JP3914570B2 - Mura検出装置および方法 - Google Patents
Mura検出装置および方法 Download PDFInfo
- Publication number
- JP3914570B2 JP3914570B2 JP50330797A JP50330797A JP3914570B2 JP 3914570 B2 JP3914570 B2 JP 3914570B2 JP 50330797 A JP50330797 A JP 50330797A JP 50330797 A JP50330797 A JP 50330797A JP 3914570 B2 JP3914570 B2 JP 3914570B2
- Authority
- JP
- Japan
- Prior art keywords
- image
- mura
- pixel
- substrate
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 58
- 238000001514 detection method Methods 0.000 title description 27
- 230000007547 defect Effects 0.000 claims description 245
- 239000000758 substrate Substances 0.000 claims description 53
- 230000004044 response Effects 0.000 claims description 16
- 230000002159 abnormal effect Effects 0.000 claims description 10
- 239000004973 liquid crystal related substance Substances 0.000 claims description 8
- 230000015654 memory Effects 0.000 claims description 8
- 230000002950 deficient Effects 0.000 claims 4
- 238000007689 inspection Methods 0.000 description 27
- 238000010586 diagram Methods 0.000 description 17
- 238000012805 post-processing Methods 0.000 description 17
- 238000012545 processing Methods 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 14
- 238000005070 sampling Methods 0.000 description 13
- 238000001914 filtration Methods 0.000 description 10
- 238000011109 contamination Methods 0.000 description 8
- 238000012360 testing method Methods 0.000 description 8
- 230000000875 corresponding effect Effects 0.000 description 7
- 238000005286 illumination Methods 0.000 description 6
- 230000000737 periodic effect Effects 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- 239000000835 fiber Substances 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 230000001788 irregular Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000002372 labelling Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000004590 computer program Methods 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 238000013100 final test Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000010909 process residue Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 238000004422 calculation algorithm Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000002059 diagnostic imaging Methods 0.000 description 1
- 238000003708 edge detection Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003623 enhancer Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000005055 memory storage Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136254—Checking; Testing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136259—Repairing; Defects
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Theoretical Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Processing (AREA)
- Liquid Crystal (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Image Analysis (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US18195P | 1995-06-13 | 1995-06-13 | |
| US60/000,181 | 1996-05-22 | ||
| US08/651,417 US5917935A (en) | 1995-06-13 | 1996-05-22 | Mura detection apparatus and method |
| US08/651,417 | 1996-05-22 | ||
| PCT/US1996/010219 WO1997000452A2 (en) | 1995-06-13 | 1996-06-11 | Mura detection apparatus and method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH10509531A JPH10509531A (ja) | 1998-09-14 |
