JP4084008B2 - 薄膜磁気ヘッド及びその製造方法、並びに磁気ディスク装置 - Google Patents
薄膜磁気ヘッド及びその製造方法、並びに磁気ディスク装置 Download PDFInfo
- Publication number
- JP4084008B2 JP4084008B2 JP2001235835A JP2001235835A JP4084008B2 JP 4084008 B2 JP4084008 B2 JP 4084008B2 JP 2001235835 A JP2001235835 A JP 2001235835A JP 2001235835 A JP2001235835 A JP 2001235835A JP 4084008 B2 JP4084008 B2 JP 4084008B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- head
- magnetic field
- facing surface
- pole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 200
- 239000010409 thin film Substances 0.000 title claims description 24
- 238000004519 manufacturing process Methods 0.000 title description 8
- 239000010408 film Substances 0.000 claims description 23
- 230000000694 effects Effects 0.000 claims description 6
- 238000000034 method Methods 0.000 description 14
- 230000005415 magnetization Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 238000007747 plating Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910002555 FeNi Inorganic materials 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 230000005381 magnetic domain Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B2005/0002—Special dispositions or recording techniques
- G11B2005/0026—Pulse recording
- G11B2005/0029—Pulse recording using magnetisation components of the recording layer disposed mainly perpendicularly to the record carrier surface
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/012—Recording on, or reproducing or erasing from, magnetic disks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49034—Treating to affect magnetic properties
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49037—Using reference point/surface to facilitate measuring
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49043—Depositing magnetic layer or coating
- Y10T29/49044—Plural magnetic deposition layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001235835A JP4084008B2 (ja) | 2001-08-03 | 2001-08-03 | 薄膜磁気ヘッド及びその製造方法、並びに磁気ディスク装置 |
| US10/068,986 US6785097B2 (en) | 2001-08-03 | 2002-02-11 | Thin film magnetic recording head, method of fabricating the thin film magnetic recording head and magnetic disk drive |
| US10/924,814 US7086140B2 (en) | 2001-08-03 | 2004-08-25 | Method of fabricating a thin film magnetic recording head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001235835A JP4084008B2 (ja) | 2001-08-03 | 2001-08-03 | 薄膜磁気ヘッド及びその製造方法、並びに磁気ディスク装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004227618A Division JP2004348962A (ja) | 2004-08-04 | 2004-08-04 | 薄膜磁気ヘッド及びその製造方法、並びに磁気ディスク装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003045008A JP2003045008A (ja) | 2003-02-14 |
| JP2003045008A5 JP2003045008A5 (enExample) | 2005-05-26 |
| JP4084008B2 true JP4084008B2 (ja) | 2008-04-30 |
Family
ID=19067216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001235835A Expired - Fee Related JP4084008B2 (ja) | 2001-08-03 | 2001-08-03 | 薄膜磁気ヘッド及びその製造方法、並びに磁気ディスク装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (2) | US6785097B2 (enExample) |
| JP (1) | JP4084008B2 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4160784B2 (ja) * | 2002-05-31 | 2008-10-08 | 株式会社日立グローバルストレージテクノロジーズ | 垂直磁気ヘッドおよび垂直磁気記録再生装置 |
| JP2004022004A (ja) * | 2002-06-12 | 2004-01-22 | Tdk Corp | 薄膜磁気ヘッド |
