JP4054887B2 - ケイ化ルテニウムのウェットエッチング方法及びエッチング液 - Google Patents
ケイ化ルテニウムのウェットエッチング方法及びエッチング液 Download PDFInfo
- Publication number
- JP4054887B2 JP4054887B2 JP2002570270A JP2002570270A JP4054887B2 JP 4054887 B2 JP4054887 B2 JP 4054887B2 JP 2002570270 A JP2002570270 A JP 2002570270A JP 2002570270 A JP2002570270 A JP 2002570270A JP 4054887 B2 JP4054887 B2 JP 4054887B2
- Authority
- JP
- Japan
- Prior art keywords
- hypochlorite
- ruthenium silicide
- solution
- silicide layer
- exposing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/60—Electrodes
- H01L28/65—Electrodes comprising a noble metal or a noble metal oxide, e.g. platinum (Pt), ruthenium (Ru), ruthenium dioxide (RuO2), iridium (Ir), iridium dioxide (IrO2)
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
Description
Claims (21)
- 表面からケイ化ルテニウムを除去する方法であって、
ケイ化ルテニウムを含む表面を、フッ化水素酸と次亜塩素酸塩とを含む水溶液に曝すステップと、
前記表面を水溶液に曝して前記反応生成物を前記表面から溶解させるステップとを含む方法。 - 前記次亜塩素酸塩が次亜塩素酸カリウムを含む請求項1に記載の方法。
- 表面からケイ化ルテニウムを除去するのに用いられるエッチング液であって、
次亜塩素酸塩、フッ化水素酸(HF)溶液、および純水を含む次亜塩素酸塩系溶液であるエッチング液。 - 前記次亜塩素酸塩系溶液が次亜塩素酸カリウム(KOCl)溶液を含む請求項3に記載のエッチング液。
- 前記次亜塩素酸塩系溶液が次亜塩素酸ナトリウム溶液を含む請求項3に記載のエッチング液。
- 基板表面からケイ化ルテニウムを除去するのに用いられるエッチング液であって、
重量で0.1〜1.0%の次亜塩素酸カリウム(KOCl)、0.2〜2.0%のフッ化水素酸(HF)、および残余の純水を含むエッチング液。 - 表面からケイ化ルテニウム層を除去する方法であって、
フッ化水素酸と次亜塩素酸塩とを含む次亜塩素酸塩系溶液に前記ケイ化ルテニウム層を曝すステップと、
前記次亜塩素酸塩系溶液に予め決められた時間だけ、前記ケイ化ルテニウム層を浸漬するステップとを含む方法。 - 前記次亜塩素酸塩系溶液に前記ケイ化ルテニウム層を曝す前記ステップが、11%次亜塩素酸カリウム、49%フッ化水素酸、および純水がそれぞれ3:1:50の体積比で混合された溶液に、前記ケイ化ルテニウムを曝すステップを含む請求項7に記載の方法。
- 前記ケイ化ルテニウム層を浸漬する前記ステップが、1000Åの厚さのケイ化ルテニウム層を前記次亜塩素酸塩系溶液に3分間浸漬するステップを含む請求項7に記載の方法。
- 前記ケイ化ルテニウム層を曝す前記ステップが、基板表面に形成された前記ケイ化ルテニウム層を曝すステップを含む請求項7に記載の方法。
- 前記ケイ化ルテニウム層を曝す前記ステップが、用具の表面上に形成された前記ケイ化ルテニウム層を曝すステップを含む請求項7に記載の方法。
- 前記ケイ化ルテニウム層を浸漬する前記ステップが、前記ケイ化ルテニウム層をオープンタンク中で浸漬するステップを含む請求項7に記載の方法。
- 前記次亜塩素酸塩系溶液に前記ケイ化ルテニウム層を曝す前記ステップが、前記ケイ化ルテニウム層を、重量で0.2〜2.0%のHF、0.1〜1.0%のKOCl、および残余の純水を含む溶液に曝すステップを含む請求項7に記載の方法。
- 前記次亜塩素酸塩系溶液に前記ケイ化ルテニウム層を曝す前記ステップが、前記ケイ化ルテニウム層を、少なくとも1150mVの酸化電位の溶液に曝すステップを含む請求項7に記載の方法。
- 前記溶液の前記酸化電位が1180〜1230mVの間である請求項14に記載の方法。
- ウェハの表面からケイ化ルテニウム層を除去する方法であって、
前記ケイ化ルテニウム層を、フッ化水素酸と次亜塩素酸塩とを含む次亜塩素酸塩系溶液に曝すステップと、
前記次亜塩素酸系溶液を、化学的流動法手段(chemical flow process tool)により、予め決められた時間だけ適用するステップとを含む方法。 - 前記ウェハの前記表面が、選択的に処理される請求項16に記載の方法。
- 前記ウェハが、スプレイ法手段で処理される請求項17に記載の方法。
- 前記ウェハが、スピンエッチ手段で処理される請求項17に記載の方法。
- 前記ウェハが、ブラシ洗浄手段で処理される請求項17に記載の方法。
- 前記ウェハの縁部が、スピンエッチ手段で選択的に処理される請求項16に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/799,791 US6498110B2 (en) | 2001-03-05 | 2001-03-05 | Ruthenium silicide wet etch |