| JPH10509531A5 JPH10509531A5 (enExample) | 2004-07-08 |
| JP3914570B2 true JP3914570B2 (ja) | 2007-05-16 |
Family
ID=26667315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50330797A Expired - Fee Related JP3914570B2 (ja) | 1995-06-13 | 1996-06-11 | Mura検出装置および方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5917935A (enExample) |
| JP (1) | JP3914570B2 (enExample) |
| KR (1) | KR100399244B1 (enExample) |
| WO (1) | WO1997000452A2 (enExample) |
Families Citing this family (94)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6298149B1 (en) * | 1996-03-21 | 2001-10-02 | Cognex Corporation | Semiconductor device image inspection with contrast enhancement |
| US6154561A (en) * | 1997-04-07 | 2000-11-28 | Photon Dynamics, Inc. | Method and apparatus for detecting Mura defects |
| KR19990053079A (ko) * | 1997-12-23 | 1999-07-15 | 윤종용 | 인식 마크가 형성된 반도체 웨이퍼 및 그 인식 마크를 이용한 웨이퍼 절삭 방법 |
| US6381374B1 (en) * | 1998-10-30 | 2002-04-30 | General Electric Company | Histogram analysis method for defective pixel identification |
| JP3825935B2 (ja) * | 1999-04-08 | 2006-09-27 | キヤノン株式会社 | 画像処理装置及び画像処理方法及び記録媒体及び画像処理システム |
| US6477275B1 (en) * | 1999-06-16 | 2002-11-05 | Coreco Imaging, Inc. | Systems and methods for locating a pattern in an image |
| US6720989B2 (en) * | 2000-04-19 | 2004-04-13 | K-G Devices Corp. | System and method for automatically inspecting an array of periodic elements |
| US6694059B1 (en) * | 2000-05-19 | 2004-02-17 | International Business Machines Corporation | Robustness enhancement and evaluation of image information extraction |
| GB2368635B (en) * | 2000-11-01 | 2004-12-22 | Nokia Mobile Phones Ltd | Testing an image display device |
| US6748110B1 (en) * | 2000-11-09 | 2004-06-08 | Cognex Technology And Investment | Object and object feature detector system and method |
| US6928192B2 (en) * | 2001-04-19 | 2005-08-09 | Koninklijke Philips Electronics N.V. | User interface for interactive removal of defects in an image sequence |
| US6987875B1 (en) | 2001-05-22 | 2006-01-17 | Cognex Technology And Investment Corporation | Probe mark inspection method and apparatus |
| JP2003004657A (ja) * | 2001-06-25 | 2003-01-08 | Hitachi Ltd | 観察作業支援システム |
| JP2004534949A (ja) * | 2001-07-05 | 2004-11-18 | フォトン・ダイナミクス・インコーポレーテッド | モアレ抑制方法および装置 |
| JP3431075B2 (ja) * | 2001-08-27 | 2003-07-28 | 科学技術振興事業団 | 液晶ディスプレイパネルムラの分類処理方法、その装置及びプログラム |
| JP2003152970A (ja) * | 2001-08-28 | 2003-05-23 | Fuji Photo Film Co Ltd | 画像読取装置 |
| JP3879645B2 (ja) * | 2002-09-30 | 2007-02-14 | 株式会社日立製作所 | 液晶表示素子の製造方法および液晶表示素子の製造システム |
| US7444034B1 (en) | 2002-11-06 | 2008-10-28 | Digivision, Inc. | Systems and methods for image enhancement in multiple dimensions |
| CA2505260A1 (en) * | 2002-11-06 | 2004-05-27 | Digivision, Inc. | Systems and methods for image enhancement in multiple dimensions |
| KR100471084B1 (ko) * | 2002-12-16 | 2005-03-10 | 삼성전자주식회사 | 영상처리시스템 및 영상처리방법 |
| US7602962B2 (en) * | 2003-02-25 | 2009-10-13 | Hitachi High-Technologies Corporation | Method of classifying defects using multiple inspection machines |
