JP4049741B2 - 半導体装置および誘電体を備えた素子 - Google Patents
半導体装置および誘電体を備えた素子 Download PDFInfo
- Publication number
- JP4049741B2 JP4049741B2 JP2003432694A JP2003432694A JP4049741B2 JP 4049741 B2 JP4049741 B2 JP 4049741B2 JP 2003432694 A JP2003432694 A JP 2003432694A JP 2003432694 A JP2003432694 A JP 2003432694A JP 4049741 B2 JP4049741 B2 JP 4049741B2
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- JP
- Japan
- Prior art keywords
- layer
- iridium
- wiring
- semiconductor device
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01022—Titanium [Ti]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01049—Indium [In]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/0105—Tin [Sn]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01077—Iridium [Ir]
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- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
中で、700度以上の熱処理を施した。このようにして、250nmの強誘電体層18を形成した。
して形成することもできる。このようにすれば、界面において酸化物(例えばシリコン酸化物)が形成されたとしても、これを還元(シリコンに還元)することができる。つまり、界面における好ましくない酸化物の生成を排除することができる。
4・・・ソース領域
6・・・ドレイン領域
16・・・イリジウム層
Claims (2)
- 半導体素子領域、
前記半導体素子領域上に形成される絶縁膜およびその開口部、
前記半導体素子領域に接続される配線部、
を備えた半導体装置において、
前記配線部を酸素の欠乏した状態で形成される酸化イリジウム層で形成し、
前記配線部を前記絶縁膜上に直接形成し、前記開口部から半導体素子領域に接続したこと、
を特徴とする半導体装置。 - 誘電体を備えた素子であって、
当該誘電体の直下に形成される導電層から延長して配線部を一体に形成するとともに、導電層および配線部を酸素の欠乏した状態で形成される酸化イリジウムによって形成したこと、
を特徴とする誘電体を備えた素子。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003432694A JP4049741B2 (ja) | 2003-12-26 | 2003-12-26 | 半導体装置および誘電体を備えた素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003432694A JP4049741B2 (ja) | 2003-12-26 | 2003-12-26 | 半導体装置および誘電体を備えた素子 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10558995A Division JP3526651B2 (ja) | 1995-04-28 | 1995-04-28 | 半導体装置および配線方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004140405A JP2004140405A (ja) | 2004-05-13 |
JP4049741B2 true JP4049741B2 (ja) | 2008-02-20 |
Family
ID=32464115
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003432694A Expired - Fee Related JP4049741B2 (ja) | 2003-12-26 | 2003-12-26 | 半導体装置および誘電体を備えた素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4049741B2 (ja) |
-
2003
- 2003-12-26 JP JP2003432694A patent/JP4049741B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2004140405A (ja) | 2004-05-13 |
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