JP3864738B2 - Liquid crystal device manufacturing apparatus and manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reliably remove a foreign matter and to prevent static electricity when rubbing is performed. SOLUTION: A humidified air blower 85 is disposed at an upper and rear side of a rubbing roll 83 and a suction device 87 is disposed at a back end of a rubbing stage 81. A flow 86 is formed by the humidified air from the humidified air blower 85 and the flow 86 of humidified air is stabilized by the suction device 87. The foreign matter caused when rubbing is performed is carried by the flow 86 of the humidified air passing through the near parts of the surface of the rubbing roll 83 and the surface of a substrate 82 and reliably sucked and excluded via a suction port 88 of the suction device 87. Since the humidified air passes through the surface of the substrate 82, the occurrence of static electricity is prevented.

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a manufacturing apparatus and a manufacturing method of a liquid crystal device and a liquid crystal device which can efficiently remove foreign matters and static electricity generated in a rubbing process.
[0002]
[Prior art]
A liquid crystal device such as a liquid crystal light valve is configured by sealing liquid crystal between two substrates such as a glass substrate and a quartz substrate. In a liquid crystal light valve, active elements such as thin film transistors (hereinafter referred to as TFTs) are arranged in a matrix on one substrate, a counter electrode is arranged on the other substrate, and sealed between both substrates. By changing the optical characteristics of the stopped liquid crystal layer according to the image signal, it is possible to display an image.
[0003]
The TFT substrate on which the TFT is disposed and the counter substrate disposed to face the TFT substrate are manufactured separately. Both substrates are bonded together with high accuracy in the panel assembling process, and then liquid crystal is sealed therein.
[0004]
In the panel assembly process, first, an alignment film is formed on the opposing surfaces of the TFT substrate and the counter substrate manufactured in each substrate process, that is, on the surface in contact with the liquid crystal layer of the counter substrate and the TFT substrate, and then the rubbing process. Is done. Next, a seal portion serving as an adhesive is formed on the edge of one substrate. The TFT substrate and the counter substrate are bonded together using a seal portion, and are cured by pressure bonding while performing alignment. A part of the seal part is provided with a notch, and the liquid crystal is sealed through the notch.
[0005]
By forming an alignment film and performing a rubbing treatment, the alignment of liquid crystal molecules when no voltage is applied is determined. The alignment film is formed, for example, by applying a polymer film such as polyimide with a thickness of about several tens of nanometers. By forming an alignment film on the surfaces of both substrates facing the liquid crystal layer, the liquid crystal molecules can be aligned along the substrate surface. In the rubbing process, fine grooves are formed on the surface of the alignment film to form an alignment anisotropic film, and the alignment of liquid crystal molecules can be defined by performing a rubbing process in a certain direction on the alignment film.
[0006]
FIG. 10 is an explanatory view showing a rubbing apparatus.
[0007]
In FIG. 10, the rubbing apparatus includes a mounting table 105 and a rubbing roll 102. First, the substrate 101 having a polyimide film is placed on the mounting table 105 with the polyimide film facing up. Next, the rubbing roll 102 with the rubbing cloth 103 attached around the roller was placed in contact with the polyimide film, and the rubbing roll 102 was moved in a predetermined direction and rubbed with the polyimide film to be rubbed. An alignment film is formed.
[0008]
[Problems to be solved by the invention]
By the way, in such a rubbing process, a large amount of foreign matter 106 such as shaving of the alignment film and fibers from the rubbing cloth 103 is generated during rubbing, and may be deposited on the periphery of the substrate 101 on the mounting table 105 ( FIG. 10 (a)). Further, when the rubbing process is continuously performed on a plurality of substrates, as shown in FIG. 10B, the next substrate is placed on the foreign matter 106 generated by the rubbing process of the previous substrate. End up.
[0009]
Since the total amount of foreign matter generated is proportional to the number of rubbed sheets, the probability that the substrate is mounted on the foreign matter generated on the previous substrate increases. As a result, the pushing amount of the rubbing roll 102 onto the substrate 101 is increased, and the rubbing strength is increased.
[0010]
Also, if the foreign matter itself floats, it will adhere to the liquid crystal substrate and cause foreign matter failure, or the foreign matter will be sandwiched between the substrates, resulting in gap failure, or it will adhere to the rubbing roll and give uneven rubbing strength to the substrate. As a result, streak unevenness or proper rubbing processing is not performed, resulting in display defects.
