JP4000060B2 - 最適に配向された研磨粒子を有する研磨物品、およびその製造方法 - Google Patents

最適に配向された研磨粒子を有する研磨物品、およびその製造方法 Download PDF

Info

Publication number
JP4000060B2
JP4000060B2 JP2002567500A JP2002567500A JP4000060B2 JP 4000060 B2 JP4000060 B2 JP 4000060B2 JP 2002567500 A JP2002567500 A JP 2002567500A JP 2002567500 A JP2002567500 A JP 2002567500A JP 4000060 B2 JP4000060 B2 JP 4000060B2
Authority
JP
Japan
Prior art keywords
abrasive particles
abrasive
recess
sheet
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002567500A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004524173A (ja
JP2004524173A5 (https=
Inventor
ポール・ディ・プリチャード
キュン・エイチ・モー
デイビッド・シー・コスケンマキ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of JP2004524173A publication Critical patent/JP2004524173A/ja
Publication of JP2004524173A5 publication Critical patent/JP2004524173A5/ja
Application granted granted Critical
Publication of JP4000060B2 publication Critical patent/JP4000060B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/001—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as supporting member
    • B24D3/002—Flexible supporting members, e.g. paper, woven, plastic materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
JP2002567500A 2001-02-21 2002-01-25 最適に配向された研磨粒子を有する研磨物品、およびその製造方法 Expired - Fee Related JP4000060B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/790,145 US6669745B2 (en) 2001-02-21 2001-02-21 Abrasive article with optimally oriented abrasive particles and method of making the same
PCT/US2002/004987 WO2002068154A1 (en) 2001-02-21 2002-01-25 Abrasive article with optimally oriented abrasive particles and method of making the same

Publications (3)

Publication Number Publication Date
JP2004524173A JP2004524173A (ja) 2004-08-12
JP2004524173A5 JP2004524173A5 (https=) 2005-12-22
JP4000060B2 true JP4000060B2 (ja) 2007-10-31

Family

ID=25149769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002567500A Expired - Fee Related JP4000060B2 (ja) 2001-02-21 2002-01-25 最適に配向された研磨粒子を有する研磨物品、およびその製造方法

Country Status (6)

Country Link
US (1) US6669745B2 (https=)
EP (2) EP1383631B1 (https=)
JP (1) JP4000060B2 (https=)
AT (1) ATE521450T1 (https=)
TW (1) TW580420B (https=)
WO (1) WO2002068154A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009091140A3 (en) * 2008-01-15 2009-10-08 Ehwa Diamond Industrial Co., Ltd. Conditioner for chemical mechanical planarization pad

