JP4060984B2 - プローブカード - Google Patents

プローブカード Download PDF

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Publication number
JP4060984B2
JP4060984B2 JP10041199A JP10041199A JP4060984B2 JP 4060984 B2 JP4060984 B2 JP 4060984B2 JP 10041199 A JP10041199 A JP 10041199A JP 10041199 A JP10041199 A JP 10041199A JP 4060984 B2 JP4060984 B2 JP 4060984B2
Authority
JP
Japan
Prior art keywords
probe
probes
insulating plate
slot
probe card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10041199A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000292441A (ja
JP2000292441A5 (enExample
Inventor
幸廣 平井
正 杉山
孝彦 丹代
憲栄 山口
聡 成田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP10041199A priority Critical patent/JP4060984B2/ja
Priority to TW088112662A priority patent/TW434407B/zh
Priority to US09/361,719 priority patent/US6271674B1/en
Priority to KR1019990031492A priority patent/KR100329293B1/ko
Publication of JP2000292441A publication Critical patent/JP2000292441A/ja
Publication of JP2000292441A5 publication Critical patent/JP2000292441A5/ja
Application granted granted Critical
Publication of JP4060984B2 publication Critical patent/JP4060984B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10041199A 1999-04-07 1999-04-07 プローブカード Expired - Lifetime JP4060984B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10041199A JP4060984B2 (ja) 1999-04-07 1999-04-07 プローブカード
TW088112662A TW434407B (en) 1999-04-07 1999-07-27 Probe card
US09/361,719 US6271674B1 (en) 1999-04-07 1999-07-27 Probe card
KR1019990031492A KR100329293B1 (ko) 1999-04-07 1999-07-31 프로브 카드

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10041199A JP4060984B2 (ja) 1999-04-07 1999-04-07 プローブカード

Publications (3)

Publication Number Publication Date
JP2000292441A JP2000292441A (ja) 2000-10-20
JP2000292441A5 JP2000292441A5 (enExample) 2005-08-11
JP4060984B2 true JP4060984B2 (ja) 2008-03-12

Family

ID=14273250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10041199A Expired - Lifetime JP4060984B2 (ja) 1999-04-07 1999-04-07 プローブカード

Country Status (1)

Country Link
JP (1) JP4060984B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9535093B2 (en) 2013-07-23 2017-01-03 Mpi Corporation High frequency probe card for probing photoelectric device

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI290626B (en) * 2002-04-16 2007-12-01 Nhk Spring Co Ltd Electroconductive contact probe holder
JP4698374B2 (ja) * 2005-10-05 2011-06-08 日本電子材料株式会社 プローブの製造方法
JP2008003049A (ja) * 2006-06-26 2008-01-10 Micronics Japan Co Ltd プローブ組立体
JP2008008730A (ja) * 2006-06-29 2008-01-17 Micronics Japan Co Ltd プローブ組立体
JP4924881B2 (ja) * 2006-11-14 2012-04-25 軍生 木本 電気信号接続用座標変換装置
JP7224575B2 (ja) * 2017-05-30 2023-02-20 株式会社オリティ プローブカード

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9535093B2 (en) 2013-07-23 2017-01-03 Mpi Corporation High frequency probe card for probing photoelectric device

Also Published As

Publication number Publication date
JP2000292441A (ja) 2000-10-20

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