[0011]
In particular, foreign matter generated by rubbing is accumulated at the rubbing end of rubbing, and therefore the rubbing strength of the latter half of the same substrate tends to increase. Further, since the amount of foreign matter deposited increases as the number of processed substrates increases, the rubbing strength tends to increase as the number of rubbing increases. Such variations in the rubbing strength act on variations in the pretilt of the liquid crystal, resulting in variations in display quality.
[0012]
If the rubbing strength is strong, the tilt is low and a reverse tilt domain is generated. Furthermore, variations in the liquid crystal pretilt affect the transmittance and contrast of the liquid crystal panel, and the voltage-transmittance characteristics.
[0013]
By the way, in order to uniformly rub the liquid crystal substrate, it is necessary to rotate the rubbing roll at a high speed such as 100 to 1000 (rotation / min). In addition, as a rubbing material, rayon material or the like is mainly used in consideration of durability, pile system uniformity, and the like. Therefore, during the rubbing process, the liquid crystal substrate is rubbed at a high speed with a low conductive material, which causes a problem that static electricity is likely to be generated.
[0014]
In particular, when an active element such as a thin film transistor or a thin film diode is formed on a liquid crystal substrate, the insulating layer may be electrostatically destroyed by static electricity, and the element characteristics may be shifted. There was a problem.
[0015]
The present invention has been made in view of such problems, and eliminates foreign matter generated by rubbing and efficiently removes static electricity, thereby making the rubbing strength constant and preventing display defects. An object of the present invention is to provide a manufacturing apparatus and manufacturing method of a liquid crystal device and a liquid crystal device capable of reducing characteristic variations between panels and preventing defects by preventing element destruction.
[0016]
[Means for Solving the Problems]
  An apparatus for manufacturing a liquid crystal device according to the present invention includes a rubbing stage on which a substrate is placed, a rubbing roll that performs a rubbing process on the substrate placed on the rubbing stage, and a rear side of the rubbing roll. AndWhen rubbingAn air flow path is formed on the surface of the substrate and the rubbing roll.forThree air generating means, and three suction means disposed in front of the rubbing roll and sucking and removing foreign matter conveyed by the air flow path, and one of the air generating means The generating means blows air from the rear of the center in the axial direction of the rubbing roll, and the remaining air generating means among the air generating means is the center of the rubbing roll from behind the position shifted from the center of the rubbing roll. Air is blown in a direction inclined toward the side, and a flow path of air from the air generation unit passes through the surface of the substrate and the rubbing roll toward the suction unit by suction of the suction unit. And
[0017]
  According to such a configuration, the rubbing roll andsubstrateAn air flow path is formed on the surface. By this air flow path, the rubbing roll and thesubstrateThe foreign matter adhering to the surface and the foreign matter scattered in the vicinity thereof are washed away and removed.Further, the air flow path passing through the rubbing roll and the substrate surface can be easily formed, and the effect of sucking and removing foreign matter is high. Further, the direction of the air flow path can be set freely, and a high suction removal effect of foreign matters can be obtained.
[0018]
  The air flow path issubstrateIt extends toward the rubbing stage on which is placedIs preferred.
[0019]
  According to such a configuration, the rubbing roll and the efficientsubstrateIt is possible to remove foreign matter adhering to the surface of the material and foreign matter scattered in the vicinity thereof.
[0020]
  In addition, the present invention further includes a suction unit that stabilizes the air flow path by suction and sucks and removes foreign matter conveyed by the air flow path.Preferably.
[0021]
According to such a configuration, the air flow path is stabilized by being sucked by the suction means. As a result, the foreign matter is surely flowed by the air flow path and sucked by the suction means.
[0022]
The air is humidified.
[0023]
  According to such a configuration, the humidified air issubstrateBecause it passes through the surface ofsubstrateStatic electricity is efficiently removed.
[0024]
The humidity of the humidified air is 50 to 90%.
[0025]
  According to such a configuration,substrateHigh static elimination effect.
[0026]
The air is ultrasonic vibration air.
[0027]
  According to such a configuration, the rubbing roll andsubstrateThe foreign matter adhering to at least one of the surfaces is surely peeled and removed by ultrasonic vibration.
[0028]
The ultrasonic vibration air is humidified.
