JPH112901A5 - - Google Patents
Info
- Publication number
- JPH112901A5 JPH112901A5 JP1997109526A JP10952697A JPH112901A5 JP H112901 A5 JPH112901 A5 JP H112901A5 JP 1997109526 A JP1997109526 A JP 1997109526A JP 10952697 A JP10952697 A JP 10952697A JP H112901 A5 JPH112901 A5 JP H112901A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- substituent
- branched
- linear
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10952697A JP3907135B2 (ja) | 1996-04-25 | 1997-04-25 | ポジ型感光性組成物 |
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10563596 | 1996-04-25 | ||
| JP8-105635 | 1996-04-25 | ||
| JP8-171327 | 1996-07-01 | ||
| JP17132796 | 1996-07-01 | ||
| JP10192497 | 1997-04-18 | ||
| JP9-101924 | 1997-04-18 | ||
| JP10952697A JP3907135B2 (ja) | 1996-04-25 | 1997-04-25 | ポジ型感光性組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH112901A JPH112901A (ja) | 1999-01-06 |
| JPH112901A5 true JPH112901A5 (https=) | 2004-10-07 |
| JP3907135B2 JP3907135B2 (ja) | 2007-04-18 |
Family
ID=27468966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10952697A Expired - Fee Related JP3907135B2 (ja) | 1996-04-25 | 1997-04-25 | ポジ型感光性組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3907135B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3285086B2 (ja) | 1999-05-20 | 2002-05-27 | 日本電気株式会社 | 化学増幅型レジスト組成物 |
| JP4557115B2 (ja) * | 2000-03-07 | 2010-10-06 | 信越化学工業株式会社 | 化学増幅ポジ型レジスト材料 |
| KR100840635B1 (ko) | 2001-11-30 | 2008-06-24 | 와코 쥰야꾸 고교 가부시키가이샤 | 비스이미드 화합물, 이것을 이용한 산 발생제 및 레지스트조성물 및 해당 조성물을 이용한 패턴 형성 방법 |
| WO2015146053A1 (ja) * | 2014-03-24 | 2015-10-01 | サンアプロ株式会社 | イミドスルホネート化合物、光酸発生剤及びフォトリソグラフィー用樹脂組成物 |
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1997
- 1997-04-25 JP JP10952697A patent/JP3907135B2/ja not_active Expired - Fee Related