JPH10253961A - Method and device for rubbing substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To make it possible to prevent various influences caused by fine particles and to easily manufacture a high quality element, by performing rubbing processing while sucking the fine particles caused from at least one side between a substrate and a rubbing processing member. SOLUTION: A part of an oriented film or a hair, etc., of cloth material 22 are generated from a contact part between the substrate 20 and a rubbing roller 21 as the fine particles. A sucking member 23 arranging a sucking hole 23a upward and the left side of the contact part is provided to suck the fine particles generated in the contact part from the sucking hole 23a and to eject them out of a system. As the sucking member 23, though it may be one forcedly sucking air by a sucking fan, etc., an outlet is preferred to be provided out of doors since the necessity that a high density filter, etc., is provided exists when the outlet is provided in a clean room. At this time, the sucking hole 23a is provided with a shape prolonged in the axial direction of the rubbing roller 21, and is provided with an opening position arranged nearly parallel to the contact part between the substrate 20 and the rubbing roller 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method and apparatus for rubbing a substrate, and more particularly to a method and apparatus for rubbing a surface of a substrate for forming a liquid crystal electro-optical element.

[0002]

2. Description of the Related Art A liquid crystal electro-optical element is widely used in various application fields such as a liquid crystal display device. In many cases, a liquid crystal is sandwiched between two substrates.
The optical state of the liquid crystal is electrically controlled. Here, the surface of the substrate may be subjected to a rubbing process for controlling the liquid crystal molecules to be aligned in a predetermined direction and exhibit directivity when the substrate comes into contact with the liquid crystal.

The rubbing treatment is usually performed by forming an alignment film such as polyimide or polyvinyl alcohol on a substrate and rubbing the surface of the alignment film in a predetermined direction with a cloth or the like. Many fine scratches are formed on the rubbed surface of the alignment film so as to extend in a predetermined direction, and the liquid crystal molecules are aligned in the direction in which the scratches extend.

FIG. 15 is a schematic view of an apparatus for performing the rubbing process. As shown in this figure, the rubbing device is provided with an introduction surface 10 for introducing a substrate in advance, and a plurality of transport rollers 11 are arranged in parallel along the introduction surface 10. The transport rollers 11 are rotationally driven by drive means (not shown) to transport the substrate 20 to the right side in the figure.

A rubbing roller 21 is provided above the introduction surface 10.
The rubbing roller 21 is configured to rotate clockwise by driving means (not shown). A cloth material 22 is provided on the peripheral surface of the rubbing roller 21.
Is pasted. The cloth material 22 is woven with a fiber such as nylon or rayon, and many fine hair feet are densely formed on the surface.

In the rubbing treatment, a substrate 20 made of a glass substrate or the like having an alignment film formed on the surface thereof is transported from the left to the right by a transport roller 11, and a cloth material 22 adhered on the peripheral surface of a rubbing roller 21 is provided. This is performed by rubbing the alignment film. The rubbing roller 21 rubs the surface of the substrate 20 while being pressed against the substrate 20 by a predetermined pressure by a pressure applying mechanism (not shown).

[0007]

By the way, when the rubbing treatment is performed as described above, the alignment film is scraped off from the surface of the substrate 20 by being rubbed with the cloth material 22, and fine dust is generated. Fine dust such as particles is generated from the surface of the cloth material 22 due to the scraping of the cloth material 22, and the dust adheres to the surface of the cloth material 22 and also to the surface of the substrate 20. The adhesion of dust to the cloth material 22 affects the rubbing state in the subsequent rubbing process, and the adhesion of dust to the substrate 20 affects the surface state of the substrate 20. It causes deterioration.

The removal of the dust adhering to the substrate 20 is performed in a cleaning step after the rubbing step. However, it is difficult to completely remove the dust by the cleaning, and the dust adheres to the cloth material 22. When the rubbing state is affected, it cannot be recovered by cleaning.

In general, in a manufacturing process of a liquid crystal display device, it is necessary to control the degree of cleanness very precisely. In the rubbing treatment, dust is dispersed in and around the rubbing device. Therefore, there is a problem that the rubbing step and the cleaning step must be performed in a special environment separated from the other manufacturing steps so that the other manufacturing steps are not affected by the reduction in cleanliness.

SUMMARY OF THE INVENTION The present invention has been made to solve such problems, and it is possible to prevent various effects caused by dust generated by a rubbing process and easily manufacture a high-quality liquid crystal electro-optical element. It is an object of the present invention to provide a method and apparatus for rubbing a substrate that can be performed.

[0011]

In order to achieve the above object, a rubbing method for a substrate according to the first aspect of the present invention is a method for rubbing a substrate, wherein the surface of the substrate used for a liquid crystal electro-optical element is rubbed by a rubbing member. The method is characterized in that rubbing is performed while sucking dust generated from at least one of the substrate and the rubbing member.

According to this means, the dust generated when the substrate surface is rubbed with the rubbing member is sucked, so that the dust is deposited on the substrate surface or adheres to the rubbing member. Is suppressed, and the display quality of the liquid crystal electro-optical element can be improved.

According to a second aspect of the present invention, there is provided the substrate rubbing method according to the first aspect, wherein the suction is performed in the dust generating section.

According to this means, since the dust is sucked in the dust generating portion, the dust is not scattered to the surrounding environment, and the control of the cleanliness in the manufacturing process is facilitated.