[0029]
  According to such a configuration, along with reliable foreign matter removal by ultrasonic vibration,substrateStatic electricity can be removed.
[0030]
The air is ionized ultrasonic air.
[0031]
  According to such a configuration, the rubbing roll andsubstrateIt is possible to instantaneously remove the foreign matter that has peeled from at least one of the above.
[0036]
  The liquid crystal device manufacturing method according to the present invention is placed on a rubbing stage.substrateA rubbing process by rubbing the surface while rotating the rubbing roll, and at the time of rubbing with the rubbing roll,The substrate is formed by three air generating means arranged above the rubbing roll.And forming a flow path of air on the surface of the rubbing roll;Three suction means arranged on the opposite side of the substrate from the air generating means,A step of sucking and removing foreign matter conveyed by the air flow path by suction,One of the air generating means blows air from the rear of the center in the axial direction of the rubbing roll, and the remaining air generating means of the air generating means are positions shifted from the center of the rubbing roll. From the rear of the rubbing roll in a direction inclined toward the center side of the rubbing roll, and the air flow path from the air generation means passes through the surface of the substrate and the rubbing roll by the suction of the suction means. To the suction meansIt is characterized by that.
[0037]
  According to such a configuration, when rubbing with a rubbing roll,substrateAnd an air flow path is formed on the surface of at least one of the rubbing rolls. When rubbingsubstrateForeign matter is generated by rubbing the surface while rotating the rubbing roll. The generated foreign matter is conveyed through the air flow path stabilized by suction and is removed by suction.
[0038]
  liquidThe crystal device is manufactured by the liquid crystal device manufacturing apparatus or the liquid crystal device manufacturing method.Is preferred.
[0039]
According to such a configuration, since foreign matter generated by rubbing is reliably eliminated, the rubbing strength is constant, there is little variation in characteristics between liquid crystal panels, and display quality is high.
[0040]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is an explanatory view showing an apparatus for manufacturing a liquid crystal device according to the first embodiment of the present invention. FIG. 2 is an equivalent circuit diagram of various elements and wirings in a plurality of pixels constituting the pixel region of the liquid crystal device. FIG. 3 is a plan view of an element substrate such as a TFT substrate as viewed from the counter substrate side together with each component formed thereon, and FIG. 4 is an assembly process in which the element substrate and the counter substrate are bonded together to enclose liquid crystal. It is sectional drawing which cut | disconnects and shows the liquid crystal device after completion | finish at the position of the HH 'line | wire of FIG. FIG. 5 is a cross-sectional view showing the liquid crystal device in detail. FIG. 6 is a flowchart showing the panel assembly process.
[0041]
First, the structure of the liquid crystal panel will be described with reference to FIGS.
[0042]
As shown in FIGS. 3 and 4, the liquid crystal panel is configured by sealing a liquid crystal 50 between an element substrate 10 such as a TFT substrate and a counter substrate 20. On the element substrate 10, pixel electrodes and the like constituting pixels are arranged in a matrix. FIG. 2 shows an equivalent circuit of elements on the element substrate 10 constituting the pixel.
[0043]
As shown in FIG. 2, in the pixel region, a plurality of scanning lines 3a and a plurality of data lines 6a are wired so as to cross each other, and a pixel electrode is formed in a region partitioned by the scanning lines 3a and the data lines 6a. 9a are arranged in a matrix. A TFT 30 is provided corresponding to each intersection of the scanning line 3 a and the data line 6 a, and the pixel electrode 9 a is connected to the TFT 30.
[0044]
The TFT 30 is turned on by the ON signal of the scanning line 3a, whereby the image signal supplied to the data line 6a is supplied to the pixel electrode 9a. A voltage between the pixel electrode 9 a and the counter electrode 21 provided on the counter substrate 20 is applied to the liquid crystal 50. In addition, a storage capacitor 70 is provided in parallel with the pixel electrode 9a, and the storage capacitor 70 makes it possible to hold the voltage of the pixel electrode 9a for a time that is, for example, three orders of magnitude longer than the time when the source voltage is applied. The storage capacitor 70 improves the voltage holding characteristic and enables image display with a high contrast ratio.
[0045]
FIG. 5 is a schematic cross-sectional view of a liquid crystal panel focusing on one pixel.
