JP3871613B2 - 無電解めっき装置及び方法 - Google Patents

無電解めっき装置及び方法 Download PDF

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Publication number
JP3871613B2
JP3871613B2 JP2002166111A JP2002166111A JP3871613B2 JP 3871613 B2 JP3871613 B2 JP 3871613B2 JP 2002166111 A JP2002166111 A JP 2002166111A JP 2002166111 A JP2002166111 A JP 2002166111A JP 3871613 B2 JP3871613 B2 JP 3871613B2
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substrate
plating
head
cleaning
unit
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Expired - Fee Related
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JP2002166111A
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Japanese (ja)
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JP2004010961A (ja
JP2004010961A5 (enExample
Inventor
誠司 勝岡
雅彦 関本
俊夫 横山
輝行 渡邉
貴弘 小川
賢一 小林
充 宮▲崎▼
靖之 本島
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Ebara Corp
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Ebara Corp
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Priority to JP2002166111A priority Critical patent/JP3871613B2/ja
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Publication of JP2004010961A5 publication Critical patent/JP2004010961A5/ja
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Publication of JP3871613B2 publication Critical patent/JP3871613B2/ja
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemically Coating (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2002166111A 2002-06-06 2002-06-06 無電解めっき装置及び方法 Expired - Fee Related JP3871613B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002166111A JP3871613B2 (ja) 2002-06-06 2002-06-06 無電解めっき装置及び方法

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Application Number Priority Date Filing Date Title
JP2002166111A JP3871613B2 (ja) 2002-06-06 2002-06-06 無電解めっき装置及び方法

Publications (3)

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JP2004010961A JP2004010961A (ja) 2004-01-15
JP2004010961A5 JP2004010961A5 (enExample) 2005-06-30
JP3871613B2 true JP3871613B2 (ja) 2007-01-24

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JP2002166111A Expired - Fee Related JP3871613B2 (ja) 2002-06-06 2002-06-06 無電解めっき装置及び方法

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JP (1) JP3871613B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7794530B2 (en) * 2006-12-22 2010-09-14 Lam Research Corporation Electroless deposition of cobalt alloys
JP5004611B2 (ja) * 2007-02-15 2012-08-22 株式会社Ｓｏｋｕｄｏ 基板処理装置
JP6560572B2 (ja) * 2015-09-14 2019-08-14 株式会社荏原製作所 反転機および基板研磨装置
KR102584514B1 (ko) 2020-07-09 2023-10-06 세메스 주식회사 기판 반송 장치, 기판 처리 장치 및 방법
JP7663453B2 (ja) * 2021-08-04 2025-04-16 株式会社荏原製作所 基板処理方法および基板処理装置
KR102499962B1 (ko) * 2021-11-04 2023-02-16 가부시키가이샤 에바라 세이사꾸쇼 도금 장치 및 기판 세정 방법
CN114351149B (zh) * 2021-12-07 2023-09-26 马鞍山市鑫龙特钢有限公司 一种40Cr合金钢材加工用表面防氧化处理装置

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