| US7983446B2 (en) * | 2003-07-18 | 2011-07-19 | Lockheed Martin Corporation | Method and apparatus for automatic object identification |
| US8184923B2 (en) * | 2004-04-19 | 2012-05-22 | Semiconductor Energy Laboratory Co., Ltd. | Image analysis method, image analysis program, pixel evaluation system having the image analysis method, and pixel evaluation system having the image analysis program |
| JP4480002B2 (ja) * | 2004-05-28 | 2010-06-16 | Hoya株式会社 | ムラ欠陥検査方法及び装置、並びにフォトマスクの製造方法 |
| JP4480001B2 (ja) * | 2004-05-28 | 2010-06-16 | Hoya株式会社 | ムラ欠陥検査マスク、ムラ欠陥検査装置及び方法、並びにフォトマスクの製造方法 |
| KR20060044032A (ko) * | 2004-11-11 | 2006-05-16 | 삼성전자주식회사 | 표시패널용 검사 장치 및 이의 검사 방법 |
| CN100476444C (zh) * | 2004-11-22 | 2009-04-08 | 台湾薄膜电晶体液晶显示器产业协会 | 利用视觉模型检测平面显示器的方法与装置 |
| KR101076478B1 (ko) | 2004-11-25 | 2011-10-25 | 엘아이지에이디피 주식회사 | 스트레칭 기법을 활용한 평판 디스플레이 패널의 화상결함 검사 방법 및 기록매체 |
| US7911498B2 (en) * | 2005-12-12 | 2011-03-22 | Novatek Microelectronics Corp. | Compensation device for non-uniform regions in flat panel display and method thereof |
| CN100565630C (zh) * | 2006-01-04 | 2009-12-02 | 台湾薄膜电晶体液晶显示器产业协会 | 显示器多角度测量系统与方法 |
| KR101182324B1 (ko) * | 2006-07-28 | 2012-09-20 | 엘지디스플레이 주식회사 | 평판표시장치의 화질제어 방법 |
| US7800661B2 (en) * | 2006-12-22 | 2010-09-21 | Qualcomm Incorporated | Programmable pattern matching device |
| US8026927B2 (en) | 2007-03-29 | 2011-09-27 | Sharp Laboratories Of America, Inc. | Reduction of mura effects |
| KR101702887B1 (ko) * | 2007-04-18 | 2017-02-06 | 마이크로닉 마이데이타 에이비 | 무라 검출 및 계측을 위한 방법 및 장치 |
| TWI366181B (en) * | 2007-06-12 | 2012-06-11 | Au Optronics Corp | Method and apparatus for image enlargement and enhancement |
| JP2009036582A (ja) * | 2007-07-31 | 2009-02-19 | Toshiba Corp | 平面表示パネルの検査方法、検査装置及び検査プログラム |
| US8049695B2 (en) * | 2007-10-15 | 2011-11-01 | Sharp Laboratories Of America, Inc. | Correction of visible mura distortions in displays by use of flexible system for memory resources and mura characteristics |
| KR20100092014A (ko) * | 2007-11-12 | 2010-08-19 | 마이크로닉 레이저 시스템즈 에이비 | 패턴 에러들을 검출하기 위한 방법들 및 장치들 |
| JP5250871B2 (ja) * | 2008-12-24 | 2013-07-31 | インターナショナル・ビジネス・マシーンズ・コーポレーション | ムラ評価装置、ムラ評価方法、ディスプレイ検査装置、およびプログラム |
| CN101840078B (zh) * | 2009-03-20 | 2016-02-10 | 北京京东方光电科技有限公司 | 水波纹级别测试方法 |
| US8582182B2 (en) * | 2009-05-20 | 2013-11-12 | Dacuda Ag | Automatic sizing of images acquired by a handheld scanner |
| US9300834B2 (en) * | 2009-05-20 | 2016-03-29 | Dacuda Ag | Image processing for handheld scanner |
| US20110012908A1 (en) * | 2009-07-20 | 2011-01-20 | Sharp Laboratories Of America, Inc. | System for compensation of differential aging mura of displays |
| US9035673B2 (en) * | 2010-01-25 | 2015-05-19 | Palo Alto Research Center Incorporated | Method of in-process intralayer yield detection, interlayer shunt detection and correction |
| US8891866B2 (en) | 2011-08-31 | 2014-11-18 | Sony Corporation | Image processing apparatus, image processing method, and program |
| US8780097B2 (en) * | 2011-10-20 | 2014-07-15 | Sharp Laboratories Of America, Inc. | Newton ring mura detection system |
| US8867817B1 (en) * | 2012-10-29 | 2014-10-21 | Amazon Technologies, Inc. | Display analysis using scanned images |
