JP4012158B2 - 電子顕微鏡装置および電子顕微鏡観察方法 - Google Patents

電子顕微鏡装置および電子顕微鏡観察方法 Download PDF

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Publication number
JP4012158B2
JP4012158B2 JP2004036328A JP2004036328A JP4012158B2 JP 4012158 B2 JP4012158 B2 JP 4012158B2 JP 2004036328 A JP2004036328 A JP 2004036328A JP 2004036328 A JP2004036328 A JP 2004036328A JP 4012158 B2 JP4012158 B2 JP 4012158B2
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Japan
Prior art keywords
sample
contrast material
electron microscope
sample holder
contrast
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Japanese (ja)
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JP2005228608A (ja
JP2005228608A5 (enExample
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はる香 甲斐
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Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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JP2004036328A 2004-02-13 2004-02-13 電子顕微鏡装置および電子顕微鏡観察方法 Expired - Fee Related JP4012158B2 (ja)

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JP2004036328A JP4012158B2 (ja) 2004-02-13 2004-02-13 電子顕微鏡装置および電子顕微鏡観察方法

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JP2004036328A JP4012158B2 (ja) 2004-02-13 2004-02-13 電子顕微鏡装置および電子顕微鏡観察方法

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JP2005228608A JP2005228608A (ja) 2005-08-25
JP2005228608A5 JP2005228608A5 (enExample) 2006-07-20
JP4012158B2 true JP4012158B2 (ja) 2007-11-21

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6729235B2 (ja) * 2016-09-20 2020-07-22 住友金属鉱山株式会社 試料の断面分析方法、及び試料台

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06139986A (ja) * 1992-10-23 1994-05-20 Hitachi Ltd 電子顕微鏡用試料２軸傾斜ホールダ
JP3184675B2 (ja) * 1993-09-22 2001-07-09 株式会社東芝 微細パターンの測定装置
JPH0887972A (ja) * 1994-09-20 1996-04-02 Hitachi Ltd 試料ホールダ
JP3429886B2 (ja) * 1995-02-08 2003-07-28 株式会社日立製作所 試料ホルダ
JP3469054B2 (ja) * 1997-08-08 2003-11-25 東芝マイクロエレクトロニクス株式会社 試料加工ホルダーシステム
JP3805547B2 (ja) * 1999-01-21 2006-08-02 株式会社日立製作所 試料作製装置
JP2001015056A (ja) * 1999-04-28 2001-01-19 Canon Inc 試料ホルダーおよび該試料ホルダーに用いるスペーサー
JP2001183317A (ja) * 1999-12-24 2001-07-06 Nec Corp ２次イオン質量分析装置用試料ホルダ及びその位置調整方法
JP2003100245A (ja) * 2001-09-25 2003-04-04 Hitachi Ltd 集束イオンビーム加工観察装置用試料ホールダ
JP2003263969A (ja) * 2002-03-08 2003-09-19 Jeol Ltd 試料ホルダ

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