According to a third aspect of the present invention, there is provided a substrate rubbing device for rubbing a surface of a substrate used for a liquid crystal electro-optical element, and moving the substrate and the rubbing member relatively to each other. A rubbing device for a substrate, comprising: a driving unit for driving a surface to be rubbed by the rubbing member; and a suction unit for sucking dust generated from at least one of the substrate and the rubbing member. I do.

According to this means, as in the first aspect, the accumulation of dust on the surface of the substrate and the adhesion to the rubbing member are suppressed, thereby improving the display quality of the liquid crystal electro-optical element. Can be.

A rubbing device according to a fourth aspect is the rubbing device according to the third aspect.
, The suction means includes a suction member having a suction port opened toward a contact portion between the substrate and the rubbing processing member.

According to this means, since the contact portion between the substrate and the rubbing member corresponds to the dust generating portion, the dust is not scattered to the surrounding environment as in the second aspect.
Management of cleanliness in the manufacturing process is also facilitated.

According to a fifth aspect of the present invention, in the rubbing apparatus for a substrate according to the fourth aspect, the rubbing member is a rubbing roller rotating with respect to the substrate, and the suction port is provided for contacting the substrate with the rubbing roller. It is characterized by being open toward the part. According to this means, the rubbing process can be performed by the rubbing roller having a simple structure, and the contact portion between the substrate and the rubbing roller is always at a fixed position with respect to the rubbing roller, so that the suction member can be easily arranged. can do.

According to a sixth aspect of the present invention, in the rubbing apparatus for a substrate according to the fifth aspect, the suction member has a shape narrowed toward a contact portion between the substrate and the rubbing roller.
The suction port is formed at a tip portion thereof.

According to this means, since the suction member is formed in a shape narrowed toward the front end, the suction port can be arranged at a position closer to the contact portion between the substrate and the rubbing roller, and the suction member can be arranged. The suction force can be increased by forming the mouth at the narrowed tip.

According to a seventh aspect of the present invention, in the substrate rubbing device according to the fifth or sixth aspect, the suction member has a plurality of suction paths divided in an axial direction of the rubbing roller, and a tip of the suction path. The suction port is formed in each of the portions.

According to this means, since the suction port is provided at each of the distal ends of the divided suction paths, the suction force at the suction port can be increased, and the dust can be reliably formed along the axial direction of the rubbing roller. Can be sucked.

According to an eighth aspect of the present invention, in the substrate rubbing apparatus according to the fifth aspect, the suction member is formed so as to surround the rubbing roller, and has a suction port facing a peripheral surface of the rubbing roller. It is characterized by the following.

According to this means, dust adhering to the rubbing roller can be more reliably removed, and the size of the apparatus can be reduced by forming the suction member so as to surround the rubbing roller. Can be planned.

In a rubbing apparatus for a substrate according to a ninth aspect of the present invention, the rubbing processing member or the substrate is provided with a spraying means for spraying a fluid to the substrate, and the spraying position of the spraying means is set near the suction port. It is characterized by having been set.

According to this means, the dust can be sucked from the suction port of the suction member after the fluid is sprayed on the rubbing member or the substrate by the spraying means to separate the dust, so that the rubbing member or the substrate can be sucked. It is possible to more reliably remove dust adhering to the surface.

A rubbing apparatus for a substrate according to claim 10 is
4. The rubbing device according to claim 3, wherein the rubbing processing member is a rubbing roller that rotates with respect to the substrate, and wherein the suction unit is configured to contact a rim of the rubbing roller with a peripheral edge of the suction port. It is characterized by having a suction nozzle arranged on the outer periphery of the roller.

According to this means, since the peripheral portion of the suction port of the suction nozzle is in contact with the bristle feet of the rubbing roller,
Dust adhered to the outer peripheral portion of the rubbing roller can be removed by a strong suction force before the outer peripheral portion comes into contact with the substrate, and as a result, the substrate can be rubbed with the outer peripheral portion of the rubbing roller always clean. This makes it possible to prevent dust from adhering to the substrate.

A rubbing device for a substrate according to claim 11 is
4. The rubbing device according to claim 3, wherein the rubbing processing member is a rubbing roller that rotates with respect to the substrate, and wherein the suction unit is configured to contact a rim of the rubbing roller with a peripheral edge of the suction port. It is characterized by comprising a suction nozzle arranged on an outer peripheral portion of a roller, and a suction member having a suction port opened toward a contact portion between the substrate and the rubbing processing member.

According to this means, as in the tenth aspect,
Dust adhering to the outer peripheral portion of the rubbing roller can be removed with a strong suction force before the outer peripheral portion contacts the substrate, so the substrate can be rubbed with the outer peripheral portion of the rubbing roller always clean. As a result, the adhesion of dust to the substrate can be prevented, and the dust generated at the contact portion between the substrate and the rubbing processing member is also suctioned and removed from the suction port of the suction member. Can be prevented from being scattered, and the dust can be prevented from accumulating on the substrate surface or adhering to the rubbing member. As a result, the display quality of the liquid crystal electro-optical element can be reduced. It is possible to further increase the cleanliness and to further easily manage the cleanliness in the manufacturing process.

A rubbing apparatus for a substrate according to claim 12 is
The suction nozzle according to claim 10 or 11, wherein the suction nozzle is arranged so as to be able to move closer to and away from an outer peripheral portion of the rubbing roller, and further, when the surface of the substrate is rubbed by the rubbing processing member, the suction nozzle is moved. Driving means for moving the suction nozzle closer to the outer peripheral portion of the rubbing roller and moving the suction nozzle away from the outer peripheral portion of the rubbing roller when not rubbing is provided.