| CN103018265B (zh) * | 2012-11-28 | 2015-05-20 | 上海华力微电子有限公司 | 半导体缺陷定位的方法 |
| KR101966075B1 (ko) * | 2012-12-06 | 2019-04-05 | 엘지디스플레이 주식회사 | 표시장치의 얼룩 검출 장치 및 방법 |
| KR101958634B1 (ko) * | 2012-12-13 | 2019-03-15 | 엘지디스플레이 주식회사 | 디스플레이 장치의 무라 검출 장치 및 방법 |
| CN103106859B (zh) * | 2013-02-28 | 2015-11-25 | 北京星河康帝思科技开发股份有限公司 | 显示屏的检测方法和装置 |
| WO2014140047A2 (en) | 2013-03-12 | 2014-09-18 | Micronic Mydata AB | Method and device for writing photomasks with reduced mura errors |
| EP2972589B1 (en) | 2013-03-12 | 2017-05-03 | Micronic Mydata AB | Mechanically produced alignment fiducial method and alignment system |
| US9525802B2 (en) | 2013-07-24 | 2016-12-20 | Georgetown University | Enhancing the legibility of images using monochromatic light sources |
| US9269126B2 (en) * | 2013-07-24 | 2016-02-23 | Georgetown University | System and method for enhancing the legibility of images |
| WO2015028587A2 (en) | 2013-08-31 | 2015-03-05 | Dacuda Ag | User feedback for real-time checking and improving quality of scanned image |
| CN103558229B (zh) * | 2013-11-25 | 2016-03-30 | 苏州富鑫林光电科技有限公司 | 一种tft-lcd制程的mura视觉自动检测方法及装置 |
| EP3089102B1 (en) | 2013-12-03 | 2019-02-20 | ML Netherlands C.V. | User feedback for real-time checking and improving quality of scanned image |
| US10410321B2 (en) | 2014-01-07 | 2019-09-10 | MN Netherlands C.V. | Dynamic updating of a composite image |
| US10708491B2 (en) | 2014-01-07 | 2020-07-07 | Ml Netherlands C.V. | Adaptive camera control for reducing motion blur during real-time image capture |
| US10484561B2 (en) | 2014-05-12 | 2019-11-19 | Ml Netherlands C.V. | Method and apparatus for scanning and printing a 3D object |
| CN104570422B (zh) * | 2014-12-31 | 2017-10-13 | 深圳市华星光电技术有限公司 | 一种液晶显示面板的品质的监控方法 |
| FR3035251A1 (fr) * | 2015-04-17 | 2016-10-21 | Stmicroelectronics (Grenoble 2) Sas | Procede et dispositif de generation d'une representation multi-resolutions d'une image et application a la detection d'objet |
| CN104765173B (zh) * | 2015-04-29 | 2018-01-16 | 京东方科技集团股份有限公司 | 一种检测装置及其检测方法 |
| CN104914133B (zh) * | 2015-06-19 | 2017-12-22 | 合肥京东方光电科技有限公司 | 摩擦缺陷检测装置 |
| CN105549240B (zh) * | 2016-03-11 | 2018-09-21 | 京东方科技集团股份有限公司 | 液晶显示器件的水波纹等级的测量方法和装置 |
| CN106650770B (zh) * | 2016-09-29 | 2019-12-17 | 南京大学 | 一种基于样本学习和人眼视觉特性的mura缺陷检测方法 |
| CN110088828A (zh) * | 2016-10-26 | 2019-08-02 | 堺显示器制品株式会社 | 校正系统 |
| CN107678192B (zh) * | 2017-07-16 | 2020-09-25 | 中科院成都信息技术股份有限公司 | 一种基于机器视觉的Mura缺陷检测方法 |
| US10955239B2 (en) * | 2017-07-17 | 2021-03-23 | Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Positioning device and positioning method, color film coating machine |
| US10215714B1 (en) | 2017-08-16 | 2019-02-26 | Siemens Energy, Inc. | Method and system for detecting defects on surface of object |
| US10192301B1 (en) | 2017-08-16 | 2019-01-29 | Siemens Energy, Inc. | Method and system for detecting line defects on surface of object |
| CN107731200B (zh) * | 2017-10-31 | 2019-09-17 | 武汉华星光电技术有限公司 | 改善显示画面中鬼影的方法和系统 |
| US10643576B2 (en) | 2017-12-15 | 2020-05-05 | Samsung Display Co., Ltd. | System and method for white spot Mura detection with improved preprocessing |
