CN112198166A - Inspection apparatus - Google Patents
Inspection apparatus Download PDFInfo
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- CN112198166A CN112198166A CN202010626320.3A CN202010626320A CN112198166A CN 112198166 A CN112198166 A CN 112198166A CN 202010626320 A CN202010626320 A CN 202010626320A CN 112198166 A CN112198166 A CN 112198166A
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- liquid crystal
- crystal panel
- inspection
- inspection chamber
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- 238000007689 inspection Methods 0.000 title claims abstract description 94
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 102
- 238000003384 imaging method Methods 0.000 claims abstract description 22
- 238000005286 illumination Methods 0.000 claims abstract description 6
- 230000007547 defect Effects 0.000 abstract description 19
- 238000001514 detection method Methods 0.000 abstract description 9
- 230000005611 electricity Effects 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 9
- 230000003068 static effect Effects 0.000 description 9
- 230000010287 polarization Effects 0.000 description 6
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 235000012149 noodles Nutrition 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Liquid Crystal (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The objective is to suppress light leakage caused by friction between a carrying roller and a liquid crystal panel, thereby preventing reduction in detection accuracy of a bright point defect. The inspection device (20) is provided with: an inspection chamber (21) for accommodating the liquid crystal panel (10) therein and inspecting the liquid crystal panel (10); a conveying device (24) which is provided with a plurality of rotatable conveying rollers (25) and conveys the liquid crystal panel (10) to the interior of the inspection chamber (21); illumination devices (31A, 31B) which are arranged on one side of the liquid crystal panel (10) in the inspection chamber (21) and irradiate light to the liquid crystal panel (10); imaging devices (33, 36) each including imaging units (34, 37), the imaging units (34, 37) being disposed on the other surface side of the liquid crystal panel (10) in the inspection chamber (21) and imaging the liquid crystal panel (10) irradiated with light by the illumination devices (31A, 31B); and a humidifying device (41) which humidifies the interior of the examination room (21).
Description
Technical Field
The present invention relates to an inspection apparatus.
Background
An inspection apparatus is known which irradiates an inspection backlight from the back side of a liquid crystal panel to inspect whether or not a defect occurs in the liquid crystal panel. This inspection device is provided with: an inspection backlight disposed on one surface side of a liquid crystal panel to be inspected; an imaging device disposed on the other surface side of the liquid crystal panel; and polarizing plates respectively disposed between the inspection backlight and the liquid crystal panel and between the imaging device and the liquid crystal panel. For example, when a defect such as a liquid crystal panel is contaminated with foreign matter, the defect is detected as a bright point defect on a black screen (see patent document 1).
Documents of the prior art
Patent document
Patent document 1: japanese laid-open patent publication No. 2008-299021
Disclosure of Invention
Technical problem to be solved by the invention
In the inspection apparatus of the above type, a roller conveyor may be provided as a conveying unit for the liquid crystal panel. The roller conveyor includes a plurality of conveyance rollers arranged side by side in one direction, and is driven by a driving unit to convey the liquid crystal panel placed thereon.
In this case, the liquid crystal panel may be electrically charged due to friction between the conveying roller and the liquid crystal panel. When light leakage occurs due to disturbance of the alignment state of the liquid crystal due to electrification, the detection accuracy of the bright point defect may be lowered.
Disclosure of Invention
The present invention has been made in view of the above circumstances, and an object of the present invention is to suppress light leakage due to friction between a conveyance roller and a liquid crystal panel, thereby preventing a decrease in detection accuracy of a bright point defect.
Means for solving the problems
(1) An inspection apparatus according to an embodiment of the present invention includes: an inspection chamber for accommodating the liquid crystal panel therein and inspecting the liquid crystal panel therein; a conveying device which is provided with a plurality of rotatable conveying rollers and conveys the liquid crystal panel to the interior of the inspection chamber; an illumination device which is disposed on one surface side of the liquid crystal panel in the inspection chamber and irradiates light to the liquid crystal panel; an imaging device which is disposed on the other surface side of the liquid crystal panel in the inspection chamber and which images the liquid crystal panel irradiated with light by the illumination device; and a humidifying device that humidifies the inside of the inspection chamber.