| JP3774446B2 (ja) * | 2003-04-28 | 2006-05-17 | 株式会社東芝 | 垂直磁気記録ヘッドおよび磁気ディスク装置 |
| US7554765B2 (en) * | 2003-06-11 | 2009-06-30 | Seagate Technology Llc | Magnetic head for perpendicular recording with suppressed side writing and erasing |
| JP2005018851A (ja) * | 2003-06-24 | 2005-01-20 | Tdk Corp | 薄膜磁気ヘッドおよび磁気記録装置 |
| JP2005243124A (ja) | 2004-02-25 | 2005-09-08 | Hitachi Global Storage Technologies Netherlands Bv | 磁気ヘッド及びそれを搭載した磁気記録再生装置 |
| JP2006018876A (ja) * | 2004-06-30 | 2006-01-19 | Toshiba Corp | 垂直磁気記録装置 |
| JP2006018927A (ja) * | 2004-07-01 | 2006-01-19 | Hitachi Global Storage Technologies Netherlands Bv | 磁気ヘッド及びそれを搭載した磁気記録再生装置 |
| JP4390677B2 (ja) | 2004-10-15 | 2009-12-24 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 磁気ヘッド及びそれを搭載した磁気記録再生装置 |
| JP2006127627A (ja) | 2004-10-28 | 2006-05-18 | Hitachi Global Storage Technologies Netherlands Bv | 磁気記録再生装置 |
| JP2006209927A (ja) * | 2005-01-31 | 2006-08-10 | Toshiba Corp | 垂直磁気ヘッドおよび垂直磁気ディスク装置 |
| US7599152B2 (en) | 2005-04-28 | 2009-10-06 | Headway Technologies, Inc. | Magnetic read-write head shield that prevents flux concentration at edges close to the ABS |
| US20060245113A1 (en) * | 2005-04-28 | 2006-11-02 | Headway Technologies, Inc. | Method to reduce sensitivity of a perpendicular recording head to external fields |
| US7561379B2 (en) * | 2005-10-28 | 2009-07-14 | Seagate Technology Llc | Laminated return pole for suppressing side track erasure |
| US8385020B2 (en) | 2010-11-24 | 2013-02-26 | Headway Technologies, Inc. | Modified shield design to eliminate the far-field WATE problem |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5819717A (ja) * | 1981-07-30 | 1983-02-04 | Fujitsu Ltd | 垂直磁化記録再生用ヘッド |
| WO1986003616A1 (fr) * | 1984-12-03 | 1986-06-19 | Olympus Optical Co., Ltd. | Tete magnetic verticale |
| JPH0395717A (ja) * | 1989-09-08 | 1991-04-22 | Fujitsu Ltd | 磁気ヘッド |
| US5073836A (en) * | 1989-10-05 | 1991-12-17 | Hewlett-Packard Company | Single pole write and a differential magneto-resistive read for perpendicular recording |
| JPH07225901A (ja) | 1994-02-10 | 1995-08-22 | Fujitsu Ltd | 垂直磁気ディスク装置 |
| KR100439879B1 (ko) * | 1996-04-12 | 2004-12-03 | 마츠시타 덴끼 산교 가부시키가이샤 | 오디오비디오기능을실행할영상타이틀과,그렇지않은영상타이틀을수록하고,그들의차이를순간에분별할수있는광디스크및그재생장치,재생방법 |
| JP4297585B2 (ja) * | 2000-02-28 | 2009-07-15 | 株式会社日立グローバルストレージテクノロジーズ | 磁気記録再生装置 |
| JP2001256608A (ja) * | 2000-03-14 | 2001-09-21 | Toshiba Corp | 磁気ヘッド及び磁気記憶再生装置 |
| US6798615B1 (en) * | 2000-03-24 | 2004-09-28 | Seagate Technology Llc | Perpendicular recording head with return poles which reduce flux antenna effect |
| JP4102013B2 (ja) * | 2000-09-22 | 2008-06-18 | 株式会社東芝 | 垂直記録ヘッドおよび垂直磁気記録装置 |
| JP2002208115A (ja) * | 2000-11-10 | 2002-07-26 | Tdk Corp | 薄膜磁気ヘッドの製造方法 |
-
2001
- 2001-08-03 JP JP2001235835A patent/JP4084008B2/ja not_active Expired - Fee Related
-
2002
- 2002-02-11 US US10/068,986 patent/US6785097B2/en not_active Expired - Fee Related
-
2004
- 2004-08-25 US US10/924,814 patent/US7086140B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003045008A (ja) | 2003-02-14 |
| US20030026039A1 (en) | 2003-02-06 |
| US6785097B2 (en) | 2004-08-31 |
| US20050018346A1 (en) | 2005-01-27 |
| US7086140B2 (en) | 2006-08-08 |
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