According to this means, when the surface of the substrate is not rubbed by the rubbing roller, the suction nozzle is spaced apart from the outer peripheral portion of the rubbing roller, so that the peripheral edge of the suction port of the suction nozzle and the bristle of the rubbing roller. Since there is no contact with the foot portion, it is possible to reduce the thermal effect due to the contact between the peripheral edge portion and the hair foot portion and the deterioration of the rubbing roller due to the contact.

A rubbing device for a substrate according to claim 13 is
The peripheral edge portion of the suction port of the suction nozzle according to any one of claims 10 to 12, wherein the peripheral portion of the suction port extends from a tip of the hair foot portion to half of a length of the hair foot portion. It is characterized by being in contact.

According to this means, it is ensured that the peripheral edge of the suction port of the suction nozzle is in contact with the bristle feet of the rubbing roller, while the peripheral edge of the suction port is prevented from coming into contact with the ground of the rubbing roller. Thus, the ground can be prevented from being scraped off by the peripheral portion of the suction port.

A rubbing device for a substrate according to claim 14 is
In any one of claims 10 to 13, the suction port of the suction nozzle is provided with a comb portion that comes into contact with the bristle feet of the rubbing roller.

According to this means, it is possible to enhance the effect of sucking the dust from the suction port by hitting the dust adhering to the bristle feet while aligning the fur of the bristle feet of the rubbing roller with the comb part.

A rubbing device for a substrate according to claim 15 is
The suction nozzle according to any one of claims 10 to 14, wherein at least a portion of the suction port, which is in contact with a bristle portion of the rubbing roller, at a peripheral edge of the suction port is formed of a non-conductive material. .

According to this means, when the peripheral portion of the suction port of the suction nozzle and the bristle portion of the rubbing roller are in contact with each other for a long period of time, if the peripheral portion is scraped by any chance,
Even if liquid crystal is sealed and commercialized with the dropped shavings attached to the substrate surface, short-circuiting during use of the product can be prevented because the shavings are non-conductive materials.

A rubbing device for a substrate according to claim 16 is
In claim 15, the non-conductive material is glass or quartz.

According to this means, similar to claim 15,
Even if the liquid crystal is sealed and the product is produced with the shavings from the suction port adhered to the substrate surface, a short circuit during use can be prevented, and the peripheral edge of the suction port that comes in contact with the bristle feet is durable. Performance can be improved, and the peripheral portion can be easily formed into a mirror-like shape.

[0042]

Next, an embodiment according to the present invention will be described with reference to the accompanying drawings.

First, referring to FIG. 12 and FIG.
The liquid crystal panel will be described. As shown in FIG.
On the FT array substrate 20, a sealing material 101 is provided along the edge thereof, and a light-shielding peripheral partition 102 made of, for example, the same or different material as the black matrix 109 is provided inside the sealing material 101 in parallel. ing. A data line driving circuit 103 is provided in a region outside the sealing material 101.
The mounting terminals 104 are provided along one side of the TFT array substrate 20, and the scanning line driving circuit 105 is provided along two sides adjacent to the one side. Furthermore, TF
On one remaining side of the T array substrate 20, a plurality of wirings 106 are provided for connecting between the scanning line driving circuits 105 provided on both sides of the screen display area. In addition, the sealing material 10
The TFT array substrate 20 and the opposing substrate 108
Silver point 1 made of conductive material for establishing electrical continuity between
07 is provided. Then, as shown in FIG.
A counter substrate 108 having substantially the same contour as the sealing material 101 shown in FIG. 12 is fixed to the TFT array substrate 20 via the sealing material 101.

The data line driving circuit 103 and the scanning line driving circuit 105 are electrically connected to a data line as a source electrode and a scanning line (both not shown) as a gate electrode via wiring. Data line drive circuit 10
An image signal converted into a format that can be immediately displayed from a control circuit (not shown) is input to the scanning line driving circuit 1.
The data line driving circuit 103 sends a signal voltage corresponding to the image signal to the data line (source electrode) in accordance with the step 05 in which the gate voltage is sequentially sent to the scanning line in a pulsed manner. Particularly in this embodiment, since the TFT 111 is a p-Si (polysilicon) type TFT, the data line driving circuit 103 and the scanning line driving circuit 105 can be formed in the same step when the TFT 111 is formed. This is advantageous in manufacturing.

Referring to FIG. 14, an example of an assembling process of the above-mentioned TFT liquid crystal panel will be briefly described. After receiving and cleaning the TFT array substrate (element substrate) 20 and the opposing substrate 108, the surfaces of both substrates 20 and 106 are cleaned. Polyimide, to form an alignment film such as polyvinyl alcohol, respectively,
After rubbing the surface of the alignment film using a cloth material 22 such as rayon or nylon, the surface is washed. Next, the above-described sealing material 101 is provided on the TFT array substrate 20 side.
Is formed by screen printing or the like, and a silver dot 107 as a conductive material is applied.

Next, both substrates 20 and 108 are sealed with sealing material 10.
After performing the alignment such as the cell gap, the substrates 20 and 10 are applied with a certain pressure.
8 is crimped. Next, when the sealing material 101 has photocurability, it is cured by irradiating light, and after the curing, the liquid crystal 112 is injected between the substrates 20 and 108, and after the injection is completed, the injection port is sealed. It is sealed with a material 110. Next, after performing cleaning, a predetermined inspection is performed, and those that pass are provided for mounting.

