JPH11109612A5 - - Google Patents

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Publication number
JPH11109612A5
JPH11109612A5 JP1997274577A JP27457797A JPH11109612A5 JP H11109612 A5 JPH11109612 A5 JP H11109612A5 JP 1997274577 A JP1997274577 A JP 1997274577A JP 27457797 A JP27457797 A JP 27457797A JP H11109612 A5 JPH11109612 A5 JP H11109612A5
Authority
JP
Japan
Prior art keywords
group
branched
acid
linear
substituent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997274577A
Other languages
English (en)
Japanese (ja)
Other versions
JP3890376B2 (ja
JPH11109612A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP27457797A priority Critical patent/JP3890376B2/ja
Priority claimed from JP27457797A external-priority patent/JP3890376B2/ja
Publication of JPH11109612A publication Critical patent/JPH11109612A/ja
Publication of JPH11109612A5 publication Critical patent/JPH11109612A5/ja
Application granted granted Critical
Publication of JP3890376B2 publication Critical patent/JP3890376B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP27457797A 1997-10-07 1997-10-07 ポジ型感光性組成物 Expired - Lifetime JP3890376B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27457797A JP3890376B2 (ja) 1997-10-07 1997-10-07 ポジ型感光性組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27457797A JP3890376B2 (ja) 1997-10-07 1997-10-07 ポジ型感光性組成物

Publications (3)

Publication Number Publication Date
JPH11109612A JPH11109612A (ja) 1999-04-23
JPH11109612A5 true JPH11109612A5 (https=) 2004-10-14
JP3890376B2 JP3890376B2 (ja) 2007-03-07

Family

ID=17543689

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27457797A Expired - Lifetime JP3890376B2 (ja) 1997-10-07 1997-10-07 ポジ型感光性組成物

Country Status (1)

Country Link
JP (1) JP3890376B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020032791A (ko) * 2000-10-27 2002-05-04 안복현 포토레지스트 조성물
JP5140354B2 (ja) * 2006-09-19 2013-02-06 富士フイルム株式会社 感光性組成物、該感光性組成物に用いる化合物及び該感光性組成物を用いたパターン形成方法

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