(2) In addition to the configuration of (1), the inspection apparatus according to an embodiment of the present invention further includes a humidity sensor that is disposed inside the inspection chamber and detects humidity inside the inspection chamber.
(3) In one embodiment of the present invention, in addition to the configuration (1) or (2), the liquid crystal panel has a transport surface that contacts the transport roller, and the humidifying device has an ejection port that ejects the humidified air and is disposed so that the ejection port faces the transport surface.
Advantageous effects
According to the invention, light leakage caused by friction between the conveying roller and the liquid crystal panel can be inhibited, thereby avoiding reduction of detection accuracy of the bright point defect.
Drawings
Fig. 1 is an overall schematic diagram of an inspection apparatus according to an embodiment.
Detailed Description
An embodiment of the invention is illustrated by fig. 1.
First, the liquid crystal panel 10 as an inspection target of the inspection apparatus 20 of the present embodiment will be described. In general, the liquid crystal panel 10 is formed in a rectangular shape as a whole, and includes a pair of transparent (light-transmitting) glass substrates and a liquid crystal layer containing liquid crystal molecules interposed between the substrates and changing optical characteristics in response to application of an electric field. The two substrates face each other and are bonded to each other with a predetermined gap (gap) therebetween by a spacer, and the liquid crystal layer sandwiched therebetween is surrounded by a sealant and kept in a liquid-tight state. In a state where no signal is applied to each wiring and no electric field is applied to the liquid crystal layer, the light transmittance of the liquid crystal panel 10 is minimized to perform black display, which is a so-called normally black mode.
The inspection apparatus 20 is an apparatus for inspecting whether or not a defect such as a foreign substance mixed into a liquid crystal panel occurs, and includes an inspection chamber 21, a roller conveyor 24 (corresponding to a conveying apparatus), two inspection backlights 31A and 31B (corresponding to an illuminating apparatus), a main camera 23 (corresponding to an imaging apparatus), an evaluation camera 35 (corresponding to an imaging apparatus), four polarizing plates 32A, 32B, 32C, and 32D, a humidifying apparatus 41, and a humidity sensor 43.
The inspection chamber 21 is a space for accommodating the liquid crystal panel 10 therein and inspecting the liquid crystal panel 10, is formed in a substantially box shape as a whole, and has a carrying-in port 22 for carrying the liquid crystal panel 10 to the inside and a carrying-out port 23 for carrying the liquid crystal panel 10 to the outside, which are opened in one side wall (the right side wall in fig. 1) and the other side wall (the left side wall in fig. 1) of a pair of opposing side walls, respectively.
The roller conveyor 24 is a device for conveying the liquid crystal panel 10 to the inside and outside of the inspection chamber 21, and includes a plurality of conveying rollers 25 arranged side by side in one direction (the direction from the right to the left in fig. 1), and is provided so as to enter from the carry-in port 22, pass through the inside of the inspection chamber 21, and extend from the carry-out port 23 to the outside. The liquid crystal panel 10 is placed on the transport roller 25 in a horizontal posture with its lower surface (transport surface 11) in contact with the transport roller 25, and is carried in from the carry-in port 22, passed through the inspection chamber 21, and carried out from the carry-out port 23 to the outside by driving the transport roller 25 by a driving mechanism.
The two inspection backlights 31A and 31B are devices that are disposed inside the inspection chamber 21 and irradiate light onto the liquid crystal panel 10 conveyed by the roller conveyor 24. Each of the inspection backlights 31A and 31B is configured to: for example, a box formed in a substantially box shape with an opening on the upper surface side accommodates a plurality of linear light sources (for example, cold cathode tubes), and a plurality of optical sheets are stacked on the upper surface side of the box, whereby light can be irradiated in a planar shape as a whole.