[0046]
A groove 11 is formed in the element substrate 10 such as glass or quartz in order to adjust the step shape when the element substrate is completed. A TFT 30 having an LDD structure is formed on the groove 11 with a light shielding film 12 and a first interlayer insulating film 13 interposed therebetween. The groove 11 flattens the boundary surface between the TFT substrate and the liquid crystal 50.
[0047]
The TFT 30 includes a scanning line 3a that forms a gate electrode through an insulating film 2 on a semiconductor layer in which a channel region 1a, a source region 1d, and a drain region 1e are formed. The light shielding film 12 is formed in a region corresponding to the formation region of the TFT 30, a formation region such as a data line 6a and a scanning line 3a described later, that is, a region corresponding to a non-display region of each pixel. The light shielding film 12 prevents reflected light from entering the channel region 1 a, the source region 1 d, and the drain region 1 e of the TFT 30.
[0048]
A second interlayer insulating film 14 is laminated on the TFT 30, and an intermediate conductive layer 15 is formed on the second interlayer insulating film 14. On the intermediate conductive layer 15, the capacitor line 18 is disposed opposite to the dielectric film 17. The capacitance line 18 includes a capacitance layer and a light shielding layer, and forms a storage capacitor with the intermediate conductive layer 15 and has a light shielding function for preventing internal reflection of light. The intermediate conductive layer 15 is formed at a position relatively close to the semiconductor layer, so that irregular reflection of light can be efficiently prevented.
[0049]
A third interlayer insulating film 19 is disposed on the capacitor line 18, and a data line 6 a is stacked on the third interlayer insulating film 19. The data line 6a is electrically connected to the source region 1d through contact holes 24a and 24b penetrating the third and second interlayer insulating films 19 and 14. A pixel electrode 9a is stacked on the data line 6a with a fourth interlayer insulating film 25 interposed therebetween. The pixel electrode 9a is electrically connected to the drain region 1e through the capacitor line 18 through contact holes 26a and 26b that penetrate the fourth, third, and second interlayer insulating films 25, 19, and 14. An alignment film 16 made of polyimide polymer resin is laminated on the pixel electrode 9a, and is rubbed in a predetermined direction by the apparatus shown in FIG.
[0050]
When the ON signal is supplied to the scanning line 3a (gate electrode), the channel region 1a becomes conductive, the source region 1d and the drain region 1e are connected, and the image signal supplied to the data line 6a becomes the pixel electrode. 9a.
[0051]
On the other hand, the counter substrate 20 is provided with a first light-shielding film 23 in a region facing the data line 6a, scanning line 3a, and TFT 30 formation region of the TFT array substrate, that is, in a non-display region of each pixel. The first light shielding film 23 prevents incident light from the counter substrate 20 side from entering the channel region 1 a, the source region 1 d, and the drain region 1 e of the TFT 30. A counter electrode (common electrode) 21 is formed over the entire surface of the substrate 20 on the first light shielding film 23. An alignment film 22 made of a polyimide-based polymer resin is laminated on the counter electrode 21, and is rubbed in a predetermined direction by the apparatus shown in FIG.
[0052]
A liquid crystal 50 is sealed between the element substrate 10 and the counter substrate 20. Thereby, the TFT 30 writes the image signal supplied from the data line 6a to the pixel electrode 9a at a predetermined timing. The alignment state of the molecular assembly of the liquid crystal 50 changes according to the written potential difference between the pixel electrode 9a and the counter electrode 21 to modulate light and enable gradation display.
[0053]
As shown in FIGS. 3 and 4, the counter substrate 20 is provided with a light shielding film 42 as a frame for partitioning the display area. The light shielding film 42 is formed of, for example, the same or different light shielding material as the light shielding film 23.
[0054]
A sealing material 41 that encloses liquid crystal in a region outside the light shielding film 42 is formed between the element substrate 10 and the counter substrate 20. The sealing material 41 is disposed so as to substantially match the contour shape of the counter substrate 20, and fixes the element substrate 10 and the counter substrate 20 to each other. The sealing material 41 is missing in a part of one side of the element substrate 10, and a liquid crystal injection port 78 for injecting the liquid crystal 50 is formed in the gap between the bonded element substrate 10 and the counter substrate 20. The After the liquid crystal is injected from the liquid crystal injection port 78, the liquid crystal injection port 78 is sealed with a sealing material 79.