Here, in this embodiment, the above-described rubbing process is performed on both substrates 20 and 108 as follows. In the following first to ninth embodiments, only the TFT array substrate 20 (hereinafter, simply referred to as the substrate 20) will be described as an example, but the present invention is not limited to this. In each embodiment, a rubbing roller 21 that rotates with respect to the substrate 20 is used as an example of a rubbing processing member for rubbing the surface of the substrate 20 as in the conventional example. The same reference numerals are given to the same parts and the description thereof is omitted.

(First Embodiment) FIG. 1 is a schematic explanatory view for explaining a first embodiment of a rubbing method and a rubbing apparatus according to the present invention.

From the contact portion between the substrate 20 and the rubbing roller 21, a part of the alignment film or a cloth material (rubbing cloth) 2
2 hairs (particles) and the like are generated as dust. When the above-described conveyance direction of the substrate 20 and the rotation direction of the rubbing roller 21 are employed, the dust is generated more on the left side in the drawing than the contact portion between the substrate 20 and the rubbing roller 21.

In this embodiment, a suction member 23 having a suction port 23a disposed on the upper left side of the contact portion is provided, and the dust generated in the contact portion is sucked from the suction port 23a and discharged out of the system. . The suction member 23 may be a member that forcibly sucks air by a suction fan or the like (not shown). However, when the exhaust port is provided in a clean room, it is necessary to provide a high-density filter or the like. Preferably, it is provided. Here, the suction port 23 a has a shape extended in the axial direction of the rubbing roller 21, and has an opening position substantially parallel to a contact portion between the substrate 20 and the rubbing roller 21.

In this embodiment, dust sucked up by the rubbing roller 21 is sucked and discharged by sucking air from the suction port 23a, so that dust is prevented from being scattered and dispersed in the surrounding environment. In addition, dust can be prevented from being deposited on the cloth material 22 and the surface of the substrate 20 and adversely affecting the dust. Further, the dust once adhered to the surface of the substrate 20 and the cloth material 22 is also separated to some extent by the suction force and sucked because the suction port 23a is provided to face the surface of the substrate 20 and the surface of the cloth material 22. You.

(Second Embodiment) FIG. 2 shows a second embodiment according to the present invention.
It is a schematic explanatory view for explaining an embodiment.

In this embodiment, as in the first embodiment, a suction port 24a is formed at the distal end of the suction member 24, and dust is sucked from the suction port 24a. A difference is that a tip portion 24b formed as a shape narrowed at least on the vertical cross section shown in FIG. 2 is provided near the tip, and a suction port 24a is formed at the tip of the tip portion 24b.

In this embodiment, since the distal end portion 24b of the suction member 24 has a narrowed shape, the suction port 24a is located closer to the contact portion between the substrate 20 and the rubbing roller 21 (ie, the portion where dust is generated). And the suction port 24a is formed at the narrowed end, so that the suction force can be increased, the dust can be more reliably sucked, and the dust can be more strongly applied to the substrate 20 and the cloth material. 22 can be separated from the surface.

Here, the suction member 24 may be connected to a suction fan or the like as in the first embodiment, but in particular, it is connected to an exhaust system connected to a vacuum pump or the like to provide a strong suction force. Can be demonstrated.

In this embodiment, the suction port 24a is opened more toward the surface of the substrate 20 than the surface of the rubbing roller 21, so that the dust accumulated on the surface of the substrate 20 can be sucked more reliably. ing.

(Third Embodiment) FIG. 3 shows a third embodiment according to the present invention.
It is a schematic perspective view showing the structure of an embodiment.

In this embodiment, a suction member 25 substantially the same as in the second embodiment is provided. A narrowed tip portion 25b is formed near the tip of the suction member,
A suction port 25a opened at the tip of the tip 25b is formed. The connection pipe 25c provided at the upper end of the suction member 25 is connected to an exhaust system (not shown).

In this embodiment, the suction port 25a formed at the front end of the front end portion 25b is opened slightly toward the peripheral surface of the rubbing roller 21, and is generated at the contact portion between the substrate 20 and the cloth material 22. While sucking dust,
It is configured to mainly suck dust adhering to the surface of the cloth material 22.

(Fourth Embodiment) FIG. 4 shows a fourth embodiment according to the present invention.

In this embodiment, the suction member 26 is divided into a plurality of divided suction portions 26d arranged in parallel in the axial direction of the rubbing roller 21. Near the front end of each divided suction portion 26d, a front end portion 26b having a narrowed shape is formed as in the second and third embodiments, and a suction port 26a having an opening at the foremost end thereof is formed. . Connection pipe 26
“c” is for connection to an exhaust system (not shown).

In this embodiment, by dividing the suction port 26a, the opening area of the suction port 26a is reduced as a whole, and the suction force at each suction port 26a is increased. As a result, it is possible to separate not only the dust wound up into the atmosphere, but also the dust adhering to the surface of the substrate 20 and the surface of the cloth material 22, thereby improving the ability to remove by suction.

(Fifth Embodiment) FIG. 5 shows a fifth embodiment according to the present invention.
It is a schematic perspective view showing the whole structure of an embodiment.

In this embodiment, a cylindrical suction member 27 having a cutout portion is provided so as to substantially entirely surround the peripheral surface of the rubbing roller 21. The suction member 27 is attached to suction ports 27 a and 27 b located on the front side and the rear side in the moving direction of the substrate 20 with respect to the contact portion between the substrate 20 and the rubbing roller 21, and adheres to the peripheral surface of the rubbing roller 21. And a suction port 27c facing the cloth material 22.

