JP3890376B2 - ポジ型感光性組成物 - Google Patents

ポジ型感光性組成物 Download PDF

Info

Publication number
JP3890376B2
JP3890376B2 JP27457797A JP27457797A JP3890376B2 JP 3890376 B2 JP3890376 B2 JP 3890376B2 JP 27457797 A JP27457797 A JP 27457797A JP 27457797 A JP27457797 A JP 27457797A JP 3890376 B2 JP3890376 B2 JP 3890376B2
Authority
JP
Japan
Prior art keywords
group
acid
groups
carbon atoms
alkyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP27457797A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11109612A5 (https=
JPH11109612A (ja
Inventor
亨 藤森
利明 青合
史郎 丹
一也 上西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Corp
Original Assignee
Fujifilm Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corp filed Critical Fujifilm Corp
Priority to JP27457797A priority Critical patent/JP3890376B2/ja
Publication of JPH11109612A publication Critical patent/JPH11109612A/ja
Publication of JPH11109612A5 publication Critical patent/JPH11109612A5/ja
Application granted granted Critical
Publication of JP3890376B2 publication Critical patent/JP3890376B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP27457797A 1997-10-07 1997-10-07 ポジ型感光性組成物 Expired - Lifetime JP3890376B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27457797A JP3890376B2 (ja) 1997-10-07 1997-10-07 ポジ型感光性組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27457797A JP3890376B2 (ja) 1997-10-07 1997-10-07 ポジ型感光性組成物

Publications (3)

Publication Number Publication Date
JPH11109612A JPH11109612A (ja) 1999-04-23
JPH11109612A5 JPH11109612A5 (https=) 2004-10-14
JP3890376B2 true JP3890376B2 (ja) 2007-03-07

Family

ID=17543689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27457797A Expired - Lifetime JP3890376B2 (ja) 1997-10-07 1997-10-07 ポジ型感光性組成物

Country Status (1)

Country Link
JP (1) JP3890376B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020032791A (ko) * 2000-10-27 2002-05-04 안복현 포토레지스트 조성물
JP5140354B2 (ja) * 2006-09-19 2013-02-06 富士フイルム株式会社 感光性組成物、該感光性組成物に用いる化合物及び該感光性組成物を用いたパターン形成方法

Also Published As

Publication number Publication date
JPH11109612A (ja) 1999-04-23

Similar Documents

Publication Publication Date Title
US5837420A (en) Positive working photosensitive composition
JP3679205B2 (ja) ポジ型感光性組成物
US5891603A (en) Positive working photosensitive composition
JP3963625B2 (ja) ポジ型フォトレジスト組成物
JP3773139B2 (ja) ポジ型感光性組成物
JP4562240B2 (ja) ポジ型感放射線性組成物及びそれを用いたパターン形成方法
JPH09309874A (ja) ポジ型感光性組成物
JP3992993B2 (ja) ポジ型電子線、ｘ線又はｅｕｖ用レジスト組成物
JPH11167199A (ja) ポジ型フォトレジスト組成物
JPH09258435A (ja) ポジ型感光性組成物
JPH10123703A (ja) ポジ型感光性組成物
JP4004820B2 (ja) ポジ型電子線、ｘ線又はｅｕｖ用レジスト組成物
JP3890358B2 (ja) ポジ型感光性樹脂組成物及びパターン形成方法
JP3741330B2 (ja) ポジ型フォトレジスト組成物及びそれを用いるパターン形成方法
JP3778391B2 (ja) ポジ型感光性組成物
KR100458398B1 (ko) 화학증폭형포지티브레지스트조성물
JPH11109631A (ja) ポジ型感光性組成物
JP3890376B2 (ja) ポジ型感光性組成物
JP2000267282A (ja) ポジ型感光性組成物
JP3907135B2 (ja) ポジ型感光性組成物
JPH11295895A (ja) ポジ型フォトレジスト組成物
JPH11153870A (ja) ポジ型感光性組成物
JP3909830B2 (ja) ポジ型電子線、ｘ線又はｅｕｖ用レジスト組成物
JP3746854B2 (ja) 感光性組成物
JP3890375B2 (ja) ポジ型感光性組成物

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20060324

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060629

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060705

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060830

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20061025

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20061031

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20061122

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101215

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101215

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111215

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111215

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121215

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121215

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131215

Year of fee payment: 7

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term