Families Citing this family (80)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7491116B2 (en) * 2004-09-29 2009-02-17 Chien-Min Sung CMP pad dresser with oriented particles and associated methods
US7217180B2 (en) * 2003-02-19 2007-05-15 Baker Hughes Incorporated Diamond tape coating and methods of making and using same
US20080041354A1 (en) * 2004-08-16 2008-02-21 Toyoda Van Mopppes Ltd. Rotary Diamond Dresser
US20060197245A1 (en) * 2005-01-14 2006-09-07 Ching-Tai Cheng Method of manufacturing heat pipe having sintered powder wick
US7591865B2 (en) * 2005-01-28 2009-09-22 Saint-Gobain Abrasives, Inc. Method of forming structured abrasive article
US8287611B2 (en) * 2005-01-28 2012-10-16 Saint-Gobain Abrasives, Inc. Abrasive articles and methods for making same
EP1860970B1 (en) * 2005-03-11 2010-11-24 3M Innovative Properties Company Methods for making fasteners
TWI290337B (en) * 2005-08-09 2007-11-21 Princo Corp Pad conditioner for conditioning a CMP pad and method of making the same
US8435098B2 (en) * 2006-01-27 2013-05-07 Saint-Gobain Abrasives, Inc. Abrasive article with cured backsize layer
WO2008027714A1 (en) * 2006-08-30 2008-03-06 3M Innovative Properties Company Extended life abrasive article and method
US7636988B2 (en) * 2006-09-11 2009-12-29 3M Innovative Properties Company Methods for making fasteners
US20080178436A1 (en) * 2007-01-25 2008-07-31 3M Innovative Properties Company Fastener webs with microstructured particles and methods of making same
KR100820181B1 (ko) * 2007-01-26 2008-04-07 신한다이아몬드공업 주식회사 다이아몬드 공구 및 그 제조방법
US8268452B2 (en) * 2007-07-31 2012-09-18 Baker Hughes Incorporated Bonding agents for improved sintering of earth-boring tools, methods of forming earth-boring tools and resulting structures
TW200906546A (en) * 2007-08-07 2009-02-16 Tian-Yuan Yan Adjusting device for resin-bonded polishing pad and manufacturing method thereof
KR101607447B1 (ko) * 2008-09-19 2016-03-29 티로리트 슈라이프미텔베르케 스바로프스키 콤만디트게젤샤프트 연마공구의 제조방법
WO2010117102A1 (ko) * 2009-04-09 2010-10-14 서강대학교 산학협력단 콜로이드 입자들을 단결정들로 정렬하는 방법
US8801497B2 (en) 2009-04-30 2014-08-12 Rdc Holdings, Llc Array of abrasive members with resilient support
US9221148B2 (en) 2009-04-30 2015-12-29 Rdc Holdings, Llc Method and apparatus for processing sliders for disk drives, and to various processing media for the same
US8628597B2 (en) 2009-06-25 2014-01-14 3M Innovative Properties Company Method of sorting abrasive particles, abrasive particle distributions, and abrasive articles including the same
US20110073094A1 (en) * 2009-09-28 2011-03-31 3M Innovative Properties Company Abrasive article with solid core and methods of making the same
CN101797725A (zh) * 2010-01-19 2010-08-11 杭州博大金刚石有限公司 金刚石磨料有序排布系统及排布工艺
DE102010038324B4 (de) * 2010-07-23 2012-03-22 Hilti Aktiengesellschaft Vorrichtung zum Positionieren von Schneidpartikeln
EP2658680B1 (en) 2010-12-31 2020-12-09 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles comprising abrasive particles having particular shapes and methods of forming such articles
EP2675591B1 (en) * 2011-02-16 2022-08-17 3M Innovative Properties Company Coated abrasive article having rotationally aligned formed ceramic abrasive particles and method of manufacturing the same
EP2726248B1 (en) 2011-06-30 2019-06-19 Saint-Gobain Ceramics & Plastics, Inc. Liquid phase sintered silicon carbide abrasive particles
WO2013003830A2 (en) 2011-06-30 2013-01-03 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particles of silicon nitride
US9517546B2 (en) 2011-09-26 2016-12-13 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles including abrasive particulate materials, coated abrasives using the abrasive particulate materials and methods of forming
WO2013102177A1 (en) 2011-12-30 2013-07-04 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle and method of forming same
PL2797716T3 (pl) 2011-12-30 2021-07-05 Saint-Gobain Ceramics & Plastics, Inc. Kompozytowe ukształtowane cząstki ścierne i sposób ich formowania
BR112014016159A8 (pt) 2011-12-30 2017-07-04 Saint Gobain Ceramics formação de partículas abrasivas moldadas
EP2802436B1 (en) 2012-01-10 2019-09-25 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having complex shapes
WO2013106602A1 (en) 2012-01-10 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
WO2013149209A1 (en) 2012-03-30 2013-10-03 Saint-Gobain Abrasives, Inc. Abrasive products having fibrillated fibers
EP2852473B1 (en) 2012-05-23 2020-12-23 Saint-Gobain Ceramics & Plastics Inc. Shaped abrasive particles and methods of forming same
EP2866977B8 (en) 2012-06-29 2023-01-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
CN108015685B (zh) * 2012-10-15 2020-07-14 圣戈班磨料磨具有限公司 具有特定形状的磨粒
WO2014106173A1 (en) 2012-12-31 2014-07-03 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
PL2978566T3 (pl) 2013-03-29 2024-07-15 Saint-Gobain Abrasives, Inc. Cząstki ścierne o określonych kształtach i sposoby formowania takich cząstek
TW201502263A (zh) 2013-06-28 2015-01-16 Saint Gobain Ceramics 包含成形研磨粒子之研磨物品
KR101889698B1 (ko) 2013-09-30 2018-08-21 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자 및 이의 형성 방법
EP3086904B1 (en) 2013-12-23 2021-10-27 3M Innovative Properties Company Method of making a coated abrasive article
CN105829024B (zh) 2013-12-23 2018-04-20 3M创新有限公司 涂覆磨料制品的制备机设备
MX380754B (es) 2013-12-31 2025-03-12 Saint Gobain Abrasives Inc Artículo abrasivo que incluye partículas abrasivas perfiladas.
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
EP4306610A3 (en) 2014-04-14 2024-04-03 Saint-Gobain Ceramics and Plastics, Inc. Abrasive article including shaped abrasive particles
JP6484647B2 (ja) 2014-04-14 2019-03-13 サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド 成形研磨粒子を含む研磨物品
US9902045B2 (en) 2014-05-30 2018-02-27 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
WO2016044158A1 (en) 2014-09-15 2016-03-24 3M Innovative Properties Company Methods of making abrasive articles and bonded abrasive wheel preparable thereby
KR102420782B1 (ko) * 2014-10-21 2022-07-14 쓰리엠 이노베이티브 프로퍼티즈 컴파니 연마 예비성형품, 연마 용품, 및 접합된 연마 용품을 제조하는 방법
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
US10307889B2 (en) 2015-03-30 2019-06-04 3M Innovative Properties Company Coated abrasive article and method of making the same
CN116967949A (zh) 2015-03-31 2023-10-31 圣戈班磨料磨具有限公司 固定磨料制品和其形成方法
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
WO2016201104A1 (en) 2015-06-11 2016-12-15 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
BR112017027505B1 (pt) 2015-06-19 2021-11-16 3M Innovative Properties Company Método e sistema para fabricação de um artigo abrasivo
EP3319757B1 (en) * 2015-07-08 2020-09-02 3M Innovative Properties Company Systems and methods for making abrasive articles
CN107848094B (zh) * 2015-07-08 2020-09-11 3M创新有限公司 用于制造磨料制品的系统和方法
US20170129076A1 (en) * 2015-11-06 2017-05-11 The Procter & Gamble Company Methods for Fabricating Fibrous Structures Containing Shaped Particles
WO2017083249A1 (en) 2015-11-13 2017-05-18 3M Innovative Properties Company Method of shape sorting crushed abrasive particles
US20180326557A1 (en) * 2015-11-13 2018-11-15 3M Innovative Properties Company Bonded abrasive article and method of making the same
KR102313436B1 (ko) 2016-05-10 2021-10-19 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 연마 입자들 및 그 형성 방법
WO2017197006A1 (en) 2016-05-10 2017-11-16 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles and methods of forming same
US11235436B2 (en) 2016-07-08 2022-02-01 Saint-Gobain Abrasives, Inc. Abrasive articles and methods of forming the same
EP4349896A3 (en) 2016-09-29 2024-06-12 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
TWI636854B (zh) * 2017-06-12 2018-10-01 中國砂輪企業股份有限公司 研磨工具及其製造方法
US10865148B2 (en) 2017-06-21 2020-12-15 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
US10513026B1 (en) 2017-07-14 2019-12-24 United States Of America As Represented By The Administrator Of Nasa Surface grinding tool
CN114867582B (zh) 2019-12-27 2024-10-18 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
EP4081370A4 (en) 2019-12-27 2024-04-24 Saint-Gobain Ceramics & Plastics Inc. ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
KR102877276B1 (ko) 2019-12-27 2025-10-28 세인트-고바인 세라믹스 앤드 플라스틱스, 인크. 연마 물품 및 이의 형성 방법
KR102524817B1 (ko) * 2020-12-02 2023-04-25 새솔다이아몬드공업 주식회사 정8면체 형상의 다이아몬드를 기판에 자율지립하는 컨디셔너 제작방법
EP4457054A4 (en) 2021-12-30 2026-01-14 Saint Gobain Abrasives Inc ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
CA3241421A1 (en) 2021-12-30 2023-07-06 Anthony MARTONE Abrasive articles and methods of forming same
EP4457055A4 (en) 2021-12-30 2025-12-24 Saint Gobain Abrasives Inc ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
CN115977864B (zh) * 2023-02-09 2025-11-21 中南大学 一种强耐磨、抗冲蚀的螺杆钻具马达及制备方法