Here, the suction port 27c facing the peripheral surface of the rubbing roller 21 may have a structure in which the entire surface facing the peripheral surface of the rubbing roller 21 is open, or a large number of fine suction ports are dispersed. The structure may be made to have. The connection pipe 27d constitutes a connection to an exhaust system (not shown). According to this embodiment, in addition to before and after the contact portion between the substrate 20 and the rubbing roller 21,
Since suction is performed from almost the entire peripheral surface of the rubbing roller 21, dust can be reliably captured, and in particular, dust can be effectively removed from the cloth material 22. Further, in this embodiment, since the suction member 27 is disposed so as to surround the rubbing roller 21, the suction member does not protrude away from the rubbing roller 21, so that the entire apparatus can be downsized. .

(Sixth Embodiment) FIG. 6 shows a sixth embodiment according to the present invention.
FIG. 7 is an enlarged cross-sectional view showing the vicinity of a suction port of this embodiment.

In this embodiment, the suction port 28a of the suction member 28 is arranged on one side of the contact portion between the substrate 20 and the rubbing roller 21, and the suction port 28a is located near the suction port 28a with respect to the peripheral surface of the rubbing roller 21. A blowing port 29a of the blowing member 29 for blowing air is disposed.

The suction port 28a is formed at the front end of the suction member 28 whose front end is slightly narrowed as in the above embodiments.
The dust generated from the contact portion is sucked, and the dust adhering to the cloth member 22 on the peripheral surface of the rubbing roller 21 can also be sucked.

Inside the spraying member 29, ionization electrodes 29b and 29c, which are shown in a simplified manner, are installed. By applying a high-frequency voltage between the ionization electrodes 29b and 29c, an air compressor (not shown) is used. The air sent from the air supply device is ionized. The ionized air is blown from the blowing port 29a to the surface of the cloth material 22, and the attached dust is separated from the cloth material 22. The dust separated from the cloth material 22 is sucked from the suction port 28a and discharged.

Air flow control plates 31 and 32 are disposed on both sides of the suction member 28 and the blowing member 29 (on both front and rear sides in the rotation direction of the rubbing roller 21). These air flow control plates 31 and 32 efficiently control the suction port 2 without spreading the air blown from the blowing member 29 to the surroundings.
8a. These airflow control plates 31 and 32 can prevent dust that is not sucked into the suction member 28 from being scattered around.

The spraying member 29 is provided with an ionization electrode to ionize the air and blow the air to promote separation of the dust. However, it is possible to separate a certain amount of dust by the blowing force without providing air ionizing means.

The spraying means in the spraying means is not limited to air, and various other fluids can be used as long as they do not affect the object to be processed, such as inert gas and pure water. .

It is most effective that the spraying means and the suction means are provided at a contact portion between the substrate 20 and the rubbing roller 21 which is a dust generating portion, but also at the surface of the rubbing roller 21. To further act on the substrate surface after the rubbing treatment,
It is preferable to provide them separately for each application site.

In each of the above embodiments, the substrate 2 is formed by the cloth material 22 adhered to the rubbing roller 21.
Although the rubbing treatment of rubbing the surface of No. 0 has been described, it is needless to say that the present invention can be widely applied to a rubbing method and an apparatus rubbed by various other rubbing members.

(Seventh Embodiment) FIG. 8 shows a seventh embodiment according to the present invention.
FIG. 9 is a schematic explanatory view for explaining the embodiment, and FIG. 9 is a schematic sectional view in which FIG. 8 is partially enlarged.

In this embodiment, a suction nozzle 50 having a suction port 50a is provided on the upper right side of the contact portion between the substrate 20 and the rubbing roller 21, and the dust adhering to the cloth material 22 of the rubbing roller 21 from the suction port 50a. Is sucked and discharged out of the system. For example, the suction nozzle 50 may be a device that forcibly sucks air by a vacuum pump or the like (not shown). However, when an exhaust port is provided in a clean room, it is necessary to provide a high-density filter or the like. Is preferably provided outside the room.

The suction port 50 a has a slit-like opening extending along the axial direction of the rubbing roller 21 and arranged substantially parallel to the contact portion between the substrate 20 and the rubbing roller 21. In addition, a non-conductive material layer 51 such as quartz or glass is coated on a peripheral portion of the suction port 50a.

The suction nozzle 50 is arranged so as to be able to move toward and away from the outer peripheral portion of the rubbing roller 21, and is moved toward and away from the outer peripheral portion of the rubbing roller 21 by driving means (not shown). Specifically, the substrate 2
When the rubbing roller 21 is rubbing the surface of the rubbing roller 21, the driving means
The suction nozzle 50 is moved away from the outer peripheral portion of the rubbing roller 21 when it is not rubbed.

When the suction nozzle 50 moves closer to the rubbing roller 21, the peripheral portion (non-conductive material layer 51) of the suction port 50 a of the suction nozzle 50 is moved to the rubbing roller 2.
The movement of the suction nozzle 50 is stopped at a position where the suction member 50 contacts the bristle feet 22a of the first cloth member 22. In this case, as shown in FIG. 9, the position of the peripheral edge of the suction port 50a in contact with the bristle feet 22a is the tip of the bristle feet 22a when the length of the bristle feet 22a of the cloth material 22 is L. It is preferable that the movement of the suction nozzle 50 be stopped within a range from the part to L / 2.

