | Jungheinrich Aktiengesellschaft | Blocklageranordnung |
Family Cites Families (18)
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US368784A (en) | 1887-08-23 | Chaelbs eippb | ||
US2947160A (en) | 1955-11-07 | 1960-08-02 | Sperry Rand Corp | Bolt relocking device for safes |
US2920474A (en) | 1956-08-27 | 1960-01-12 | Avery G Johns | Door lock |
US3464726A (en) * | 1967-10-30 | 1969-09-02 | Budd Co | Quick opening latch mechanism |
US4408546A (en) * | 1981-01-12 | 1983-10-11 | Schmidt Jacob D | Hingeless safe door assembly |
US4532970A (en) | 1983-09-28 | 1985-08-06 | Hewlett-Packard Company | Particle-free dockable interface for integrated circuit processing |
US4534389A (en) | 1984-03-29 | 1985-08-13 | Hewlett-Packard Company | Interlocking door latch for dockable interface for integrated circuit processing |
US4620733A (en) * | 1985-07-02 | 1986-11-04 | The United States Of America As Represented By The Secretary Of The Navy | Shipboard internal locking system |
US4870841A (en) * | 1988-10-06 | 1989-10-03 | Yale Security Inc. | Lock deadbolt protector |
US4995430A (en) | 1989-05-19 | 1991-02-26 | Asyst Technologies, Inc. | Sealable transportable container having improved latch mechanism |
US5294013A (en) * | 1989-10-20 | 1994-03-15 | Kabushiki Kaisha Toshiba | Portable electronic apparatus |
IT1253045B (it) * | 1991-10-01 | 1995-07-10 | Italiana Serrature Affini | Perfezionamenti nelle serrature da inserire comprendenti scrocco e catenaccio e dotate di dispositivo antipanico |
US5341752A (en) * | 1992-06-04 | 1994-08-30 | Brian Hambleton | Security safe with improved door locking features |
US5711427A (en) * | 1996-07-12 | 1998-01-27 | Fluoroware, Inc. | Wafer carrier with door |
US5957292A (en) * | 1997-08-01 | 1999-09-28 | Fluoroware, Inc. | Wafer enclosure with door |
JP3938233B2 (ja) * | 1997-11-28 | 2007-06-27 | 信越ポリマー株式会社 | 密封容器 |
US6193068B1 (en) * | 1998-05-07 | 2001-02-27 | Texas Instruments Incorporated | Containment device for retaining semiconductor wafers |
JP3556480B2 (ja) * | 1998-08-17 | 2004-08-18 | 信越ポリマー株式会社 | 精密基板収納容器 |
-
2001
- 2001-12-11 WO PCT/US2001/048513 patent/WO2002049079A2/en active Application Filing
- 2001-12-11 KR KR1020037007837A patent/KR100846399B1/ko active IP Right Grant
- 2001-12-11 JP JP2002550295A patent/JP4096177B2/ja not_active Expired - Fee Related
- 2001-12-11 EP EP01996246A patent/EP1349794A4/en not_active Withdrawn
- 2001-12-11 AU AU2002227395A patent/AU2002227395A1/en not_active Abandoned
- 2001-12-11 CN CNB018221181A patent/CN1304253C/zh not_active Expired - Lifetime
- 2001-12-12 TW TW90130765A patent/TW502369B/zh not_active IP Right Cessation
- 2001-12-13 US US10/020,761 patent/US6663148B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO2002049079A2 (en) | 2002-06-20 |
CN1500053A (zh) | 2004-05-26 |
CN1304253C (zh) | 2007-03-14 |
US6663148B2 (en) | 2003-12-16 |
WO2002049079A3 (en) | 2002-08-29 |
KR100846399B1 (ko) | 2008-07-16 |
EP1349794A2 (en) | 2003-10-08 |
TW502369B (en) | 2002-09-11 |
AU2002227395A1 (en) | 2002-06-24 |
US20020106266A1 (en) | 2002-08-08 |
KR20030088421A (ko) | 2003-11-19 |
JP2004525502A (ja) | 2004-08-19 |
EP1349794A4 (en) | 2006-03-08 |
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