JP4017219B2 - スパッタリング装置 - Google Patents

スパッタリング装置 Download PDF

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Publication number
JP4017219B2
JP4017219B2 JP25957997A JP25957997A JP4017219B2 JP 4017219 B2 JP4017219 B2 JP 4017219B2 JP 25957997 A JP25957997 A JP 25957997A JP 25957997 A JP25957997 A JP 25957997A JP 4017219 B2 JP4017219 B2 JP 4017219B2
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JP
Japan
Prior art keywords
exhaust
vacuum chamber
rotary table
exhaust passage
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP25957997A
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English (en)
Japanese (ja)
Other versions
JPH11100666A (ja
JPH11100666A5 (enrdf_load_stackoverflow
Inventor
健太郎 新郷
初彦 柴崎
貴志 末吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Priority to JP25957997A priority Critical patent/JP4017219B2/ja
Publication of JPH11100666A publication Critical patent/JPH11100666A/ja
Publication of JPH11100666A5 publication Critical patent/JPH11100666A5/ja
Application granted granted Critical
Publication of JP4017219B2 publication Critical patent/JP4017219B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP25957997A 1997-09-25 1997-09-25 スパッタリング装置 Expired - Lifetime JP4017219B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25957997A JP4017219B2 (ja) 1997-09-25 1997-09-25 スパッタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25957997A JP4017219B2 (ja) 1997-09-25 1997-09-25 スパッタリング装置

Publications (3)

Publication Number Publication Date
JPH11100666A JPH11100666A (ja) 1999-04-13
JPH11100666A5 JPH11100666A5 (enrdf_load_stackoverflow) 2005-06-16
JP4017219B2 true JP4017219B2 (ja) 2007-12-05

Family

ID=17336085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25957997A Expired - Lifetime JP4017219B2 (ja) 1997-09-25 1997-09-25 スパッタリング装置

Country Status (1)

Country Link
JP (1) JP4017219B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024130246A (ja) * 2023-03-14 2024-09-30 国立大学法人東海国立大学機構 表面処理装置

Also Published As

Publication number Publication date
JPH11100666A (ja) 1999-04-13

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