PCT/US2002/005559 WO2002071447A2 (en) | 2001-03-05 | 2002-02-22 | Ruthenium silicide wet etch |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004533712A JP2004533712A (ja) | 2004-11-04 |
JP4054887B2 true JP4054887B2 (ja) | 2008-03-05 |
Family
ID=25176753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002570270A Expired - Fee Related JP4054887B2 (ja) | 2001-03-05 | 2002-02-22 | ケイ化ルテニウムのウェットエッチング方法及びエッチング液 |
Country Status (9)
Country | Link |
---|---|
US (4) | US6498110B2 (ja) |
EP (1) | EP1366510B1 (ja) |
JP (1) | JP4054887B2 (ja) |
KR (1) | KR100576261B1 (ja) |
CN (1) | CN1290164C (ja) |
AT (1) | ATE409957T1 (ja) |
AU (1) | AU2002245516A1 (ja) |
DE (1) | DE60229110D1 (ja) |
WO (1) | WO2002071447A2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6498110B2 (en) * | 2001-03-05 | 2002-12-24 | Micron Technology, Inc. | Ruthenium silicide wet etch |
US7320942B2 (en) * | 2002-05-21 | 2008-01-22 | Applied Materials, Inc. | Method for removal of metallic residue after plasma etching of a metal layer |
AT413360B (de) * | 2002-08-06 | 2006-02-15 | Hueck Folien Gmbh | Verfahren zur herstellung von fälschungssicheren identifikationsmerkmalen |
KR20040035280A (ko) * | 2002-10-19 | 2004-04-29 | 주성엔지니어링(주) | 증착 챔버의 인시튜 세정방법 |
US20050110142A1 (en) * | 2003-11-26 | 2005-05-26 | Lane Michael W. | Diffusion barriers formed by low temperature deposition |
SG188848A1 (en) * | 2008-03-07 | 2013-04-30 | Advanced Tech Materials | Non-selective oxide etch wet clean composition and method of use |
US8211800B2 (en) * | 2010-08-23 | 2012-07-03 | Kabushiki Kaisha Toshiba | Ru cap metal post cleaning method and cleaning chemical |
TW202035355A (zh) * | 2019-02-13 | 2020-10-01 | 日商德山股份有限公司 | 含有鎓鹽的半導體晶圓之處理液 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE205292C (ja) | ||||
GB817123A (en) * | 1956-11-20 | 1959-07-22 | Amchem Prod | Improvements in or relating to the production of a bright surface on zirconium, titanium and their alloys |
US3791948A (en) * | 1971-11-01 | 1974-02-12 | Bell Telephone Labor Inc | Preferential etching in g a p |
US3968565A (en) * | 1972-09-01 | 1976-07-13 | U.S. Philips Corporation | Method of manufacturing a device comprising a semiconductor body |
US4199337A (en) * | 1978-10-06 | 1980-04-22 | International Telephone And Telegraph Corporation | Method of fabricating high strength optical preforms |
DD205292A1 (de) * | 1981-12-24 | 1983-12-21 | Univ Berlin Humboldt | Verfahren zur chemischen bearbeitung von gap-oberflaechen |