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4047902A (en) 1975-04-01 1977-09-13 Wiand Richard K Metal-plated abrasive product and method of manufacturing the product
JPS56139875A (en) * 1980-03-31 1981-10-31 Toshiba Corp Manufacturing method of diamond wheel
US4680199A (en) 1986-03-21 1987-07-14 United Technologies Corporation Method for depositing a layer of abrasive material on a substrate
JPS6420969A (en) * 1987-07-14 1989-01-24 Japan Steel Works Ltd Manufacture of electrodeposition type grindstone
CA1298980C (en) * 1988-02-26 1992-04-21 Clyde D. Calhoun Abrasive sheeting having individually positioned abrasive granules
US4925457B1 (en) 1989-01-30 1995-09-26 Ultimate Abrasive Syst Inc Method for making an abrasive tool
US5190568B1 (en) 1989-01-30 1996-03-12 Ultimate Abrasive Syst Inc Abrasive tool with contoured surface
US5049165B1 (en) 1989-01-30 1995-09-26 Ultimate Abrasive Syst Inc Composite material
JPH04336967A (ja) * 1991-05-13 1992-11-25 Toyoda Mach Works Ltd 超硬質砥粒ロールの製造方法
US5817204A (en) 1991-06-10 1998-10-06 Ultimate Abrasive Systems, L.L.C. Method for making patterned abrasive material
US5791330A (en) 1991-06-10 1998-08-11 Ultimate Abrasive Systems, L.L.C. Abrasive cutting tool
US5380390B1 (en) * 1991-06-10 1996-10-01 Ultimate Abras Systems Inc Patterned abrasive material and method
US5203880B1 (en) 1992-07-24 1995-10-17 Ultimate Abrasive Syst Inc Method and apparatus for making abrasive tools
AU674735B2 (en) 1993-03-12 1997-01-09 Minnesota Mining And Manufacturing Company Method and article for polishing stone
US5453106A (en) 1993-10-27 1995-09-26 Roberts; Ellis E. Oriented particles in hard surfaces
ZA9410384B (en) 1994-04-08 1996-02-01 Ultimate Abrasive Syst Inc Method for making powder preform and abrasive articles made therefrom
US5556438A (en) * 1994-09-21 1996-09-17 Norton Company Composite abrasive products
US5525100A (en) 1994-11-09 1996-06-11 Norton Company Abrasive products
WO1996040474A1 (en) * 1995-06-07 1996-12-19 Norton Company Cutting tool having textured cutting surface
US5725421A (en) 1996-02-27 1998-03-10 Minnesota Mining And Manufacturing Company Apparatus for rotative abrading applications
US5695533A (en) 1996-09-06 1997-12-09 Norton Company Abrasive products
US6039641A (en) 1997-04-04 2000-03-21 Sung; Chien-Min Brazed diamond tools by infiltration
US6286498B1 (en) 1997-04-04 2001-09-11 Chien-Min Sung Metal bond diamond tools that contain uniform or patterned distribution of diamond grits and method of manufacture thereof
US6368198B1 (en) * 1999-11-22 2002-04-09 Kinik Company Diamond grid CMP pad dresser
US6537140B1 (en) * 1997-05-14 2003-03-25 Saint-Gobain Abrasives Technology Company Patterned abrasive tools
JP3052896B2 (ja) 1997-06-13 2000-06-19 日本電気株式会社 研磨布表面のドレス治具及びその製造方法
US6110031A (en) 1997-06-25 2000-08-29 3M Innovative Properties Company Superabrasive cutting surface
US6159087A (en) 1998-02-11 2000-12-12 Applied Materials, Inc. End effector for pad conditioning
JP4456691B2 (ja) * 1999-06-09 2010-04-28 旭ダイヤモンド工業株式会社 コンディショナの製造方法
JP2001219376A (ja) 2000-02-07 2001-08-14 Mitsubishi Materials Corp 電着砥石
US6096107A (en) 2000-01-03 2000-08-01 Norton Company Superabrasive products