In this embodiment, at the time of rubbing, the periphery of the suction port 50a of the suction nozzle 50 is arranged in contact with the bristle feet 22a of the cloth material 22 on the outer periphery of the rubbing roller 21, so that the cloth material The dust adhering to the substrate 22 is removed by a strong suction force before the cloth member 22 contacts the substrate 20. As a result, before the cloth material 22 comes into contact with the substrate 20, the cloth material 22 is always kept in a clean state. In this state, the substrate 20 can be rubbed, and the adhesion of dust to the substrate 20 can be improved. Is prevented.

The suction nozzle 50 is positioned within a range from the tip of the hair foot 22a to half the length L of the hair foot 22a.
By locating the peripheral edge of the suction port 50a, careless contact of the cloth material 22 at the peripheral edge of the suction port 50a with the ground is avoided, and the hair foot 2 at the peripheral edge of the suction port 50a is prevented.
While maintaining a strong suction force by ensuring contact with 2a, it is possible to reliably prevent the background of the cloth material 22 from being scraped off by the peripheral edge of the suction port 50a and falling onto the substrate 20.

Further, the surface of the substrate 20 is
1 is not rubbed, the suction nozzle 50 is spaced apart from the outer peripheral portion of the rubbing roller 21 so that the peripheral portion of the suction port 50a of the suction nozzle 50 does not come into contact with the bristle feet 22a. The thermal effect due to the contact (friction) between the rubbing roller 22a and the rubbing roller 22 can be reduced, and as a result, the life of the rubbing roller 21 can be improved.

Further, since the non-conductive material layer 51 is disposed at the peripheral portion of the suction port 50a, the peripheral portion of the suction port 50a and the bristle feet 22a come into contact over a long period of time, and Even if the liquid crystal is encapsulated in a state in which the shavings that have fallen and the falling shavings adhere to the surface of the substrate 20 and the liquid crystal is encapsulated, the shavings are non-conductive materials, so that short-circuiting when using the product is ensured. Can be prevented. In this case, by forming the non-conductive material layer 51 from quartz or glass, the durability of the peripheral portion of the suction port 50a can be improved, and a mirror surface portion can be easily formed on the peripheral portion. .

In this embodiment, the suction nozzle 5
0 is disposed on the upper right side of the contact portion between the substrate 20 and the rubbing roller 21 so that the suction port 50a is in contact with the bristle feet 22a of the cloth material 22, but the present invention is not limited to this. The suction port 50a may be arranged to be in contact with the bristle feet 22a of the cloth material 22 by disposing the suction port 50a above the left side of the contact portion between the rubbing roller 21 and the central portion in the figure.

(Eighth Embodiment) FIG. 10 is a schematic explanatory view for explaining an eighth embodiment according to the present invention.

This embodiment is the same as the seventh embodiment except that the comb portion 60 is arranged at the suction port 50a of the suction nozzle 50 of the seventh embodiment. Portions are denoted by the same reference numerals, description thereof will be omitted, and differences will be described.

A comb portion 60 that comes into contact with the bristle feet 22a of the cloth material 22 is attached to the suction port 50a of the suction nozzle 50. The comb portion 60 extends along the axial direction of the rubbing roller 21 similarly to the suction port 50a. It extends and is arranged substantially in parallel with the contact portion between the substrate 20 and the rubbing roller 21, and its tip is substantially flush with the peripheral edge of the suction port 50 a.

In this embodiment, at the time of rubbing, the combs 60 provided in the suction port 50a align the hairs of the hair feet 22a, and the combs 60 strike out dust attached to the hair feet 22a. Mouth 50
The effect of sucking dust from a can be increased. In addition,
Other functions and effects are the same as those of the above-described seventh embodiment, and thus description thereof will be omitted.

(Ninth Embodiment) FIG. 11 is a schematic explanatory view for explaining a ninth embodiment according to the present invention.

In this embodiment, the suction member 23 of the first embodiment (see FIG. 1) is arranged above the contact portion between the substrate 20 and the rubbing roller 21 on the left side in the figure (on the side where a large amount of dust is generated). Seventh Embodiment (see FIGS. 8 and 9)
Is arranged above the right side of the contact portion in the figure. The suction member 23 and the suction nozzle 50
Has already been described in the first embodiment and the seventh embodiment, and the same reference numerals are given to the overlapping portions, and the description thereof is omitted.

In this embodiment, at the time of rubbing,
Since the dust wound up by the rubbing roller 21 is sucked and discharged from the suction port 23a of the suction member 23, the dust can be prevented from being scattered in the surrounding environment, and the dust can be removed from the cloth material 22 or the substrate 20. Can be prevented from accumulating on the surface of
Dust once adhered to the surfaces of the substrate 20 and the cloth material 22 is also sucked by being separated to some extent by the suction force, because the suction port 23a is provided to face the surface of the substrate 20 and the surface of the cloth material 22, In addition, since the dust adhering to the cloth material 22 by the suction nozzle 50 is suctioned and removed by a strong suction force before the cloth material 22 comes into contact with the substrate 20, the outer peripheral portion of the rubbing roller 21 is always kept in a clean state. Thus, the substrate 20 can be rubbed, so that the adhesion of dust to the substrate 20 can be prevented. As a result, it is possible to further improve the quality of the TFT, and to eliminate the need for an environmental partition between the rubbing step, the cleaning step, and other manufacturing steps, which was required in the past, for the management of cleanliness in the manufacturing process. Became.
The other operation and effects are the same as those of the seventh embodiment, and thus description thereof is omitted.