[0055]
A data line driving circuit 61 and a mounting terminal 62 are provided along one side of the element substrate 10 in a region outside the sealing material 41 of the element substrate 10, and scanning lines are provided along two sides adjacent to the one side. A drive circuit 63 is provided. On the remaining side of the element substrate 10, a plurality of wirings 64 are provided for connecting between the scanning line driving circuits 63 provided on both sides of the screen display area. In addition, a conductive material 65 for electrically connecting the element substrate 10 and the counter substrate 20 is provided in at least one corner of the counter substrate 20.
[0056]
Next, the panel assembly process will be described with reference to FIG. The element substrate 10 (TFT substrate) and the counter substrate 20 are manufactured separately. In the next steps S2 and S7, polyimide (PI) to be the alignment films 16 and 22 is applied to the TFT substrate and the counter substrate 20 prepared in steps S1 and S6, respectively. Next, in steps S3 and S8, the alignment film 16 on the surface of the element substrate 10 and the alignment film 22 on the surface of the counter substrate 20 are rubbed using the apparatus shown in FIG.
[0057]
Next, a cleaning process is performed in steps S4 and S9. This cleaning process is for removing dust generated by the rubbing process. When the cleaning process is completed, a sealing material 41 and a conductive material 65 (see FIG. 3) are formed in step S5. Next, in step S10, the element substrate 10 and the counter substrate 20 are bonded together, and in step S11, pressure bonding is performed while alignment is performed, and the sealing material 41 is cured. Finally, in step S12, liquid crystal is sealed from a notch provided in a part of the sealing material 41, and the notch is closed to seal the liquid crystal.
[0058]
The rubbing process in steps S3 and S8 is performed using the apparatus shown in FIG. In FIG. 1, the rubbing apparatus has a rubbing stage 81 and a rubbing roll 83. A liquid crystal substrate 82 is placed on the rubbing stage 81. The board | substrate 82 is the element substrate 10 (refer FIG. 5) after the polyimide application | coating before bonding, for example. The rubbing stage 81 and the rubbing roll 83 are relatively movable, and FIG. 1 shows that the rubbing stage 81 moves relative to the rubbing roll 83 in the horizontal direction indicated by an arrow, for example. .
[0059]
By the movement of the rubbing stage 81, the liquid crystal substrate 82 is movable in a direction substantially parallel to the surface and substantially perpendicular to the rotation axis of the rubbing roll 83. A rubbing roll 83 is provided above the transport path of the liquid crystal substrate 82.
[0060]
The rubbing roll 83 is formed in a cylindrical shape and is rotatable in the circumferential direction around the center of the circle. A rubbing cloth 84 made of, for example, rayon is attached to the peripheral surface of the rubbing roll 83. At least one of the rubbing stage 81 and the rubbing roll 83 is also movable in the vertical direction. The rubbing roll 83 and the rubbing stage 81 are arranged in the vertical direction so that the rubbing pressure on the substrate 82 by the rubbing cloth 84 becomes a predetermined value. Positioning is performed.
[0061]
In the present embodiment, a humidified air blowing device 85 is disposed at a predetermined position above the rubbing roll 83. The humidified air blowing device 85 may be moved along with the movement of the rubbing stage 81 or the rubbing roll 83, or may be fixed at a predetermined position. The humidified air blower 85 blows the humidified air from the upper side of the rubbing roll 83 through the surface of the substrate 82 toward the upper rear end of the rubbing stage 81 as indicated by a flow 86 indicated by an arrow. Yes. The humidified air blowing device 85 can appropriately set the supply amount and direction of the humidified air. The humidity of the humidified air is set to 50 to 90%.
[0062]
The humidified air flow 86 has a predetermined width in the horizontal direction. For example, the humidified air flow 86 may have a width similar to the width of the substrate 82 in the direction perpendicular to the rubbing direction. Further, the humidified air flow 86 partially passes near the surface of the rubbing roll 83.
[0063]
On the other hand, a suction device 87 is disposed at the rear end of the rubbing stage 81. The suction device 87 may be moved along with the movement of the rubbing stage 81 or the rubbing roll 83, or may be fixed at a predetermined position. The suction device 87 can suck air from the liquid crystal substrate 82 side through the suction port 88 with the opening facing the liquid crystal substrate 82 side at the upper rear end of the rubbing stage 81 as a suction port 88. The suction device 87 exhausts the sucked air through an exhaust port (not shown). The suction device 87 can set the suction pressure as appropriate.
