JPH1197372A5 - - Google Patents

Info

Publication number
JPH1197372A5
JPH1197372A5 JP1997276433A JP27643397A JPH1197372A5 JP H1197372 A5 JPH1197372 A5 JP H1197372A5 JP 1997276433 A JP1997276433 A JP 1997276433A JP 27643397 A JP27643397 A JP 27643397A JP H1197372 A5 JPH1197372 A5 JP H1197372A5
Authority
JP
Japan
Prior art keywords
heating chamber
temperature
sensor chip
temperature detector
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997276433A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1197372A (ja
JP3874042B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP27643397A priority Critical patent/JP3874042B2/ja
Priority claimed from JP27643397A external-priority patent/JP3874042B2/ja
Publication of JPH1197372A publication Critical patent/JPH1197372A/ja
Publication of JPH1197372A5 publication Critical patent/JPH1197372A5/ja
Application granted granted Critical
Publication of JP3874042B2 publication Critical patent/JP3874042B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP27643397A 1997-09-24 1997-09-24 温度センサの支持装置 Expired - Fee Related JP3874042B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27643397A JP3874042B2 (ja) 1997-09-24 1997-09-24 温度センサの支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27643397A JP3874042B2 (ja) 1997-09-24 1997-09-24 温度センサの支持装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006186755A Division JP2006352145A (ja) 2006-07-06 2006-07-06 熱処理装置およびその装置に用いられる温度検出ユニット、半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JPH1197372A JPH1197372A (ja) 1999-04-09
JPH1197372A5 true JPH1197372A5 (enExample) 2005-06-09
JP3874042B2 JP3874042B2 (ja) 2007-01-31

Family

ID=17569362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27643397A Expired - Fee Related JP3874042B2 (ja) 1997-09-24 1997-09-24 温度センサの支持装置

Country Status (1)

Country Link
JP (1) JP3874042B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006352145A (ja) * 2006-07-06 2006-12-28 Hitachi Kokusai Electric Inc 熱処理装置およびその装置に用いられる温度検出ユニット、半導体装置の製造方法
JP5173225B2 (ja) * 2007-03-30 2013-04-03 三井造船株式会社 加熱システム

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