JP4085798B2 - ウェハ位置教示方法および教示用治具ならびにロボット - Google Patents

ウェハ位置教示方法および教示用治具ならびにロボット Download PDF

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JP4085798B2
JP4085798B2 JP2002359389A JP2002359389A JP4085798B2 JP 4085798 B2 JP4085798 B2 JP 4085798B2 JP 2002359389 A JP2002359389 A JP 2002359389A JP 2002359389 A JP2002359389 A JP 2002359389A JP 4085798 B2 JP4085798 B2 JP 4085798B2
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teaching
semiconductor wafer
robot
wafer
cone
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JP2004193333A (ja
JP2004193333A5 (enExample
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吉希 木村
光晶 松尾
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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JP2002359389A 2002-12-11 2002-12-11 ウェハ位置教示方法および教示用治具ならびにロボット Expired - Fee Related JP4085798B2 (ja)

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JP2002359389A JP4085798B2 (ja) 2002-12-11 2002-12-11 ウェハ位置教示方法および教示用治具ならびにロボット

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JP2002359389A JP4085798B2 (ja) 2002-12-11 2002-12-11 ウェハ位置教示方法および教示用治具ならびにロボット

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JP2004193333A JP2004193333A (ja) 2004-07-08
JP2004193333A5 JP2004193333A5 (enExample) 2005-10-27
JP4085798B2 true JP4085798B2 (ja) 2008-05-14

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7522267B2 (en) * 2005-07-11 2009-04-21 Brooks Automation, Inc. Substrate transport apparatus with automated alignment
JP5235376B2 (ja) * 2007-10-05 2013-07-10 川崎重工業株式会社 ロボットのターゲット位置検出装置
JP5529920B2 (ja) * 2012-05-11 2014-06-25 川崎重工業株式会社 ロボットのターゲット位置検出装置、半導体装置およびターゲット位置検出方法
JP6303556B2 (ja) * 2014-02-05 2018-04-04 東京エレクトロン株式会社 基板搬送機構の位置検出方法、記憶媒体及び基板搬送機構の位置検出装置
US9026244B1 (en) * 2014-05-22 2015-05-05 Applied Materials, Inc. Presence sensing and position correction for wafer on a carrier ring
CN115446825B (zh) * 2021-06-08 2024-11-08 广东博智林机器人有限公司 视觉系统、视觉装置以及视觉引导方法
JP2024131896A (ja) * 2023-03-16 2024-09-30 川崎重工業株式会社 基板搬送用ロボットシステム、および、基板搬送方法

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