These inspection backlights 31A and 31B are disposed on the conveying surface 11 side (lower surface side in fig. 1) of the liquid crystal panel 10, and irradiate the liquid crystal panel 10 with light from the conveying surface 11 side. One of the two inspection backlights 31A and 31B is a first inspection backlight 31A disposed on the upstream side (right side in fig. 1) of the roller conveyor 24 in the conveying direction of the liquid crystal panel 10, and the other is a second inspection backlight 31B disposed on the downstream side (left side in fig. 1) of the roller conveyor 24 in the conveying direction of the liquid crystal panel 10. A polarizing plate (first polarizing plate 32A) is disposed between the first inspection backlight 31A and the liquid crystal panel 10. Similarly, a polarizing plate (third polarizing plate 32C) is disposed between the second inspection backlight 31B and the liquid crystal panel 10.
The main camera 33 is a device that is disposed inside the inspection chamber 21 and is used to check whether or not the liquid crystal panel 10 is defective, and is disposed on the opposite side (the upper surface side in fig. 1) of the conveyance surface 11 of the liquid crystal panel 10 so as to face the first inspection backlight 31A, and can capture an image of the liquid crystal panel 10 irradiated with light by the first inspection backlight 31A. The main camera 33 is a camera provided with a line sensor 34 (corresponding to an imaging unit) for imaging the light receiving elements of the liquid crystal panel 10 in a line and a lens, and is capable of imaging the liquid crystal panel 10 moving relative to the main camera 33 by the roller conveyor 24 in time series. A polarizing plate (second polarizing plate 32B) is disposed between the main camera 33 and the liquid crystal panel 10.
The evaluation camera 35 is a device arranged inside the inspection chamber 21 for confirming a defect of the liquid crystal panel 10 detected by the main camera 33. The evaluation camera 35 is disposed on the opposite side (upper surface side in fig. 1) of the conveyance surface 11 of the liquid crystal panel 10 so as to face the second inspection backlight 31B, and can photograph the liquid crystal panel 10 irradiated with light by the second inspection backlight 31B. The evaluation camera 35 is, for example, a device in which a CCD camera is combined with an optical microscope, and includes an imaging unit 36 and an imaging unit 37, the imaging unit 36 includes an objective lens, and the imaging unit 37 includes a projection lens and a CCD camera connected thereto. The evaluating camera 35 is configured such that an objective lens provided in the imaging section 36 is directed toward the liquid crystal panel 10 to enable insertion of a polarizing plate (fourth polarizing plate 32D) between the imaging section 36 and the photographing section 37.
The first polarizing plate 32A and the second polarizing plate 32B are arranged so that their polarization directions form an angle of 90 °, i.e., so-called cross nicol arrangement. The third polarizing plate 32C and the fourth polarizing plate 32D are also arranged in a crossed nicol arrangement.
The humidifying device 41 is a device that is disposed inside the inspection chamber 21 and humidifies the inside of the inspection chamber 21. As the humidifying device, for example, a known device such as an ultrasonic type, a steam type, a vaporization type, or a heating vaporization type can be used. The humidifying device 41 has an ejection port 42 for ejecting humidified air, and is disposed below the liquid crystal panel 10 conveyed by the roller conveyor 24 with the ejection port 42 facing the conveying surface 11.
The humidity sensor 43 is a sensor that measures the humidity in the chamber of the inspection chamber 21 to prevent condensation from excessively humidifying the chamber of the inspection chamber 21. As the humidity sensor 43, for example, a known sensor such as a resistance type sensor or a capacitance type sensor can be used.
Next, a flow of inspecting the liquid crystal panel 10 using the inspection apparatus 20 configured as described above will be described.
