JP2002075598A5 - - Google Patents
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- Publication number
- JP2002075598A5 JP2002075598A5 JP2000259807A JP2000259807A JP2002075598A5 JP 2002075598 A5 JP2002075598 A5 JP 2002075598A5 JP 2000259807 A JP2000259807 A JP 2000259807A JP 2000259807 A JP2000259807 A JP 2000259807A JP 2002075598 A5 JP2002075598 A5 JP 2002075598A5
- Authority
- JP
- Japan
- Prior art keywords
- ceramic heater
- heating resistor
- main surface
- heater according
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000000919 ceramic Substances 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims 2
- 229910052697 platinum Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 230000020169 heat generation Effects 0.000 claims 1
- 229910052741 iridium Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 229910052703 rhodium Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 230000007704 transition Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000259807A JP3904813B2 (ja) | 2000-08-29 | 2000-08-29 | セラミックヒーターとこれを用いたウエハ加熱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000259807A JP3904813B2 (ja) | 2000-08-29 | 2000-08-29 | セラミックヒーターとこれを用いたウエハ加熱装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002075598A JP2002075598A (ja) | 2002-03-15 |
| JP2002075598A5 true JP2002075598A5 (https=) | 2005-06-09 |
| JP3904813B2 JP3904813B2 (ja) | 2007-04-11 |
Family
ID=18747929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000259807A Expired - Fee Related JP3904813B2 (ja) | 2000-08-29 | 2000-08-29 | セラミックヒーターとこれを用いたウエハ加熱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3904813B2 (https=) |
-
2000
- 2000-08-29 JP JP2000259807A patent/JP3904813B2/ja not_active Expired - Fee Related
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