JP2002075600A5 - - Google Patents
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- Publication number
- JP2002075600A5 JP2002075600A5 JP2000263020A JP2000263020A JP2002075600A5 JP 2002075600 A5 JP2002075600 A5 JP 2002075600A5 JP 2000263020 A JP2000263020 A JP 2000263020A JP 2000263020 A JP2000263020 A JP 2000263020A JP 2002075600 A5 JP2002075600 A5 JP 2002075600A5
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- wafer
- heating apparatus
- main surface
- wafer heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 13
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 229910001260 Pt alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 230000020169 heat generation Effects 0.000 claims 1
- 229910052741 iridium Inorganic materials 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 229910052763 palladium Inorganic materials 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 229910052703 rhodium Inorganic materials 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 238000011835 investigation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000263020A JP2002075600A (ja) | 2000-08-31 | 2000-08-31 | ウエハ加熱装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000263020A JP2002075600A (ja) | 2000-08-31 | 2000-08-31 | ウエハ加熱装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006261126A Division JP4809171B2 (ja) | 2006-09-26 | 2006-09-26 | ウエハ加熱装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002075600A JP2002075600A (ja) | 2002-03-15 |
| JP2002075600A5 true JP2002075600A5 (https=) | 2005-06-09 |
Family
ID=18750617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000263020A Pending JP2002075600A (ja) | 2000-08-31 | 2000-08-31 | ウエハ加熱装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002075600A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003282403A (ja) * | 2002-03-22 | 2003-10-03 | Sumitomo Electric Ind Ltd | 半導体製造装置用保持体 |
| JP6463936B2 (ja) * | 2014-10-01 | 2019-02-06 | 日本特殊陶業株式会社 | 半導体製造装置用部品の製造方法 |
-
2000
- 2000-08-31 JP JP2000263020A patent/JP2002075600A/ja active Pending
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