JP3958830B2 - 磁気ヘッドスライダの製造方法 - Google Patents
磁気ヘッドスライダの製造方法 Download PDFInfo
- Publication number
- JP3958830B2 JP3958830B2 JP10476597A JP10476597A JP3958830B2 JP 3958830 B2 JP3958830 B2 JP 3958830B2 JP 10476597 A JP10476597 A JP 10476597A JP 10476597 A JP10476597 A JP 10476597A JP 3958830 B2 JP3958830 B2 JP 3958830B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic head
- slider
- base
- dry film
- film resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000000034 method Methods 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 11
- 238000001312 dry etching Methods 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 29
- 230000001681 protective effect Effects 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000992 sputter etching Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Images
Landscapes
- Magnetic Heads (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10476597A JP3958830B2 (ja) | 1997-04-22 | 1997-04-22 | 磁気ヘッドスライダの製造方法 |
| CN97190954A CN1119806C (zh) | 1996-10-15 | 1997-10-15 | 磁头滑块的制备方法 |
| KR1019980702168A KR100280040B1 (ko) | 1996-10-15 | 1997-10-15 | 자기헤드슬라이더 제조방법 |
| PCT/JP1997/003703 WO1998016931A1 (en) | 1996-10-15 | 1997-10-15 | Method of manufacturing a magnetic head slider |
| US09/043,512 US6287475B1 (en) | 1996-10-15 | 1997-10-15 | Magnetic head slider manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10476597A JP3958830B2 (ja) | 1997-04-22 | 1997-04-22 | 磁気ヘッドスライダの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10302237A JPH10302237A (ja) | 1998-11-13 |
| JPH10302237A5 JPH10302237A5 (enExample) | 2005-03-17 |
| JP3958830B2 true JP3958830B2 (ja) | 2007-08-15 |
Family
ID=14389584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10476597A Expired - Fee Related JP3958830B2 (ja) | 1996-10-15 | 1997-04-22 | 磁気ヘッドスライダの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3958830B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001126225A (ja) | 1999-10-21 | 2001-05-11 | Tdk Corp | 磁気ヘッドスライダの製造方法およびバーの固定方法ならびに硬化剤 |
| US6445542B1 (en) | 2000-03-06 | 2002-09-03 | Read-Rite Corporation | Air bearing slider |
| JP2006209816A (ja) * | 2005-01-25 | 2006-08-10 | Hitachi Global Storage Technologies Netherlands Bv | 磁気抵抗効果型ヘッドの製造方法 |
| US7477486B1 (en) | 2005-12-07 | 2009-01-13 | Western Digital (Fremont), Llc | Air bearing slider with a side pad having a shallow recess depth |
-
1997
- 1997-04-22 JP JP10476597A patent/JP3958830B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10302237A (ja) | 1998-11-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040413 |
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| A621 | Written request for application examination |
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| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
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| A61 | First payment of annual fees (during grant procedure) |
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| R150 | Certificate of patent or registration of utility model |
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| LAPS | Cancellation because of no payment of annual fees |