JP4075470B2 - センサ装置 - Google Patents
センサ装置 Download PDFInfo
- Publication number
- JP4075470B2 JP4075470B2 JP2002160662A JP2002160662A JP4075470B2 JP 4075470 B2 JP4075470 B2 JP 4075470B2 JP 2002160662 A JP2002160662 A JP 2002160662A JP 2002160662 A JP2002160662 A JP 2002160662A JP 4075470 B2 JP4075470 B2 JP 4075470B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- substrate
- sensor device
- bonding layer
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 124
- 238000000605 extraction Methods 0.000 claims description 27
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 34
- 229910052710 silicon Inorganic materials 0.000 description 34
- 239000010703 silicon Substances 0.000 description 34
- 238000000034 method Methods 0.000 description 24
- 238000004519 manufacturing process Methods 0.000 description 12
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- 239000004065 semiconductor Substances 0.000 description 10
- 238000001514 detection method Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 7
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- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 5
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- 238000009434 installation Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
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- 230000001133 acceleration Effects 0.000 description 1
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Images
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002160662A JP4075470B2 (ja) | 2002-05-31 | 2002-05-31 | センサ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002160662A JP4075470B2 (ja) | 2002-05-31 | 2002-05-31 | センサ装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004003890A JP2004003890A (ja) | 2004-01-08 |
| JP2004003890A5 JP2004003890A5 (https=) | 2005-08-25 |
| JP4075470B2 true JP4075470B2 (ja) | 2008-04-16 |
Family
ID=30429997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002160662A Expired - Fee Related JP4075470B2 (ja) | 2002-05-31 | 2002-05-31 | センサ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4075470B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4952202B2 (ja) * | 2006-11-09 | 2012-06-13 | 株式会社豊田中央研究所 | 力検知装置 |
| JP5312853B2 (ja) * | 2008-06-18 | 2013-10-09 | 株式会社豊田中央研究所 | 力検知素子とその製造方法 |
| JP4810690B2 (ja) * | 2008-11-11 | 2011-11-09 | 株式会社豊田中央研究所 | 力検知素子 |
| JP5316479B2 (ja) * | 2009-06-09 | 2013-10-16 | 株式会社デンソー | 半導体力学量センサの製造方法及び半導体力学量センサ |
-
2002
- 2002-05-31 JP JP2002160662A patent/JP4075470B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2004003890A (ja) | 2004-01-08 |
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