JPH11100666A5 - - Google Patents

Info

Publication number
JPH11100666A5
JPH11100666A5 JP1997259579A JP25957997A JPH11100666A5 JP H11100666 A5 JPH11100666 A5 JP H11100666A5 JP 1997259579 A JP1997259579 A JP 1997259579A JP 25957997 A JP25957997 A JP 25957997A JP H11100666 A5 JPH11100666 A5 JP H11100666A5
Authority
JP
Japan
Prior art keywords
vacuum chamber
exhaust
rotary table
sputtering apparatus
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997259579A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11100666A (ja
JP4017219B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP25957997A priority Critical patent/JP4017219B2/ja
Priority claimed from JP25957997A external-priority patent/JP4017219B2/ja
Publication of JPH11100666A publication Critical patent/JPH11100666A/ja
Publication of JPH11100666A5 publication Critical patent/JPH11100666A5/ja
Application granted granted Critical
Publication of JP4017219B2 publication Critical patent/JP4017219B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP25957997A 1997-09-25 1997-09-25 スパッタリング装置 Expired - Lifetime JP4017219B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25957997A JP4017219B2 (ja) 1997-09-25 1997-09-25 スパッタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25957997A JP4017219B2 (ja) 1997-09-25 1997-09-25 スパッタリング装置

Publications (3)

Publication Number Publication Date
JPH11100666A JPH11100666A (ja) 1999-04-13
JPH11100666A5 true JPH11100666A5 (enrdf_load_stackoverflow) 2005-06-16
JP4017219B2 JP4017219B2 (ja) 2007-12-05

Family

ID=17336085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25957997A Expired - Lifetime JP4017219B2 (ja) 1997-09-25 1997-09-25 スパッタリング装置

Country Status (1)

Country Link
JP (1) JP4017219B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024130246A (ja) * 2023-03-14 2024-09-30 国立大学法人東海国立大学機構 表面処理装置

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