JP2867922B2 (ja) | 1995-07-11 | 1999-03-10 | 日本電気株式会社 | ポーリング方式 |
JPH09279189A (ja) * | 1996-04-08 | 1997-10-28 | Nippon Steel Corp | 半導体基板用洗浄液 |
US6197628B1 (en) * | 1998-08-27 | 2001-03-06 | Micron Technology, Inc. | Ruthenium silicide diffusion barrier layers and methods of forming same |
JP3953265B2 (ja) * | 1999-10-06 | 2007-08-08 | 株式会社荏原製作所 | 基板洗浄方法及びその装置 |
JP3358604B2 (ja) * | 1999-11-11 | 2002-12-24 | 日本電気株式会社 | 白金族不純物回収液及びその回収方法 |
JP3619745B2 (ja) * | 1999-12-20 | 2005-02-16 | 株式会社日立製作所 | 固体表面の処理方法及び処理液並びにこれらを用いた電子デバイスの製造方法 |
US6498110B2 (en) * | 2001-03-05 | 2002-12-24 | Micron Technology, Inc. | Ruthenium silicide wet etch |
US6399492B1 (en) * | 2001-03-15 | 2002-06-04 | Micron Technology, Inc. | Ruthenium silicide processing methods |
-
2001
- 2001-03-05 US US09/799,791 patent/US6498110B2/en not_active Expired - Fee Related
-
2002
- 2002-02-22 AU AU2002245516A patent/AU2002245516A1/en not_active Abandoned
- 2002-02-22 DE DE60229110T patent/DE60229110D1/de not_active Expired - Lifetime
- 2002-02-22 EP EP02713678A patent/EP1366510B1/en not_active Expired - Lifetime
- 2002-02-22 JP JP2002570270A patent/JP4054887B2/ja not_active Expired - Fee Related
- 2002-02-22 KR KR1020037011621A patent/KR100576261B1/ko not_active IP Right Cessation
- 2002-02-22 AT AT02713678T patent/ATE409957T1/de not_active IP Right Cessation
- 2002-02-22 CN CNB02805914XA patent/CN1290164C/zh not_active Expired - Fee Related
- 2002-02-22 WO PCT/US2002/005559 patent/WO2002071447A2/en active IP Right Grant
- 2002-06-07 US US10/165,801 patent/US6740252B2/en not_active Expired - Fee Related
-
2003
- 2003-04-23 US US10/421,976 patent/US6908569B2/en not_active Expired - Fee Related
-
2005
- 2005-06-21 US US11/159,029 patent/US20050263489A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2004533712A (ja) | 2004-11-04 |
EP1366510B1 (en) | 2008-10-01 |
ATE409957T1 (de) | 2008-10-15 |
US6740252B2 (en) | 2004-05-25 |
KR20030087633A (ko) | 2003-11-14 |
CN1507655A (zh) | 2004-06-23 |
US20020148998A1 (en) | 2002-10-17 |
DE60229110D1 (de) | 2008-11-13 |
US20050263489A1 (en) | 2005-12-01 |
WO2002071447A2 (en) | 2002-09-12 |
US20020123235A1 (en) | 2002-09-05 |
AU2002245516A1 (en) | 2002-09-19 |
WO2002071447A3 (en) | 2003-04-10 |
CN1290164C (zh) | 2006-12-13 |
US6498110B2 (en) | 2002-12-24 |
WO2002071447A8 (en) | 2003-10-23 |
EP1366510A2 (en) | 2003-12-03 |
US20030205689A1 (en) | 2003-11-06 |
KR100576261B1 (ko) | 2006-05-03 |
US6908569B2 (en) | 2005-06-21 |
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