[0064]
The suction port 88 is configured such that the lower end of the opening is substantially flush with the surface of the rubbing stage 81, and the upper end of the opening is positioned higher than the surface of the substrate 82, for example. The suction port 88 has a predetermined width in the horizontal direction, and may be configured to have a width similar to the width of the substrate 82 in the direction perpendicular to the rubbing direction, for example.
[0065]
That is, the suction port 88 of the suction device 87 is provided at a position corresponding to the humidified air flow 86 by the humidified air blower 85, and the humidified air flow 86 follows the same direction as the rubbing on the surface of the liquid crystal substrate 82. Therefore, it is formed stably at a sufficient flow rate and speed.
[0066]
Next, the operation of the embodiment configured as described above will be described.
[0067]
First, in step S2 in FIG. 6, a substrate 82 coated with polyimide as an alignment film is placed on a rubbing stage 81 and adsorbed on the surface. Next, in step S22, the rubbing stage 81 is raised and the vertical position of the rubbing stage 81 is adjusted so that the rubbing cloth 84 on the peripheral surface of the rubbing roll 83 presses the surface of the liquid crystal substrate 82 with a predetermined pressure. Note that the vertical position may be adjusted by lowering the rubbing roll 83.
[0068]
Next, the rubbing stage 81 (or rubbing roll 83) is moved in the horizontal direction so that the liquid crystal substrate 82 is positioned below the rubbing roll 83. Then, the rubbing stage 81 (or the rubbing roll 83) is moved in the horizontal direction while rotating the rubbing roll 83, and the rubbing process is started.
[0069]
In the present embodiment, from the start of the rubbing process, the blowing by the humidified air blowing device 85 is started and the suction and the exhausting by the suction device 87 are started. As a result, a humidified air flow 86 is formed on the surface of the substrate 82.
[0070]
As the rubbing roll 83 rotates, the liquid crystal substrate 82 moves in the horizontal direction, and the rubbing cloth 84 on the peripheral surface of the rubbing roll 83 rubs the alignment film on the surface of the liquid crystal substrate 82 to perform the rubbing process.
[0071]
As the liquid crystal substrate 82 is rubbed at high speed by the rubbing cloth 84 on the surface of the rubbing roll 83, foreign matter is generated from the surface of the liquid crystal substrate 82, the rubbing cloth 84, and the like. These foreign substances pass near the surface of the rubbing roll 83 and are caused to flow toward the rear end side of the liquid crystal substrate 82 by the humidified air flowing at a sufficient flow rate and speed on the surface of the liquid crystal substrate 82, and further, the suction port Suction device 87 is sucked through 88.
[0072]
Regardless of the movement of the rubbing stage 81, the humidified air flow 86 is formed in the vicinity of the surface of the rubbing roll 83 and on the surface of the substrate 82. From the start to the end of the rubbing process, the substrate 82, the rubbing cloth 84, etc. The foreign matter continues to be sucked by the suction device 87.
[0073]
As a result, the foreign matter generated by the rubbing process does not remain on the surface of the substrate 82 and the rubbing roll 83, and the suction device 87 simultaneously with the rubbing process without scattering near the substrate 82 and the rubbing roll 83. Is aspirated and eliminated.
[0074]
Further, at the time of rubbing, the liquid crystal substrate 82 is rubbed at high speed by the rubbing cloth 84 on the surface of the rubbing roll 83, so that the substrate 82 tends to be charged. However, since the flow 86 formed on the surface of the substrate 82 is humidified air, the generation of static electricity on the substrate 82 is reduced. In addition, the high static electricity removal effect is acquired by setting the humidity of humidification air to 50 to 90%.
[0075]
Thus, in this embodiment, by providing a humidifying air blowing device and a suction device, a stable flow path by humidifying air is formed on the surface of the rubbing roll or in the vicinity thereof and on the liquid crystal substrate surface during rubbing. Thus, foreign matter generated during rubbing can be quickly and reliably removed by suction. For this reason, foreign matter does not accumulate at the time of rubbing, and the rubbing strength does not change due to the foreign matter tilting the substrate. In addition, since a humid air channel is formed on the substrate surface, generation of static electricity is prevented. As a result, the rubbing strength can be kept constant, display defects can be prevented, characteristic variations between the liquid crystal panels can be reduced, and element failure can be prevented to reduce defects.
