JP3975029B2 - 動吸振器付き走査型プローブ顕微鏡及びその測定方法 - Google Patents

動吸振器付き走査型プローブ顕微鏡及びその測定方法 Download PDF

Info

Publication number
JP3975029B2
JP3975029B2 JP19164099A JP19164099A JP3975029B2 JP 3975029 B2 JP3975029 B2 JP 3975029B2 JP 19164099 A JP19164099 A JP 19164099A JP 19164099 A JP19164099 A JP 19164099A JP 3975029 B2 JP3975029 B2 JP 3975029B2
Authority
JP
Japan
Prior art keywords
vibration
vibration absorber
sample
dynamic vibration
dynamic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP19164099A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001021477A (ja
JP2001021477A5 (enExample
Inventor
尚史 岡田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP19164099A priority Critical patent/JP3975029B2/ja
Publication of JP2001021477A publication Critical patent/JP2001021477A/ja
Publication of JP2001021477A5 publication Critical patent/JP2001021477A5/ja
Application granted granted Critical
Publication of JP3975029B2 publication Critical patent/JP3975029B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP19164099A 1999-07-06 1999-07-06 動吸振器付き走査型プローブ顕微鏡及びその測定方法 Expired - Fee Related JP3975029B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19164099A JP3975029B2 (ja) 1999-07-06 1999-07-06 動吸振器付き走査型プローブ顕微鏡及びその測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19164099A JP3975029B2 (ja) 1999-07-06 1999-07-06 動吸振器付き走査型プローブ顕微鏡及びその測定方法

Publications (3)

Publication Number Publication Date
JP2001021477A JP2001021477A (ja) 2001-01-26
JP2001021477A5 JP2001021477A5 (enExample) 2005-10-27
JP3975029B2 true JP3975029B2 (ja) 2007-09-12

Family

ID=16278029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19164099A Expired - Fee Related JP3975029B2 (ja) 1999-07-06 1999-07-06 動吸振器付き走査型プローブ顕微鏡及びその測定方法

Country Status (1)

Country Link
JP (1) JP3975029B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4688643B2 (ja) * 2005-11-10 2011-05-25 エスアイアイ・ナノテクノロジー株式会社 加振型カンチレバーホルダ及び走査型プローブ顕微鏡
JP6955137B2 (ja) * 2016-11-14 2021-10-27 シンフォニアテクノロジー株式会社 圧電式アクチュエータ及び圧電式バルブ
CN108015627B (zh) * 2017-12-25 2023-11-10 东莞捷荣技术股份有限公司 一种用于cnc机台探头的检测控制装置及其控制方法

Also Published As

Publication number Publication date
JP2001021477A (ja) 2001-01-26

Similar Documents

Publication Publication Date Title
Schitter et al. Design and modeling of a high-speed AFM-scanner
Fleming et al. Bridging the gap between conventional and video-speed scanning probe microscopes
JP5202337B2 (ja) 検知システムの使用方法および補償システム
US7979916B2 (en) Preamplifying cantilever and applications thereof
EP2428804B1 (en) A method for driving a scanning probe microscope at elevated scan frequencies
JP5164147B2 (ja) 走査型プローブ顕微鏡およびカンチレバー駆動装置
JP3975029B2 (ja) 動吸振器付き走査型プローブ顕微鏡及びその測定方法
US7631547B2 (en) Scanning probe apparatus and drive stage therefor
JP2004163390A (ja) 非接触式表面測定装置及びその測定方法
JP4391925B2 (ja) 原子間力顕微鏡
JP2002082036A (ja) 走査型プローブ顕微鏡用スキャナー
JP3179380B2 (ja) 走査型プローブ顕微鏡
JP4378385B2 (ja) 走査型プローブ装置における駆動ステージ、走査型プローブ装置
JP3738593B2 (ja) 振動発生体の励振力測定方法
JP3497913B2 (ja) 走査型プローブ顕微鏡およびその測定方法
JPH09119938A (ja) 走査型プローブ顕微鏡
JP7531919B2 (ja) 走査型プローブ顕微鏡及び走査型プローブ顕微鏡の駆動制御装置
JP3809893B2 (ja) 走査プローブ顕微鏡
JP2001021477A5 (enExample)
JPH08248040A (ja) 走査型プローブ顕微鏡およびその測定方法
JPH1038900A (ja) 走査型プローブ顕微鏡の探針・試料接近機構
Mahmood et al. Spiral scanning: An alternative to conventional raster scanning in high-speed scanning probe microscopes
JPH11271343A (ja) 走査型プローブ顕微鏡
Tapson et al. Improved scanning tunneling microscope feedback performance by means of separate actuators
JP2009162772A (ja) 走査プローブ装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050826

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050826

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070604

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20070612

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20070618

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100622

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees