JP3904813B2 - セラミックヒーターとこれを用いたウエハ加熱装置 - Google Patents

セラミックヒーターとこれを用いたウエハ加熱装置 Download PDF

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Publication number
JP3904813B2
JP3904813B2 JP2000259807A JP2000259807A JP3904813B2 JP 3904813 B2 JP3904813 B2 JP 3904813B2 JP 2000259807 A JP2000259807 A JP 2000259807A JP 2000259807 A JP2000259807 A JP 2000259807A JP 3904813 B2 JP3904813 B2 JP 3904813B2
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Japan
Prior art keywords
glass
heating resistor
plate
wafer
insulating layer
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Expired - Fee Related
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JP2000259807A
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Japanese (ja)
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JP2002075598A5 (https=
JP2002075598A (ja
Inventor
清 横山
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Kyocera Corp
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Kyocera Corp
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Publication date
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Priority to JP2000259807A priority Critical patent/JP3904813B2/ja
Publication of JP2002075598A publication Critical patent/JP2002075598A/ja
Publication of JP2002075598A5 publication Critical patent/JP2002075598A5/ja
Application granted granted Critical
Publication of JP3904813B2 publication Critical patent/JP3904813B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)
JP2000259807A 2000-08-29 2000-08-29 セラミックヒーターとこれを用いたウエハ加熱装置 Expired - Fee Related JP3904813B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000259807A JP3904813B2 (ja) 2000-08-29 2000-08-29 セラミックヒーターとこれを用いたウエハ加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000259807A JP3904813B2 (ja) 2000-08-29 2000-08-29 セラミックヒーターとこれを用いたウエハ加熱装置

Publications (3)

Publication Number Publication Date
JP2002075598A JP2002075598A (ja) 2002-03-15
JP2002075598A5 JP2002075598A5 (https=) 2005-06-09
JP3904813B2 true JP3904813B2 (ja) 2007-04-11

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ID=18747929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000259807A Expired - Fee Related JP3904813B2 (ja) 2000-08-29 2000-08-29 セラミックヒーターとこれを用いたウエハ加熱装置

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JP (1) JP3904813B2 (https=)

Also Published As

Publication number Publication date
JP2002075598A (ja) 2002-03-15

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