[0076]
FIG. 7 is an explanatory view showing a second embodiment of the present invention. In FIG. 7, the same components as those in FIG.
[0077]
Although 1st Embodiment demonstrated the example which used 1 each of the air blower and suction device which comprise the flow 86 of humidified air, this Embodiment shows the example which has arrange | positioned several air blower and suction devices. ing.
[0078]
The humidified air blowing devices 85a to 85c have the same configuration as the humidified air blowing device 85 in FIG. In the present embodiment, the humidified air blowing devices 85 a to 85 c pass through the vicinity of the surface of the rubbing roll 83 from the upper rear side of the rubbing roll 83, and the humidified air flow 95 toward the surface side of the substrate 82. Is generated. In the example of FIG. 7, the humidified air blower 85b blows air from the center rear in the axial direction of the rubbing roll 83, and the humidified air blowers 85a and 85c are respectively shifted from the position shifted from the axial center of the rubbing roll 83 to the center side. Air is blown in a slightly inclined direction.
[0079]
On the other hand, the suction / exhaust devices 91 to 92 are disposed at three positions on the rear end of the substrate 82 and perform suction similar to the suction device 87 of FIG. By the suction / exhaust devices 91 to 92, the flow of the humidified air on the surface of the substrate 82 becomes a flow path 96 toward the suction / exhaust devices 91 to 93.
[0080]
In the embodiment configured as described above, the humidified air flow 95 by the three humidified air blowing devices 85a to 85c passes through the surface of the rubbing roll 83 from above, and further passes through the surface of the liquid crystal substrate 82 to provide three flows. It goes to the suction / exhaust devices 91 to 93. As a result, foreign matter generated during rubbing can be quickly and reliably removed from the surface of the rubbing roll 83 and the substrate 82, and the substrate 82 can be prevented from being charged.
[0081]
In this embodiment, since the flow of humidified air is formed not only in one direction but also in a plurality of directions, it is possible to improve the foreign matter suction effect.
[0082]
FIG. 8 is an explanatory view showing a third embodiment of the present invention. In FIG. 8, the same components as those in FIG.
[0083]
The present embodiment is different from the first embodiment in that an ultrasonic vibration air generator 98 is employed instead of the humidified air blower 85. That is, the ultrasonic vibration air generator 98 is different from the humidified air blower 85 in FIG. 1 in that the ultrasonic vibration air is discharged instead of the humid air.
[0084]
In the embodiment configured as described above, the flow 86 generated by the ultrasonic vibration air discharged from the ultrasonic vibration air generator 98 passes near the surface of the rubbing roll 83 and further passes over the surface of the substrate 82. Then, it goes to the suction port 88 of the suction device 87. The ultrasonic vibration air surely peels and removes foreign particles adhering to the surfaces of the rubbing roll 83 and the substrate 82 from the surface by vibration excitation. The foreign matter adhering to the surface of the rubbing roll 83 and the substrate 82 due to the flow 86 of the ultrasonic vibration air is removed by suction to the suction device 87 via the suction port 88.
[0085]
As described above, in the present embodiment, the same effects as those of the first embodiment can be obtained, and foreign particles can be vibrated and excited by ultrasonic vibration, so that foreign matters can be reliably removed.
[0086]
Obviously, the ultrasonic vibration air of the present embodiment may be used after being humidified. In this case, a high charge removal effect can be obtained.
[0087]
FIG. 9 is an explanatory view showing a fourth embodiment of the present invention. In FIG. 9, the same components as those of FIG.
[0088]
This embodiment is different from the first embodiment in that an ionized air generator 99 is used instead of the humidified air blower 85. That is, the ionized air generator 99 is different from the humidified air blower 85 in FIG. 1 in that ionized ultrasonic air is discharged instead of the humidified air.
[0089]
In the embodiment configured as described above, the flow 86 by the ionized ultrasonic air discharged from the ionized air generator 99 passes near the surface of the rubbing roll 83 and further passes over the surface of the substrate 82. Then, it goes to the suction port 88 of the suction device 87. The ionized ultrasonic air instantaneously removes the foreign matter peeled off from the surfaces of the rubbing roll 83 and the substrate 82. Due to the ionized ultrasonic air flow 86, foreign matter adhering to the surface of the rubbing roll 83 and the substrate 82 is neutralized and removed by suction to the suction device 87 via the suction port 88.