| US10681344B2 (en) | 2017-12-15 | 2020-06-09 | Samsung Display Co., Ltd. | System and method for mura detection on a display |
| US10755133B2 (en) * | 2018-02-22 | 2020-08-25 | Samsung Display Co., Ltd. | System and method for line Mura detection with preprocessing |
| US10867382B2 (en) * | 2018-05-24 | 2020-12-15 | Keysight Technologies, Inc. | Detecting mura defects in master panel of flat panel displays during fabrication |
| CN108898594A (zh) * | 2018-06-27 | 2018-11-27 | 湖北工业大学 | 一种均质面板缺陷的检测方法 |
| JP7087792B2 (ja) * | 2018-07-31 | 2022-06-21 | 株式会社リコー | 画像データ生成装置、画像データ生成方法およびプログラム |
| CN109358438B (zh) * | 2018-10-30 | 2021-03-26 | 京东方科技集团股份有限公司 | 云纹评价方法、装置和系统 |
| CN110246449B (zh) * | 2019-06-18 | 2020-11-24 | 京东方科技集团股份有限公司 | 显示面板的调节方法及装置 |
| CN110225336B (zh) * | 2019-06-21 | 2022-08-26 | 京东方科技集团股份有限公司 | 评估图像采集精度的方法及装置、电子设备、可读介质 |
| CN111340752B (zh) * | 2019-12-04 | 2024-08-06 | 京东方科技集团股份有限公司 | 屏幕的检测方法、装置、电子设备及计算机可读存储介质 |
| CN110728681B (zh) * | 2019-12-19 | 2020-05-22 | 武汉精立电子技术有限公司 | 一种Mura缺陷检测方法及装置 |
| WO2021211600A1 (en) | 2020-04-14 | 2021-10-21 | General Electric Company | Green-emitting phosphors and devices thereof |
| KR20220165280A (ko) | 2020-04-14 | 2022-12-14 | 제네럴 일렉트릭 컴퍼니 | 협대역 발광 형광체 물질을 함유하는 잉크 조성물 및 필름 |
| US12100181B2 (en) | 2020-05-11 | 2024-09-24 | Magic Leap, Inc. | Computationally efficient method for computing a composite representation of a 3D environment |
| CN111652865B (zh) * | 2020-05-29 | 2022-04-08 | 惠州市华星光电技术有限公司 | Mura检测方法、装置及可读存储介质 |
| CN111882529B (zh) * | 2020-07-15 | 2024-06-07 | 苏州佳智彩光电科技有限公司 | 显示屏Mura缺陷检测方法及装置 |
| CN114022403A (zh) * | 2020-07-16 | 2022-02-08 | 京东方科技集团股份有限公司 | 检测显示面板不良的方法及装置 |
| KR20230059803A (ko) | 2020-09-01 | 2023-05-03 | 제네럴 일렉트릭 컴퍼니 | 야간 투시 장비와 호환성인 소자 |
| WO2022221385A1 (en) | 2021-04-13 | 2022-10-20 | General Electric Company | Uranium-based phosphors and compositions for displays and lighting applications |
| KR102825656B1 (ko) * | 2021-12-14 | 2025-06-26 | 엘지디스플레이 주식회사 | 표시결함 검출 시스템 및 그 검출 방법 |
| CN119323745B (zh) * | 2024-12-19 | 2025-04-18 | 杭州源现科技有限公司 | 一种xr眼镜的检测装置及方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4286293A (en) * | 1979-05-30 | 1981-08-25 | Western Electric Company, Inc. | Laser scanning and multiple detection for video image processing |
| US4519041A (en) * | 1982-05-03 | 1985-05-21 | Honeywell Inc. | Real time automated inspection |
| US4771468A (en) * | 1986-04-17 | 1988-09-13 | International Business Machines Corporation | System for automatic inspection of periodic patterns |
| US4975972A (en) * | 1988-10-18 | 1990-12-04 | At&T Bell Laboratories | Method and apparatus for surface inspection |
| US5012524A (en) * | 1989-02-27 | 1991-04-30 | Motorola, Inc. | Automatic inspection method |
| US5058178A (en) * | 1989-12-21 | 1991-10-15 | At&T Bell Laboratories | Method and apparatus for inspection of specular, three-dimensional features |
| JPH04208834A (ja) * | 1990-12-04 | 1992-07-30 | Ezel Inc | 液晶パネルの検査方法 |
| US5204911A (en) * | 1991-05-29 | 1993-04-20 | Nira Schwartz | Inspection method using unique templates and histogram analysis |
| US5640199A (en) * | 1993-10-06 | 1997-06-17 | Cognex Corporation | Automated optical inspection apparatus |
