JP2001021477A5 - - Google Patents

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Publication number
JP2001021477A5
JP2001021477A5 JP1999191640A JP19164099A JP2001021477A5 JP 2001021477 A5 JP2001021477 A5 JP 2001021477A5 JP 1999191640 A JP1999191640 A JP 1999191640A JP 19164099 A JP19164099 A JP 19164099A JP 2001021477 A5 JP2001021477 A5 JP 2001021477A5
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JP
Japan
Prior art keywords
vibration
sample
measurement data
probe microscope
scanning probe
Prior art date
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Granted
Application number
JP1999191640A
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English (en)
Japanese (ja)
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JP3975029B2 (ja
JP2001021477A (ja
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Priority to JP19164099A priority Critical patent/JP3975029B2/ja
Priority claimed from JP19164099A external-priority patent/JP3975029B2/ja
Publication of JP2001021477A publication Critical patent/JP2001021477A/ja
Publication of JP2001021477A5 publication Critical patent/JP2001021477A5/ja
Application granted granted Critical
Publication of JP3975029B2 publication Critical patent/JP3975029B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP19164099A 1999-07-06 1999-07-06 動吸振器付き走査型プローブ顕微鏡及びその測定方法 Expired - Fee Related JP3975029B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19164099A JP3975029B2 (ja) 1999-07-06 1999-07-06 動吸振器付き走査型プローブ顕微鏡及びその測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19164099A JP3975029B2 (ja) 1999-07-06 1999-07-06 動吸振器付き走査型プローブ顕微鏡及びその測定方法

Publications (3)

Publication Number Publication Date
JP2001021477A JP2001021477A (ja) 2001-01-26
JP2001021477A5 true JP2001021477A5 (enExample) 2005-10-27
JP3975029B2 JP3975029B2 (ja) 2007-09-12

Family

ID=16278029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19164099A Expired - Fee Related JP3975029B2 (ja) 1999-07-06 1999-07-06 動吸振器付き走査型プローブ顕微鏡及びその測定方法

Country Status (1)

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JP (1) JP3975029B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4688643B2 (ja) * 2005-11-10 2011-05-25 エスアイアイ・ナノテクノロジー株式会社 加振型カンチレバーホルダ及び走査型プローブ顕微鏡
JP6955137B2 (ja) * 2016-11-14 2021-10-27 シンフォニアテクノロジー株式会社 圧電式アクチュエータ及び圧電式バルブ
CN108015627B (zh) * 2017-12-25 2023-11-10 东莞捷荣技术股份有限公司 一种用于cnc机台探头的检测控制装置及其控制方法

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