JP4013074B2 - 多結晶シリコン薄膜トランジスタの形成方法 - Google Patents
多結晶シリコン薄膜トランジスタの形成方法 Download PDFInfo
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- JP4013074B2 JP4013074B2 JP2005153368A JP2005153368A JP4013074B2 JP 4013074 B2 JP4013074 B2 JP 4013074B2 JP 2005153368 A JP2005153368 A JP 2005153368A JP 2005153368 A JP2005153368 A JP 2005153368A JP 4013074 B2 JP4013074 B2 JP 4013074B2
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims description 70
- 238000000034 method Methods 0.000 title claims description 55
- 239000010409 thin film Substances 0.000 title claims description 26
- 239000010408 film Substances 0.000 claims description 95
- 230000004888 barrier function Effects 0.000 claims description 25
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 24
- 239000011521 glass Substances 0.000 claims description 18
- 238000002425 crystallisation Methods 0.000 claims description 14
- 239000002019 doping agent Substances 0.000 claims description 14
- 230000008025 crystallization Effects 0.000 claims description 12
- 239000013078 crystal Substances 0.000 claims description 11
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 238000005468 ion implantation Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 230000007423 decrease Effects 0.000 claims description 7
- 238000004528 spin coating Methods 0.000 claims description 7
- 230000001133 acceleration Effects 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 description 11
- 239000004973 liquid crystal related substance Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 229910020286 SiOxNy Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001994 activation Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
- H01L27/1285—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02488—Insulating materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02587—Structure
- H01L21/0259—Microstructure
- H01L21/02595—Microstructure polycrystalline
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02678—Beam shaping, e.g. using a mask
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1296—Multistep manufacturing methods adapted to increase the uniformity of device parameters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66757—Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
Description
11 バッファ膜
12 多結晶シリコン膜
13 突出部
14 バリア膜
15 ドーパント
16 ソース電極
17 ドレイン電極
18 ゲート絶縁膜
19 ゲート電極
20 多結晶シリコン薄膜トランジスタ
Claims (7)
- ガラス基板上にバッファ膜及び非晶質シリコン膜を順に形成するステップと、
前記非晶質シリコン膜を部分的に溶融後、固化させるとともに結晶化させ、結晶化方向が対向する結晶粒相互の衝突により形成された複数の突出部が存在する多結晶シリコン膜を形成するステップと、
それぞれの薄膜トランジスタが2つの前記突出部を含み、2つの前記突出部が、それぞれ前記薄膜トランジスタのゲート電極形成領域の両側に離隔して配置された形態のアクティブパターンに、前記多結晶シリコン膜をパターニングするステップと、
パターニングされた前記多結晶シリコン膜上に、前記突出部を完全に覆わないようにバリア膜を形成するステップと、
前記突出部及び前記バリア膜を含む全面に、ドーパントをイオン注入することにより、ゲート電極形成領域の両側の多結晶シリコン膜部の一方側にソース電極、他方側にドレイン電極を形成するステップと、
前記バリア膜を除去するステップと、
前記バリア膜除去後の全面に、ゲート絶縁膜を形成するステップと、
前記ソース電極と前記ドレイン電極間の前記ゲート絶縁膜上に、ゲート電極を形成するステップとを含むことを特徴とする多結晶シリコン薄膜トランジスタの形成方法。 - 前記多結晶シリコン膜を形成するステップを、逐次的横方向結晶化法によって行うことを特徴とする請求項1に記載の多結晶シリコン薄膜トランジスタの形成方法。
- 前記バリア膜を、有機絶縁材料、有機樹脂及びフォトレジストで構成されたグループから選択される1つの材料によって形成することを特徴とする請求項1に記載の多結晶シリコン薄膜トランジスタの形成方法。
- 前記バリア膜を形成する材料を、スピンコーティング法により塗布することを特徴とする請求項1に記載の多結晶シリコン薄膜トランジスタの形成方法。
- 前記バリア膜を形成する材料を塗布する際に、前記スピンコーティング法の回転速度の調節により、前記突出部の露出高さ及び露出領域の範囲を調節することを特徴とする請求項4に記載の多結晶シリコン薄膜トランジスタの形成方法。
- 前記バリア膜を、10〜30000Åの厚さに形成することを特徴とする請求項1に記載の多結晶シリコン薄膜トランジスタの形成方法。
- 前記ドーパントのイオン注入の際に、加速電圧を調節することにより、前記突出部から離れるにともない、ドーパントの濃度が低くなるようにイオン注入することを特徴とする請求項1に記載の多結晶シリコン薄膜トランジスタの形成方法。
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KR1020040071602A KR100719919B1 (ko) | 2004-09-08 | 2004-09-08 | 다결정실리콘 박막트랜지스터 형성방법 |
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JP2006080482A JP2006080482A (ja) | 2006-03-23 |
JP4013074B2 true JP4013074B2 (ja) | 2007-11-28 |
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JP (1) | JP4013074B2 (ja) |
KR (1) | KR100719919B1 (ja) |
CN (1) | CN100413040C (ja) |
TW (1) | TWI268614B (ja) |
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JP4193859B2 (ja) * | 2006-04-04 | 2008-12-10 | トヨタ自動車株式会社 | モータおよびそのモータの通電制御装置 |
CN104932160B (zh) * | 2015-06-26 | 2017-11-17 | 京东方科技集团股份有限公司 | 一种阵列基板及其制备方法、显示面板和显示装置 |
CN106952964B (zh) * | 2017-05-22 | 2020-02-14 | 京东方科技集团股份有限公司 | 一种薄膜晶体管及其制备方法、阵列基板和显示面板 |
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JP3471966B2 (ja) * | 1995-03-16 | 2003-12-02 | 株式会社半導体エネルギー研究所 | 薄膜半導体装置の作製方法 |
JPH0917729A (ja) * | 1995-06-29 | 1997-01-17 | Sharp Corp | 半導体装置の製造方法 |
WO2000001016A1 (fr) * | 1998-06-30 | 2000-01-06 | Matsushita Electric Industrial Co., Ltd. | Transistor a film mince et son procede de fabrication |
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TW595002B (en) * | 2003-04-16 | 2004-06-21 | Au Optronics Corp | Fabricating method of low temperature poly-silicon film and low temperature poly-silicon thin film transistor |
TWI290768B (en) * | 2003-06-05 | 2007-12-01 | Au Optronics Corp | Method for manufacturing polysilicon film |
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TW200610153A (en) | 2006-03-16 |
US7026201B2 (en) | 2006-04-11 |
US20060051904A1 (en) | 2006-03-09 |
CN1747140A (zh) | 2006-03-15 |
TWI268614B (en) | 2006-12-11 |
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JP2006080482A (ja) | 2006-03-23 |
KR100719919B1 (ko) | 2007-05-18 |
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