JP3914570B2 - Mura検出装置および方法 - Google Patents

Mura検出装置および方法 Download PDF

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Publication number
JP3914570B2
JP3914570B2 JP50330797A JP50330797A JP3914570B2 JP 3914570 B2 JP3914570 B2 JP 3914570B2 JP 50330797 A JP50330797 A JP 50330797A JP 50330797 A JP50330797 A JP 50330797A JP 3914570 B2 JP3914570 B2 JP 3914570B2
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image
mura
pixel
substrate
defect
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JPH10509531A5 (enExample
JPH10509531A (ja
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ホーソーン,ジェフリー
セッツァー,ジョゼフ
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フォトン・ダイナミクス・インコーポレーテッド
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    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306Details
    • G02F1/1309Repairing; Testing
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136254Checking; Testing
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136259Repairing; Defects

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Liquid Crystal (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Image Analysis (AREA)
JP50330797A 1995-06-13 1996-06-11 Mura検出装置および方法 Expired - Fee Related JP3914570B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US18195P 1995-06-13 1995-06-13
US60/000,181 1996-05-22
US08/651,417 US5917935A (en) 1995-06-13 1996-05-22 Mura detection apparatus and method
US08/651,417 1996-05-22
PCT/US1996/010219 WO1997000452A2 (en) 1995-06-13 1996-06-11 Mura detection apparatus and method

Publications (3)

Publication Number Publication Date
JPH10509531A JPH10509531A (ja) 1998-09-14
JPH10509531A5 JPH10509531A5 (enExample) 2004-07-08
JP3914570B2 true JP3914570B2 (ja) 2007-05-16

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JP50330797A Expired - Fee Related JP3914570B2 (ja) 1995-06-13 1996-06-11 Mura検出装置および方法

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US (1) US5917935A (enExample)
JP (1) JP3914570B2 (enExample)
KR (1) KR100399244B1 (enExample)
WO (1) WO1997000452A2 (enExample)

Families Citing this family (94)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6298149B1 (en) * 1996-03-21 2001-10-02 Cognex Corporation Semiconductor device image inspection with contrast enhancement
US6154561A (en) * 1997-04-07 2000-11-28 Photon Dynamics, Inc. Method and apparatus for detecting Mura defects
KR19990053079A (ko) * 1997-12-23 1999-07-15 윤종용 인식 마크가 형성된 반도체 웨이퍼 및 그 인식 마크를 이용한 웨이퍼 절삭 방법
US6381374B1 (en) * 1998-10-30 2002-04-30 General Electric Company Histogram analysis method for defective pixel identification
JP3825935B2 (ja) * 1999-04-08 2006-09-27 キヤノン株式会社 画像処理装置及び画像処理方法及び記録媒体及び画像処理システム
US6477275B1 (en) * 1999-06-16 2002-11-05 Coreco Imaging, Inc. Systems and methods for locating a pattern in an image
US6720989B2 (en) * 2000-04-19 2004-04-13 K-G Devices Corp. System and method for automatically inspecting an array of periodic elements
US6694059B1 (en) * 2000-05-19 2004-02-17 International Business Machines Corporation Robustness enhancement and evaluation of image information extraction
GB2368635B (en) * 2000-11-01 2004-12-22 Nokia Mobile Phones Ltd Testing an image display device
US6748110B1 (en) * 2000-11-09 2004-06-08 Cognex Technology And Investment Object and object feature detector system and method
US6928192B2 (en) * 2001-04-19 2005-08-09 Koninklijke Philips Electronics N.V. User interface for interactive removal of defects in an image sequence
US6987875B1 (en) 2001-05-22 2006-01-17 Cognex Technology And Investment Corporation Probe mark inspection method and apparatus
JP2003004657A (ja) * 2001-06-25 2003-01-08 Hitachi Ltd 観察作業支援システム
JP2004534949A (ja) * 2001-07-05 2004-11-18 フォトン・ダイナミクス・インコーポレーテッド モアレ抑制方法および装置
JP3431075B2 (ja) * 2001-08-27 2003-07-28 科学技術振興事業団 液晶ディスプレイパネルムラの分類処理方法、その装置及びプログラム
JP2003152970A (ja) * 2001-08-28 2003-05-23 Fuji Photo Film Co Ltd 画像読取装置
JP3879645B2 (ja) * 2002-09-30 2007-02-14 株式会社日立製作所 液晶表示素子の製造方法および液晶表示素子の製造システム
US7444034B1 (en) 2002-11-06 2008-10-28 Digivision, Inc. Systems and methods for image enhancement in multiple dimensions
CA2505260A1 (en) * 2002-11-06 2004-05-27 Digivision, Inc. Systems and methods for image enhancement in multiple dimensions
KR100471084B1 (ko) * 2002-12-16 2005-03-10 삼성전자주식회사 영상처리시스템 및 영상처리방법
US7602962B2 (en) * 2003-02-25 2009-10-13 Hitachi High-Technologies Corporation Method of classifying defects using multiple inspection machines
US7983446B2 (en) * 2003-07-18 2011-07-19 Lockheed Martin Corporation Method and apparatus for automatic object identification
US8184923B2 (en) * 2004-04-19 2012-05-22 Semiconductor Energy Laboratory Co., Ltd. Image analysis method, image analysis program, pixel evaluation system having the image analysis method, and pixel evaluation system having the image analysis program
JP4480002B2 (ja) * 2004-05-28 2010-06-16 Hoya株式会社 ムラ欠陥検査方法及び装置、並びにフォトマスクの製造方法
JP4480001B2 (ja) * 2004-05-28 2010-06-16 Hoya株式会社 ムラ欠陥検査マスク、ムラ欠陥検査装置及び方法、並びにフォトマスクの製造方法
KR20060044032A (ko) * 2004-11-11 2006-05-16 삼성전자주식회사 표시패널용 검사 장치 및 이의 검사 방법
CN100476444C (zh) * 2004-11-22 2009-04-08 台湾薄膜电晶体液晶显示器产业协会 利用视觉模型检测平面显示器的方法与装置
KR101076478B1 (ko) 2004-11-25 2011-10-25 엘아이지에이디피 주식회사 스트레칭 기법을 활용한 평판 디스플레이 패널의 화상결함 검사 방법 및 기록매체
US7911498B2 (en) * 2005-12-12 2011-03-22 Novatek Microelectronics Corp. Compensation device for non-uniform regions in flat panel display and method thereof
CN100565630C (zh) * 2006-01-04 2009-12-02 台湾薄膜电晶体液晶显示器产业协会 显示器多角度测量系统与方法
KR101182324B1 (ko) * 2006-07-28 2012-09-20 엘지디스플레이 주식회사 평판표시장치의 화질제어 방법
US7800661B2 (en) * 2006-12-22 2010-09-21 Qualcomm Incorporated Programmable pattern matching device
US8026927B2 (en) 2007-03-29 2011-09-27 Sharp Laboratories Of America, Inc. Reduction of mura effects
KR101702887B1 (ko) * 2007-04-18 2017-02-06 마이크로닉 마이데이타 에이비 무라 검출 및 계측을 위한 방법 및 장치
TWI366181B (en) * 2007-06-12 2012-06-11 Au Optronics Corp Method and apparatus for image enlargement and enhancement
JP2009036582A (ja) * 2007-07-31 2009-02-19 Toshiba Corp 平面表示パネルの検査方法、検査装置及び検査プログラム
US8049695B2 (en) * 2007-10-15 2011-11-01 Sharp Laboratories Of America, Inc. Correction of visible mura distortions in displays by use of flexible system for memory resources and mura characteristics
KR20100092014A (ko) * 2007-11-12 2010-08-19 마이크로닉 레이저 시스템즈 에이비 패턴 에러들을 검출하기 위한 방법들 및 장치들
JP5250871B2 (ja) * 2008-12-24 2013-07-31 インターナショナル・ビジネス・マシーンズ・コーポレーション ムラ評価装置、ムラ評価方法、ディスプレイ検査装置、およびプログラム
CN101840078B (zh) * 2009-03-20 2016-02-10 北京京东方光电科技有限公司 水波纹级别测试方法
US8582182B2 (en) * 2009-05-20 2013-11-12 Dacuda Ag Automatic sizing of images acquired by a handheld scanner
US9300834B2 (en) * 2009-05-20 2016-03-29 Dacuda Ag Image processing for handheld scanner
US20110012908A1 (en) * 2009-07-20 2011-01-20 Sharp Laboratories Of America, Inc. System for compensation of differential aging mura of displays
US9035673B2 (en) * 2010-01-25 2015-05-19 Palo Alto Research Center Incorporated Method of in-process intralayer yield detection, interlayer shunt detection and correction
US8891866B2 (en) 2011-08-31 2014-11-18 Sony Corporation Image processing apparatus, image processing method, and program
US8780097B2 (en) * 2011-10-20 2014-07-15 Sharp Laboratories Of America, Inc. Newton ring mura detection system
US8867817B1 (en) * 2012-10-29 2014-10-21 Amazon Technologies, Inc. Display analysis using scanned images
CN103018265B (zh) * 2012-11-28 2015-05-20 上海华力微电子有限公司 半导体缺陷定位的方法
KR101966075B1 (ko) * 2012-12-06 2019-04-05 엘지디스플레이 주식회사 표시장치의 얼룩 검출 장치 및 방법
KR101958634B1 (ko) * 2012-12-13 2019-03-15 엘지디스플레이 주식회사 디스플레이 장치의 무라 검출 장치 및 방법
CN103106859B (zh) * 2013-02-28 2015-11-25 北京星河康帝思科技开发股份有限公司 显示屏的检测方法和装置
WO2014140047A2 (en) 2013-03-12 2014-09-18 Micronic Mydata AB Method and device for writing photomasks with reduced mura errors
EP2972589B1 (en) 2013-03-12 2017-05-03 Micronic Mydata AB Mechanically produced alignment fiducial method and alignment system
US9525802B2 (en) 2013-07-24 2016-12-20 Georgetown University Enhancing the legibility of images using monochromatic light sources
US9269126B2 (en) * 2013-07-24 2016-02-23 Georgetown University System and method for enhancing the legibility of images
WO2015028587A2 (en) 2013-08-31 2015-03-05 Dacuda Ag User feedback for real-time checking and improving quality of scanned image
CN103558229B (zh) * 2013-11-25 2016-03-30 苏州富鑫林光电科技有限公司 一种tft-lcd制程的mura视觉自动检测方法及装置
EP3089102B1 (en) 2013-12-03 2019-02-20 ML Netherlands C.V. User feedback for real-time checking and improving quality of scanned image
US10410321B2 (en) 2014-01-07 2019-09-10 MN Netherlands C.V. Dynamic updating of a composite image
US10708491B2 (en) 2014-01-07 2020-07-07 Ml Netherlands C.V. Adaptive camera control for reducing motion blur during real-time image capture
US10484561B2 (en) 2014-05-12 2019-11-19 Ml Netherlands C.V. Method and apparatus for scanning and printing a 3D object
CN104570422B (zh) * 2014-12-31 2017-10-13 深圳市华星光电技术有限公司 一种液晶显示面板的品质的监控方法
FR3035251A1 (fr) * 2015-04-17 2016-10-21 Stmicroelectronics (Grenoble 2) Sas Procede et dispositif de generation d'une representation multi-resolutions d'une image et application a la detection d'objet
CN104765173B (zh) * 2015-04-29 2018-01-16 京东方科技集团股份有限公司 一种检测装置及其检测方法
CN104914133B (zh) * 2015-06-19 2017-12-22 合肥京东方光电科技有限公司 摩擦缺陷检测装置
CN105549240B (zh) * 2016-03-11 2018-09-21 京东方科技集团股份有限公司 液晶显示器件的水波纹等级的测量方法和装置
CN106650770B (zh) * 2016-09-29 2019-12-17 南京大学 一种基于样本学习和人眼视觉特性的mura缺陷检测方法
CN110088828A (zh) * 2016-10-26 2019-08-02 堺显示器制品株式会社 校正系统
CN107678192B (zh) * 2017-07-16 2020-09-25 中科院成都信息技术股份有限公司 一种基于机器视觉的Mura缺陷检测方法
US10955239B2 (en) * 2017-07-17 2021-03-23 Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Positioning device and positioning method, color film coating machine
US10215714B1 (en) 2017-08-16 2019-02-26 Siemens Energy, Inc. Method and system for detecting defects on surface of object
US10192301B1 (en) 2017-08-16 2019-01-29 Siemens Energy, Inc. Method and system for detecting line defects on surface of object
CN107731200B (zh) * 2017-10-31 2019-09-17 武汉华星光电技术有限公司 改善显示画面中鬼影的方法和系统
US10643576B2 (en) 2017-12-15 2020-05-05 Samsung Display Co., Ltd. System and method for white spot Mura detection with improved preprocessing
US10681344B2 (en) 2017-12-15 2020-06-09 Samsung Display Co., Ltd. System and method for mura detection on a display
US10755133B2 (en) * 2018-02-22 2020-08-25 Samsung Display Co., Ltd. System and method for line Mura detection with preprocessing
US10867382B2 (en) * 2018-05-24 2020-12-15 Keysight Technologies, Inc. Detecting mura defects in master panel of flat panel displays during fabrication
CN108898594A (zh) * 2018-06-27 2018-11-27 湖北工业大学 一种均质面板缺陷的检测方法
JP7087792B2 (ja) * 2018-07-31 2022-06-21 株式会社リコー 画像データ生成装置、画像データ生成方法およびプログラム
CN109358438B (zh) * 2018-10-30 2021-03-26 京东方科技集团股份有限公司 云纹评价方法、装置和系统
CN110246449B (zh) * 2019-06-18 2020-11-24 京东方科技集团股份有限公司 显示面板的调节方法及装置
CN110225336B (zh) * 2019-06-21 2022-08-26 京东方科技集团股份有限公司 评估图像采集精度的方法及装置、电子设备、可读介质
CN111340752B (zh) * 2019-12-04 2024-08-06 京东方科技集团股份有限公司 屏幕的检测方法、装置、电子设备及计算机可读存储介质
CN110728681B (zh) * 2019-12-19 2020-05-22 武汉精立电子技术有限公司 一种Mura缺陷检测方法及装置
WO2021211600A1 (en) 2020-04-14 2021-10-21 General Electric Company Green-emitting phosphors and devices thereof
KR20220165280A (ko) 2020-04-14 2022-12-14 제네럴 일렉트릭 컴퍼니 협대역 발광 형광체 물질을 함유하는 잉크 조성물 및 필름
US12100181B2 (en) 2020-05-11 2024-09-24 Magic Leap, Inc. Computationally efficient method for computing a composite representation of a 3D environment
CN111652865B (zh) * 2020-05-29 2022-04-08 惠州市华星光电技术有限公司 Mura检测方法、装置及可读存储介质
CN111882529B (zh) * 2020-07-15 2024-06-07 苏州佳智彩光电科技有限公司 显示屏Mura缺陷检测方法及装置
CN114022403A (zh) * 2020-07-16 2022-02-08 京东方科技集团股份有限公司 检测显示面板不良的方法及装置
KR20230059803A (ko) 2020-09-01 2023-05-03 제네럴 일렉트릭 컴퍼니 야간 투시 장비와 호환성인 소자
WO2022221385A1 (en) 2021-04-13 2022-10-20 General Electric Company Uranium-based phosphors and compositions for displays and lighting applications
KR102825656B1 (ko) * 2021-12-14 2025-06-26 엘지디스플레이 주식회사 표시결함 검출 시스템 및 그 검출 방법
CN119323745B (zh) * 2024-12-19 2025-04-18 杭州源现科技有限公司 一种xr眼镜的检测装置及方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4286293A (en) * 1979-05-30 1981-08-25 Western Electric Company, Inc. Laser scanning and multiple detection for video image processing
US4519041A (en) * 1982-05-03 1985-05-21 Honeywell Inc. Real time automated inspection
US4771468A (en) * 1986-04-17 1988-09-13 International Business Machines Corporation System for automatic inspection of periodic patterns
US4975972A (en) * 1988-10-18 1990-12-04 At&T Bell Laboratories Method and apparatus for surface inspection
US5012524A (en) * 1989-02-27 1991-04-30 Motorola, Inc. Automatic inspection method
US5058178A (en) * 1989-12-21 1991-10-15 At&T Bell Laboratories Method and apparatus for inspection of specular, three-dimensional features
JPH04208834A (ja) * 1990-12-04 1992-07-30 Ezel Inc 液晶パネルの検査方法
US5204911A (en) * 1991-05-29 1993-04-20 Nira Schwartz Inspection method using unique templates and histogram analysis
US5640199A (en) * 1993-10-06 1997-06-17 Cognex Corporation Automated optical inspection apparatus
US5544256A (en) * 1993-10-22 1996-08-06 International Business Machines Corporation Automated defect classification system

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WO1997000452A2 (en) 1997-01-03
KR100399244B1 (ko) 2003-11-14
US5917935A (en) 1999-06-29
WO1997000452A3 (en) 1997-06-05
JPH10509531A (ja) 1998-09-14

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