JP3961139B2 - ポジ型感光性組成物 - Google Patents
ポジ型感光性組成物 Download PDFInfo
- Publication number
- JP3961139B2 JP3961139B2 JP36761998A JP36761998A JP3961139B2 JP 3961139 B2 JP3961139 B2 JP 3961139B2 JP 36761998 A JP36761998 A JP 36761998A JP 36761998 A JP36761998 A JP 36761998A JP 3961139 B2 JP3961139 B2 JP 3961139B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- acid
- photosensitive composition
- positive photosensitive
- amino
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0048—Photosensitive materials characterised by the solvents or agents facilitating spreading, e.g. tensio-active agents
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials For Photolithography (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36761998A JP3961139B2 (ja) | 1998-12-24 | 1998-12-24 | ポジ型感光性組成物 |
US09/471,007 US6699635B1 (en) | 1998-12-24 | 1999-12-23 | Positive photosensitive composition |
KR1019990061728A KR100587896B1 (ko) | 1998-12-24 | 1999-12-24 | 포지티브 감광성 조성물 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP36761998A JP3961139B2 (ja) | 1998-12-24 | 1998-12-24 | ポジ型感光性組成物 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000187329A JP2000187329A (ja) | 2000-07-04 |
JP2000187329A5 JP2000187329A5 (US06780888-20040824-C00057.png) | 2005-02-24 |
JP3961139B2 true JP3961139B2 (ja) | 2007-08-22 |
Family
ID=18489771
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP36761998A Expired - Lifetime JP3961139B2 (ja) | 1998-12-24 | 1998-12-24 | ポジ型感光性組成物 |
Country Status (3)
Country | Link |
---|---|
US (1) | US6699635B1 (US06780888-20040824-C00057.png) |
JP (1) | JP3961139B2 (US06780888-20040824-C00057.png) |
KR (1) | KR100587896B1 (US06780888-20040824-C00057.png) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4576737B2 (ja) * | 2000-06-09 | 2010-11-10 | Jsr株式会社 | 感放射線性樹脂組成物 |
JP2002006483A (ja) * | 2000-06-20 | 2002-01-09 | Sumitomo Chem Co Ltd | フォトレジスト組成物 |
JP2004514952A (ja) * | 2000-11-29 | 2004-05-20 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | ポリマー中の保護基、フォトレジスト、およびマイクロリソグラフィー法 |
KR100795109B1 (ko) * | 2001-02-23 | 2008-01-17 | 후지필름 가부시키가이샤 | 포지티브 감광성 조성물 |
JP4839522B2 (ja) * | 2001-04-12 | 2011-12-21 | Jsr株式会社 | 感放射線性樹脂組成物 |
JP4574067B2 (ja) * | 2001-06-08 | 2010-11-04 | ルネサスエレクトロニクス株式会社 | レジスト組成物 |
JP4262422B2 (ja) * | 2001-06-28 | 2009-05-13 | 富士フイルム株式会社 | ポジ型フォトレジスト組成物及びそれを用いたパターン形成方法 |
TW588218B (en) * | 2001-08-21 | 2004-05-21 | Fuji Photo Film Co Ltd | Stimulation-sensitive composition and compound |
KR101266564B1 (ko) * | 2005-08-03 | 2013-05-22 | 제이에스알 가부시끼가이샤 | 도금 조형물 제조용 포지티브형 감방사선성 수지 조성물,전사 필름 및 도금 조형물의 제조 방법 |
JP5544130B2 (ja) * | 2009-09-01 | 2014-07-09 | 富士フイルム株式会社 | 感活性光線性または感放射線性樹脂組成物及びそれを用いたパターン形成方法 |
JP2019160004A (ja) | 2018-03-15 | 2019-09-19 | 富士フイルム株式会社 | 画像判別装置,画像判別方法ならびに画像判別装置のプログラムおよびそのプログラムを格納した記録媒体 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5258257A (en) * | 1991-09-23 | 1993-11-02 | Shipley Company Inc. | Radiation sensitive compositions comprising polymer having acid labile groups |
EP0537524A1 (en) * | 1991-10-17 | 1993-04-21 | Shipley Company Inc. | Radiation sensitive compositions and methods |
JP3317576B2 (ja) * | 1994-05-12 | 2002-08-26 | 富士写真フイルム株式会社 | ポジ型感光性樹脂組成物 |
KR100206664B1 (ko) * | 1995-06-28 | 1999-07-01 | 세키사와 다다시 | 화학증폭형 레지스트 조성물 및 레지스트 패턴의 형성방법 |
JP3125678B2 (ja) * | 1996-04-08 | 2001-01-22 | 信越化学工業株式会社 | 化学増幅ポジ型レジスト材料 |
US6576392B1 (en) * | 1996-12-07 | 2003-06-10 | Fuji Photo Film Co., Ltd. | Positive photoresist composition |
WO1998037458A1 (fr) * | 1997-02-20 | 1998-08-27 | Nippon Zeon Co., Ltd. | Composition d'un agent de reserve |
JPH11218927A (ja) * | 1998-02-04 | 1999-08-10 | Nippon Zeon Co Ltd | レジスト組成物 |
US6103447A (en) * | 1998-02-25 | 2000-08-15 | International Business Machines Corp. | Approach to formulating irradiation sensitive positive resists |
JP4019403B2 (ja) * | 1999-03-08 | 2007-12-12 | Jsr株式会社 | レジストパターンの形成方法 |
-
1998
- 1998-12-24 JP JP36761998A patent/JP3961139B2/ja not_active Expired - Lifetime
-
1999
- 1999-12-23 US US09/471,007 patent/US6699635B1/en not_active Expired - Lifetime
- 1999-12-24 KR KR1019990061728A patent/KR100587896B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US6699635B1 (en) | 2004-03-02 |
JP2000187329A (ja) | 2000-07-04 |
KR100587896B1 (ko) | 2006-06-09 |
KR20000048397A (ko) | 2000-07-25 |
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