JP2005228608A5 - - Google Patents

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Publication number
JP2005228608A5
JP2005228608A5 JP2004036328A JP2004036328A JP2005228608A5 JP 2005228608 A5 JP2005228608 A5 JP 2005228608A5 JP 2004036328 A JP2004036328 A JP 2004036328A JP 2004036328 A JP2004036328 A JP 2004036328A JP 2005228608 A5 JP2005228608 A5 JP 2005228608A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004036328A
Other languages
Japanese (ja)
Other versions
JP4012158B2 (ja
JP2005228608A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004036328A priority Critical patent/JP4012158B2/ja
Priority claimed from JP2004036328A external-priority patent/JP4012158B2/ja
Publication of JP2005228608A publication Critical patent/JP2005228608A/ja
Publication of JP2005228608A5 publication Critical patent/JP2005228608A5/ja
Application granted granted Critical
Publication of JP4012158B2 publication Critical patent/JP4012158B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004036328A 2004-02-13 2004-02-13 電子顕微鏡装置および電子顕微鏡観察方法 Expired - Fee Related JP4012158B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004036328A JP4012158B2 (ja) 2004-02-13 2004-02-13 電子顕微鏡装置および電子顕微鏡観察方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004036328A JP4012158B2 (ja) 2004-02-13 2004-02-13 電子顕微鏡装置および電子顕微鏡観察方法

Publications (3)

Publication Number Publication Date
JP2005228608A JP2005228608A (ja) 2005-08-25
JP2005228608A5 true JP2005228608A5 (enExample) 2006-07-20
JP4012158B2 JP4012158B2 (ja) 2007-11-21

Family

ID=35003137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004036328A Expired - Fee Related JP4012158B2 (ja) 2004-02-13 2004-02-13 電子顕微鏡装置および電子顕微鏡観察方法

Country Status (1)

Country Link
JP (1) JP4012158B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6729235B2 (ja) * 2016-09-20 2020-07-22 住友金属鉱山株式会社 試料の断面分析方法、及び試料台

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06139986A (ja) * 1992-10-23 1994-05-20 Hitachi Ltd 電子顕微鏡用試料2軸傾斜ホールダ
JP3184675B2 (ja) * 1993-09-22 2001-07-09 株式会社東芝 微細パターンの測定装置
JPH0887972A (ja) * 1994-09-20 1996-04-02 Hitachi Ltd 試料ホールダ
JP3429886B2 (ja) * 1995-02-08 2003-07-28 株式会社日立製作所 試料ホルダ
JP3469054B2 (ja) * 1997-08-08 2003-11-25 東芝マイクロエレクトロニクス株式会社 試料加工ホルダーシステム
JP3805547B2 (ja) * 1999-01-21 2006-08-02 株式会社日立製作所 試料作製装置
JP2001015056A (ja) * 1999-04-28 2001-01-19 Canon Inc 試料ホルダーおよび該試料ホルダーに用いるスペーサー
JP2001183317A (ja) * 1999-12-24 2001-07-06 Nec Corp 2次イオン質量分析装置用試料ホルダ及びその位置調整方法
JP2003100245A (ja) * 2001-09-25 2003-04-04 Hitachi Ltd 集束イオンビーム加工観察装置用試料ホールダ
JP2003263969A (ja) * 2002-03-08 2003-09-19 Jeol Ltd 試料ホルダ

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