[0090]
As described above, in the present embodiment, the same effects as those of the first embodiment can be obtained, and the foreign matter can be removed reliably after ionizing with ionized ultrasonic air.
[0091]
In each of the above embodiments, an example in which an air flow path is formed from the rear of the rubbing roll to the rear end of the substrate passing near the surface of the rubbing roll has been described. However, the air flow path is limited to this. It is obvious that the flow path may be formed in any direction as long as it passes near the surface of the substrate and the rubbing roll.
[0092]
【The invention's effect】
As described above, according to the present invention, the foreign matter generated by rubbing is eliminated, and static electricity is efficiently removed, so that the rubbing strength is constant, display failure is prevented, and characteristic variation between liquid crystal panels is reduced. In addition, there is an effect that it is possible to reduce defects by preventing element destruction.
[Brief description of the drawings]
FIG. 1 is an explanatory view showing an apparatus for manufacturing a liquid crystal device according to a first embodiment of the invention.
FIG. 2 is an equivalent circuit diagram of various elements and wirings in a plurality of pixels constituting a pixel region of the liquid crystal device.
FIG. 3 is a plan view of an element substrate such as a TFT substrate as viewed from the counter substrate side together with each component formed thereon.
4 is a cross-sectional view of the liquid crystal device after the assembly process in which the element substrate and the counter substrate are bonded to each other and the liquid crystal is sealed is cut along the line HH ′ in FIG. 3;
FIG. 5 is a cross-sectional view illustrating a liquid crystal device in detail.
FIG. 6 is a flowchart showing a panel assembly process.
FIG. 7 is an explanatory view showing a second embodiment of the present invention.
FIG. 8 is an explanatory diagram showing a third embodiment of the present invention.
FIG. 9 is an explanatory diagram showing a fourth embodiment of the present invention.
FIG. 10 is an explanatory view showing a rubbing apparatus.
[Explanation of symbols]
81 ... Rubbing stage
82 ... Board
83 ... rubbing roll
85 ... Humidified air blower
86 ... Flow of humidified air
87 ... suction device
88 ... Suction port

Claims (7)

A rubbing stage on which the substrate is placed;
A rubbing roll that performs a rubbing process on the substrate placed on the rubbing stage;
Located rearwardly of the rubbing roll, and three air generating means for forming an air flow path relative to the substrate and the surface of the rubbing roll at a rubbing,
Three suction means arranged in front of the rubbing roll and sucking and removing foreign matter conveyed by the air flow path;
One of the air generating means blows air from behind the center in the axial direction of the rubbing roll,
The remaining air generating means among the air generating means perform air blowing in a direction inclined toward the center side of the rubbing roll from the rear of the position shifted from the center of the rubbing roll,
An apparatus for manufacturing a liquid crystal device, wherein a flow path of air from the air generating means passes through the surface of the substrate and the rubbing roll toward the suction means by suction of the suction means.   The apparatus for manufacturing a liquid crystal device according to claim 1, wherein the air is humidified.   The apparatus for manufacturing a liquid crystal device according to claim 2, wherein the humidity of the humidified air is 50 to 90%.   The apparatus for manufacturing a liquid crystal device according to claim 1, wherein the air is ultrasonic vibration air.   The liquid crystal device manufacturing apparatus according to claim 4, wherein the ultrasonic vibration air is humidified.   The apparatus for manufacturing a liquid crystal device according to claim 1, wherein the air is ionized ultrasonic air. Rubbing by rubbing the surface of the substrate placed on the rubbing stage while rotating the rubbing roll; and
Forming a flow path of air on the surface of the substrate and the rubbing roll by three air generating means disposed above the rubbing roll when rubbing with the rubbing roll;
Three suction means arranged on the side opposite to the air generating means with respect to the substrate comprise sucking and removing foreign matter conveyed by the air flow path by suction;
One of the air generating means blows air from behind the center in the axial direction of the rubbing roll,
The remaining air generating means among the air generating means perform air blowing in a direction inclined toward the center side of the rubbing roll from the rear of the position shifted from the center of the rubbing roll,
A method of manufacturing a liquid crystal device, wherein a flow path of air from the air generating means passes through the surface of the substrate and the rubbing roll toward the suction means by suction of the suction means.

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