[0092]

As described above, according to the present invention, the following effects can be obtained.

In the first or third aspect of the present invention, the dust generated when the substrate surface is rubbed with the rubbing member is sucked, so that the dust is deposited on the substrate surface or adheres to the rubbing member. Is suppressed, and the display quality of the liquid crystal electro-optical element can be improved.

According to the second or fourth aspect of the present invention, in addition to the first or third aspect of the present invention, the dust is sucked at the dust generating portion, so that the dust is not scattered to the surrounding environment. In addition, it is possible to easily control the cleanliness in the manufacturing process.

According to the fifth aspect of the present invention, in addition to the fourth aspect of the present invention, the rubbing process can be performed by a rubbing roller having a simple structure, and the contact portion between the substrate and the rubbing roller is always in contact with the rubbing roller. Since the suction member is located at a certain position, an effect is obtained that the suction member can be easily arranged.

According to the sixth aspect of the present invention, in addition to the fifth aspect of the present invention, since the suction member is formed in a shape narrowed toward the tip, the suction member is located closer to the contact portion between the substrate and the rubbing roller. The effect of being able to arrange the mouth and increasing the suction force by forming the suction port at the narrowed tip is obtained.

According to the seventh aspect of the present invention, in addition to the fifth or sixth aspect of the present invention, the suction port is provided at each of the distal ends of the divided suction paths, so that the suction force at the suction port can be increased. Thus, an effect is obtained that dust can be reliably sucked in the axial direction of the rubbing roller.

According to the invention of claim 8, in addition to the invention of claim 5, dust adhering to the rubbing roller can be more reliably removed, and the suction member is formed so as to surround the rubbing roller. By doing so, the effect that the size of the device can be reduced can be obtained.

According to the ninth aspect of the present invention, in addition to the fourth aspect of the present invention, the dust is sucked from the suction port of the suction member after the dust is separated by spraying a fluid on the rubbing member or the substrate by the spraying means. Therefore, it is possible to obtain an effect that dust adhering to the rubbing member or the substrate can be more reliably removed.

According to the tenth aspect of the present invention, in addition to the third aspect of the present invention, since the peripheral edge of the suction port of the suction nozzle is in contact with the bristle feet of the rubbing roller, the dust adhering to the outer peripheral portion of the rubbing roller is improved. Can be removed by a strong suction force before the outer peripheral portion contacts the substrate, and as a result, the substrate can be constantly rubbed with the outer peripheral portion of the rubbing roller in a clean state. The effect is obtained that the adhesion of dust can be prevented.

According to the eleventh aspect, in addition to the third aspect, dust adhering to the outer peripheral portion of the rubbing roller can be suctioned and removed by a strong suction force before the outer peripheral portion contacts the substrate. Therefore, the substrate can always be rubbed with the outer peripheral portion of the rubbing roller in a clean state, so that dust can be prevented from adhering to the substrate. Since dust generated at the contact portion of the liquid crystal device is sucked and removed, it is possible to prevent the dust from being scattered in the surrounding environment. As a result, the display quality of the liquid crystal electro-optical element can be further improved, and the manufacturing process can be improved. Thus, the effect that the management of the degree of cleanliness in can be further facilitated.

According to the twelfth aspect of the present invention, the tenth aspect or the first aspect
In addition to the first aspect, when the surface of the substrate is not rubbed by the rubbing roller, the suction nozzle is disposed apart from the outer peripheral portion of the rubbing roller, and the peripheral portion of the suction port of the suction nozzle and the bristle feet of the rubbing roller. Since there is no contact with the rubbing roller, it is possible to reduce the influence of heat caused by the contact between the peripheral edge and the hair foot and the deterioration of the rubbing roller due to the contact.

According to the thirteenth aspect, the tenth to twelfth aspects are described.
In addition to the invention of any one of the above, while ensuring the contact of the peripheral edge of the suction port of the suction nozzle to the bristle feet of the rubbing roller, the contact of the peripheral edge of the suction port with the ground of the rubbing roller is ensured. And the background can be prevented from being scraped off by the peripheral portion of the suction port.

According to the fourteenth aspect, the tenth to thirteenth aspects are described.
In addition to the invention according to any one of the above, it is possible to enhance the effect of sucking the dust adhered to the bristle feet to strike out the dust attached to the bristle feet while aligning the fur of the bristle feet of the rubbing roller with the comb part. The effect is obtained.

According to the fifteenth aspect, the tenth to fourteenth aspects are described.
In addition to the invention of any one of the above, in the event that the peripheral edge of the suction port of the suction nozzle and the bristle feet of the rubbing roller contact for a long period of time, the peripheral edge is shaved,
Even when the liquid crystal is sealed and commercialized with the dropped shavings attached to the substrate surface, the shavings are non-conductive materials, so that an effect of reliably preventing a short circuit during use of the product can be obtained. can get.

According to the sixteenth aspect of the invention, in addition to the fifteenth aspect, it is possible to improve the durability of the peripheral portion of the suction port that comes into contact with the bristle feet, and to easily form the peripheral portion into a mirror-like shape. The effect is obtained.

[Brief description of the drawings]

FIG. 1 is a schematic cross-sectional view for describing a first embodiment according to the present invention.

FIG. 2 is a schematic cross-sectional view for explaining a second embodiment according to the present invention.

