JP3929675B2 - 圧電振動子 - Google Patents

圧電振動子 Download PDF

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Publication number
JP3929675B2
JP3929675B2 JP2000106774A JP2000106774A JP3929675B2 JP 3929675 B2 JP3929675 B2 JP 3929675B2 JP 2000106774 A JP2000106774 A JP 2000106774A JP 2000106774 A JP2000106774 A JP 2000106774A JP 3929675 B2 JP3929675 B2 JP 3929675B2
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JP
Japan
Prior art keywords
thin film
metal thin
piezoelectric vibrator
electrode
lead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000106774A
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English (en)
Japanese (ja)
Other versions
JP2001308673A5 (enExample
JP2001308673A (ja
Inventor
宏明 植竹
盛吾 福地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP2000106774A priority Critical patent/JP3929675B2/ja
Publication of JP2001308673A publication Critical patent/JP2001308673A/ja
Publication of JP2001308673A5 publication Critical patent/JP2001308673A5/ja
Application granted granted Critical
Publication of JP3929675B2 publication Critical patent/JP3929675B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2000106774A 2000-02-17 2000-04-07 圧電振動子 Expired - Lifetime JP3929675B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000106774A JP3929675B2 (ja) 2000-02-17 2000-04-07 圧電振動子

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000040029 2000-02-17
JP2000-40029 2000-02-17
JP2000106774A JP3929675B2 (ja) 2000-02-17 2000-04-07 圧電振動子

Publications (3)

Publication Number Publication Date
JP2001308673A JP2001308673A (ja) 2001-11-02
JP2001308673A5 JP2001308673A5 (enExample) 2005-05-19
JP3929675B2 true JP3929675B2 (ja) 2007-06-13

Family

ID=26585595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000106774A Expired - Lifetime JP3929675B2 (ja) 2000-02-17 2000-04-07 圧電振動子

Country Status (1)

Country Link
JP (1) JP3929675B2 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007037003A (ja) * 2005-07-29 2007-02-08 Citizen Miyota Co Ltd 圧電振動子
JP4552916B2 (ja) * 2005-12-21 2010-09-29 株式会社大真空 圧電振動デバイス
JP4933849B2 (ja) * 2006-06-30 2012-05-16 シチズンファインテックミヨタ株式会社 圧入型シリンダータイプ圧電振動子の気密端子、圧入型シリンダータイプ圧電振動子及び気密端子の製造方法
JP5155620B2 (ja) * 2006-08-31 2013-03-06 セイコーインスツル株式会社 厚み滑り振動片の製造方法
JP5263529B2 (ja) * 2009-02-13 2013-08-14 セイコーインスツル株式会社 圧電振動子の製造方法
JP5341685B2 (ja) * 2009-09-09 2013-11-13 日本電波工業株式会社 圧電デバイス
JP5573514B2 (ja) * 2010-09-03 2014-08-20 株式会社大真空 音叉型圧電振動子
JP2012054893A (ja) * 2010-09-03 2012-03-15 Nippon Dempa Kogyo Co Ltd 音叉型水晶振動片及び水晶デバイス
JP6175743B2 (ja) 2012-06-06 2017-08-09 セイコーエプソン株式会社 振動素子の製造方法
JP6627902B2 (ja) * 2018-03-19 2020-01-08 セイコーエプソン株式会社 振動素子、振動子、電子デバイス、電子機器、移動体および振動素子の製造方法

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Publication number Publication date
JP2001308673A (ja) 2001-11-02

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