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009091140A3 (en) * 2008-01-15 2009-10-08 Ehwa Diamond Industrial Co., Ltd. Conditioner for chemical mechanical planarization pad

Also Published As

Publication number Publication date
JP2004524173A (ja) 2004-08-12
WO2002068154A8 (en) 2004-05-27
US20030009949A1 (en) 2003-01-16
EP1383631A1 (en) 2004-01-28
EP2263832A2 (en) 2010-12-22
WO2002068154A1 (en) 2002-09-06
EP2263832A3 (en) 2011-04-13
ATE521450T1 (de) 2011-09-15
US6669745B2 (en) 2003-12-30
EP1383631B1 (en) 2011-08-24
TW580420B (en) 2004-03-21

Similar Documents

Publication Publication Date Title
JP4000060B2 (ja) 最適に配向された研磨粒子を有する研磨物品、およびその製造方法
JP5105491B2 (ja) パターン化した研磨工具
JP4611590B2 (ja) 酸素スカベンジャー金属を含有する融合研磨体
TWI522447B (zh) 延長壽命之研磨物件及方法
US5037451A (en) Manufacture of abrasive products
US6478831B2 (en) Abrasive surface and article and methods for making them
US3178273A (en) Method of producing tool surface layers containing diamond particles
KR100310788B1 (ko) 분말예비성형체및그것으로제조된연마제품의제조방법.
JP2004174712A (ja) パターン化された研磨材料およびその製造方法
RU2005113159A (ru) Паяные алмазные инструменты и способы их получения
JPH09103965A (ja) 多孔質超砥粒砥石とその製造方法
JP3880977B2 (ja) 真空チャック
JP3729700B2 (ja) ドレッシング工具の製造方法
JP2003181765A (ja) 多孔質超砥粒砥石とその製造方法
JPH06316470A (ja) 多結晶ダイヤモンド成形体の製造方法
CA1086509A (en) Diamonds and cubic boron nitride bonded by ag-mn-zr alloy to metal supports
TWI286097B (en) Polishing tool and method for making the same
JPH09314471A (ja) ブレードおよびその製造方法
JPH11114833A (ja) 薄刃砥石およびその製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050113

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050113

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070228

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070417

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070711

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070807

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070810

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100817

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110817

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110817

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120817

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130817

Year of fee payment: 6

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees