JP3913689B2 - 半導体装置及びその作製方法 - Google Patents

半導体装置及びその作製方法 Download PDF

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Publication number
JP3913689B2
JP3913689B2 JP2003050784A JP2003050784A JP3913689B2 JP 3913689 B2 JP3913689 B2 JP 3913689B2 JP 2003050784 A JP2003050784 A JP 2003050784A JP 2003050784 A JP2003050784 A JP 2003050784A JP 3913689 B2 JP3913689 B2 JP 3913689B2
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Prior art keywords
conductive layer
island
shaped
region
gate electrode
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Expired - Fee Related
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Japanese (ja)
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JP2003303833A (ja
JP2003303833A5 (enExample
Inventor
舜平 山崎
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Priority to JP2003050784A priority Critical patent/JP3913689B2/ja
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Publication of JP2003303833A5 publication Critical patent/JP2003303833A5/ja
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  • Recrystallisation Techniques (AREA)
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JP2003050784A 1998-11-25 2003-02-27 半導体装置及びその作製方法 Expired - Fee Related JP3913689B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003050784A JP3913689B2 (ja) 1998-11-25 2003-02-27 半導体装置及びその作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP33362398 1998-11-25
JP10-333623 1998-11-25
JP2003050784A JP3913689B2 (ja) 1998-11-25 2003-02-27 半導体装置及びその作製方法

Related Parent Applications (1)

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JP33445399A Division JP3901893B2 (ja) 1998-11-25 1999-11-25 半導体装置およびその作製方法

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JP2003303833A JP2003303833A (ja) 2003-10-24
JP2003303833A5 JP2003303833A5 (enExample) 2007-01-11
JP3913689B2 true JP3913689B2 (ja) 2007-05-09

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150048508A (ko) * 2013-10-28 2015-05-07 삼성디스플레이 주식회사 표시 장치, 표시 장치의 제조 방법, 및 유기 발광 표시 장치

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7193594B1 (en) * 1999-03-18 2007-03-20 Semiconductor Energy Laboratory Co., Ltd. Display device
US7615495B2 (en) * 2005-11-17 2009-11-10 Semiconductor Energy Laboratory Co., Ltd. Display device and manufacturing method of the same
TWI591871B (zh) * 2010-12-16 2017-07-11 半導體能源研究所股份有限公司 發光裝置及照明裝置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150048508A (ko) * 2013-10-28 2015-05-07 삼성디스플레이 주식회사 표시 장치, 표시 장치의 제조 방법, 및 유기 발광 표시 장치
KR102211967B1 (ko) 2013-10-28 2021-02-05 삼성디스플레이 주식회사 표시 장치, 표시 장치의 제조 방법, 및 유기 발광 표시 장치

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JP2003303833A (ja) 2003-10-24

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