| US5544256A (en) * | 1993-10-22 | 1996-08-06 | International Business Machines Corporation | Automated defect classification system |
-
1996
- 1996-05-22 US US08/651,417 patent/US5917935A/en not_active Expired - Fee Related
- 1996-06-11 KR KR1019970700951A patent/KR100399244B1/ko not_active Expired - Fee Related
- 1996-06-11 JP JP50330797A patent/JP3914570B2/ja not_active Expired - Fee Related
- 1996-06-11 WO PCT/US1996/010219 patent/WO1997000452A2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO1997000452A2 (en) | 1997-01-03 |
| KR100399244B1 (ko) | 2003-11-14 |
| US5917935A (en) | 1999-06-29 |
| WO1997000452A3 (en) | 1997-06-05 |
| JPH10509531A (ja) | 1998-09-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3914570B2 (ja) | Mura検出装置および方法 | |
| JP3386818B2 (ja) | ムラ欠陥検出方法および検出装置 | |
| KR100983943B1 (ko) | 디스플레이의 광학 검사 방법 및 장치 | |
| JP7461112B2 (ja) | 製造時のフラットパネルディスプレイのマスタパネルにおけるムラ不良の検出 | |
| US11768159B2 (en) | Belt examination system and computer-readable non-transitory recording medium having stored belt examination program | |
| US6229331B1 (en) | Apparatus for and method of inspecting patterns on semiconductor integrated devices | |
| CN112215816B (zh) | 一种生产线中显示器故障的实时检测方法、存储介质和装置 | |
| US20230419476A1 (en) | Image defect identification method and image analysis device | |
| JP4623809B2 (ja) | ウエハ表面検査装置及びウエハ表面検査方法 | |
| JP2000199745A (ja) | 色ムラの検査方法及び装置 | |
| JP2005140655A (ja) | シミ欠陥の検出方法及びその検出装置 | |
| US20200408697A1 (en) | Belt inspection system, belt inspection method, and recording medium for belt inspection program | |
| US11880969B2 (en) | Belt examination system and computer-readable non-transitory recording medium having stored belt examination program | |
| JP3870208B2 (ja) | 画像処理方法及び検査装置 | |
| KR100602397B1 (ko) | 무라 결점을 검출하는 방법 및 장치 | |
| US20010033328A1 (en) | System and method for automatically inspecting an array of periodic elements | |
| JP2007057705A (ja) | 表示パネルの検査方法および検査装置 | |
| JP2004286708A (ja) | 欠陥検出装置、方法及びプログラム | |
| JP2000121495A (ja) | 画面検査方法 | |
| JP3284462B2 (ja) | 壜胴部の欠陥検出方法 | |
| JP4121628B2 (ja) | 画面検査方法及びその装置 | |
| CN115619761B (zh) | 一种缺口覆盖异常的检测方法、系统、设备及存储介质 | |
| US20250191162A1 (en) | Method to detect camera blemishes | |
| US6459448B1 (en) | System and method for automatically inspecting arrays of geometric targets | |
| JP3284463B2 (ja) | 壜胴部の欠陥検出方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060228 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060523 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060718 |
|
| A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20061018 |
|
| A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20061204 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061128 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20070130 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20070205 |
|
| R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100209 Year of fee payment: 3 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110209 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110209 Year of fee payment: 4 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120209 Year of fee payment: 5 |
|
| LAPS | Cancellation because of no payment of annual fees |