JP3874042B2 - 温度センサの支持装置 - Google Patents

温度センサの支持装置 Download PDF

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Publication number
JP3874042B2
JP3874042B2 JP27643397A JP27643397A JP3874042B2 JP 3874042 B2 JP3874042 B2 JP 3874042B2 JP 27643397 A JP27643397 A JP 27643397A JP 27643397 A JP27643397 A JP 27643397A JP 3874042 B2 JP3874042 B2 JP 3874042B2
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JP
Japan
Prior art keywords
heating chamber
temperature detection
support
rod
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP27643397A
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English (en)
Japanese (ja)
Other versions
JPH1197372A5 (enExample
JPH1197372A (ja
Inventor
將司 石原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Kokusai Denki Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc, Kokusai Denki Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP27643397A priority Critical patent/JP3874042B2/ja
Publication of JPH1197372A publication Critical patent/JPH1197372A/ja
Publication of JPH1197372A5 publication Critical patent/JPH1197372A5/ja
Application granted granted Critical
Publication of JP3874042B2 publication Critical patent/JP3874042B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Drying Of Semiconductors (AREA)
JP27643397A 1997-09-24 1997-09-24 温度センサの支持装置 Expired - Fee Related JP3874042B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27643397A JP3874042B2 (ja) 1997-09-24 1997-09-24 温度センサの支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27643397A JP3874042B2 (ja) 1997-09-24 1997-09-24 温度センサの支持装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006186755A Division JP2006352145A (ja) 2006-07-06 2006-07-06 熱処理装置およびその装置に用いられる温度検出ユニット、半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JPH1197372A JPH1197372A (ja) 1999-04-09
JPH1197372A5 JPH1197372A5 (enExample) 2005-06-09
JP3874042B2 true JP3874042B2 (ja) 2007-01-31

Family

ID=17569362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27643397A Expired - Fee Related JP3874042B2 (ja) 1997-09-24 1997-09-24 温度センサの支持装置

Country Status (1)

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JP (1) JP3874042B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006352145A (ja) * 2006-07-06 2006-12-28 Hitachi Kokusai Electric Inc 熱処理装置およびその装置に用いられる温度検出ユニット、半導体装置の製造方法
JP5173225B2 (ja) * 2007-03-30 2013-04-03 三井造船株式会社 加熱システム

Also Published As

Publication number Publication date
JPH1197372A (ja) 1999-04-09

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