FIG. 3 is a schematic perspective view for explaining a third embodiment according to the present invention.

FIG. 4 is a schematic perspective view for explaining a fourth embodiment according to the present invention.

FIG. 5 is a schematic perspective view for explaining a fifth embodiment according to the present invention.

FIG. 6 is a schematic perspective view for explaining a sixth embodiment according to the present invention.

FIG. 7 is an enlarged sectional view showing the structure of a sixth embodiment.

FIG. 8 is a schematic cross-sectional view for explaining a seventh embodiment according to the present invention.

FIG. 9 is a schematic cross-sectional view in which an outer peripheral portion of a rubbing roller is partially enlarged.

FIG. 10 is a schematic cross-sectional view for explaining an eighth embodiment according to the present invention.

FIG. 11 is a schematic sectional view for explaining a ninth embodiment according to the present invention.

FIG. 12 is a schematic perspective plan view of a TFT.

FIG. 13 is a sectional view taken along line HH ′ of FIG.

FIG. 14 is a flowchart for explaining an assembling process of the liquid crystal display device.

FIG. 15 is a schematic cross-sectional view for explaining the state of a conventional rubbing process.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 11 Conveyance roller 20 Substrate 21 Rubbing roller 22 Cloth material 22a Bristle feet 23, 24, 25, 26, 27, 28 Suction member 23a, 24a, 25a, 26a, 27a, 28a Suction port 29 Spray member 29a Spray port 29b, 29c Ionization electrode 50 Suction nozzle 50a Suction port 51 Non-conductive material 60 Comb part L Length of hair foot part

Claims (16)

[Claims] 1. A rubbing method for a substrate in which a surface of a substrate used for a liquid crystal electro-optical element is rubbed by a rubbing member, wherein a rubbing process is performed while sucking dust generated from at least one of the substrate and the rubbing member. Rubbing method for a substrate. 2. The rubbing method for a substrate according to claim 1, wherein the suction is performed in the dust generating section. 3. A rubbing member for rubbing the surface of a substrate used for a liquid crystal electro-optical element, and the substrate and the rubbing member are relatively operated to rub the surface of the substrate with the rubbing member. A rubbing device for a substrate, comprising: a driving means for driving the substrate; and a suction means for suctioning dust generated from at least one of the substrate and the rubbing member. 4. The substrate rubbing apparatus according to claim 3, wherein the suction means includes a suction member having a suction port opened toward a contact portion between the substrate and the rubbing member. 5. The rubbing processing member according to claim 4, wherein the rubbing member is a rubbing roller that rotates with respect to the substrate.
A rubbing device for a substrate, wherein the suction port is opened toward a contact portion between the substrate and the rubbing roller. 6. The suction member according to claim 5, wherein the suction member has a shape narrowed toward a contact portion between the substrate and the rubbing roller, and the suction port is formed at a tip portion thereof. Substrate rubbing device. 7. The suction member according to claim 5, wherein the suction member has a plurality of suction paths divided in an axial direction of the rubbing roller, and the suction port is formed at a tip end of the suction path. A rubbing device for a substrate, comprising: 8. The substrate rubbing device according to claim 5, wherein the suction member is formed so as to surround the rubbing roller, and has a suction port facing a peripheral surface of the rubbing roller. . 9. The method according to claim 4, wherein a spraying means for spraying a fluid to the rubbing member or the substrate is provided, and a spraying position of the spraying means is set near the suction port. Rubbing equipment. 10. The rubbing processing member according to claim 3, wherein the rubbing processing member is a rubbing roller that rotates with respect to the substrate, and the suction unit causes a peripheral edge of the suction port to contact a bristle portion of the rubbing roller. A rubbing device for a substrate, comprising: a suction nozzle disposed on an outer peripheral portion of the rubbing roller in a state where the rubbing roller is in a rubbed state. 11. The rubbing processing member according to claim 3, wherein the rubbing processing member is a rubbing roller that rotates with respect to the substrate, and the suction unit causes a peripheral edge of the suction port to contact a bristle foot of the rubbing roller. A suction nozzle disposed on an outer peripheral portion of the rubbing roller in a state in which the rubbing processing member is provided, and a suction member having a suction port opened toward a contact portion between the substrate and the rubbing processing member. Rubbing equipment. 12. The rubbing processing device according to claim 10, wherein the suction nozzle is arranged so as to be able to move toward and away from an outer peripheral portion of the rubbing roller, and further, the surface of the substrate is rubbed by the rubbing member. A rubbing apparatus for a substrate, comprising: driving means for moving the suction nozzle close to the outer peripheral portion of the rubbing roller, and moving the suction nozzle away from the outer peripheral portion of the rubbing roller when not rubbing. 13. The hair nozzle according to claim 10, wherein a peripheral edge of the suction port of the suction nozzle is in a range from a tip of the hair foot to a half of a length of the hair foot. A rubbing device for a substrate, wherein said rubbing device is in contact with said bristle feet. 14. The rubbing device for a substrate according to claim 10, wherein a comb portion is provided at a suction port of the suction nozzle so as to be in contact with a bristle portion of the rubbing roller. 15. The suction nozzle according to any one of claims 10 to 14, wherein at least a portion of the suction nozzle, which is in contact with the bristle feet of the rubbing roller, at a peripheral portion of the suction port is formed of a non-conductive material. A rubbing device for a substrate, comprising: 16. The rubbing device for a substrate according to claim 15, wherein the non-conductive material is glass or quartz.