The liquid crystal panel 10 is placed on the roller conveyor 24 such that the conveying surface 11 faces the conveying rollers 25, and the roller conveyor 24 is driven to convey the liquid crystal panel 10 into the inspection chamber 21. Further, the humidifying device 41 is operated to humidify the inside of the inspection chamber 21.
When the liquid crystal panel 10 enters the inspection chamber 21 and is transported to the position of the main camera 33, the main camera 33 sequentially captures images of the liquid crystal panel 10 irradiated with light by the first inspection backlight 31A from the front side (the left side in fig. 1) in the transport direction. The image obtained by the photographing is transferred to an image processing apparatus to be processed, and the presence or absence of defects or defective positions of the liquid crystal panel 10 is determined.
When the liquid crystal panel 10 is conveyed to the position of the evaluation camera 35, the evaluation camera 35 images the defect of the liquid crystal panel 10 irradiated with light by the second inspection backlight 31B, which is detected by the main camera 33. The image obtained by the photographing is transferred to an image processing apparatus to be processed, thereby specifically judging the defect of the liquid crystal panel 10.
Here, the defect detection by this inspection will be described. In the defect detection, since the case of passing through the evaluation camera 35 is substantially the same as the case of passing through the main camera 33, the description will be made here with respect to the case of passing through the main camera 33.
Light emitted from the first inspection backlight 31A reaches the first polarizing plate 32A as scattered light, and only linear polarization having a specific vibration direction passes through the first polarizing plate 32A. The linear polarization passes through the liquid crystal panel 10 and reaches the second polarizing plate 32B. Since the first polarizing plate 32A and the second polarizing plate 32B are arranged in a crossed nicol arrangement, the linear polarization reaching the second polarizing plate 32B is blocked by the second polarizing plate 32B. Therefore, the image captured by the main camera 33 becomes a black image.
However, for example, when the alignment of the liquid crystal is disturbed due to the mixing of foreign substances into the liquid crystal layer of the liquid crystal panel 10, the light passing through the first polarizing plate 32A at the defective position is scattered, and the light whose polarization direction has been changed passes through the second polarizing plate 32B and is detected as a bright spot (bright spot defect) in the black image by the main camera 33.
Here, when the liquid crystal panel 10 is conveyed by the roller conveyor 24, static electricity may be generated on the conveying surface 11 due to friction between the liquid crystal panel 10 and the roller conveyor 24. When the alignment is disturbed in the liquid crystal due to the static electricity, the light passing through the first polarizing plate 32A is scattered, and the light whose polarization direction has been changed passes through the second polarizing plate 32B and is detected as light (light leakage) in a linear shape along the conveying roller 25. Since such light leakage becomes noise, the detection accuracy of the bright point defect may be lowered.
In the present embodiment, a humidifying device 41 is disposed inside the inspection chamber 21 to humidify the inside of the inspection chamber 21. Accordingly, the generation of static electricity and the generation of light leakage can be suppressed, and thus, the reduction of the detection accuracy of the bright point defect can be avoided.
The humidity in the inspection chamber 21 is measured by the humidity sensor 43, and based on the measurement result, the humidity in the inspection chamber 21 is adjusted to be high enough to suppress the generation of static electricity due to friction between the liquid crystal panel 10 and the conveying roller 25, but not so high that condensation occurs in the inspection chamber 21 and adversely affects the apparatus.
According to the present embodiment described above, the inspection apparatus 20 includes: an inspection chamber 21 for accommodating the liquid crystal panel 10 therein and inspecting the liquid crystal panel 10; a roller conveyor 24 which is provided with a plurality of rotatable conveying rollers 25 and conveys the liquid crystal panel 10 to the interior of the inspection chamber 21; inspection backlights 31A and 31B that are disposed on one side of the liquid crystal panel 10 in the inspection chamber 21 and irradiate light to the liquid crystal panel 10; a main camera 33 which is disposed on the other surface side of the liquid crystal panel 10 in the inspection chamber 21 and which images the liquid crystal panel 10 irradiated with light by the backlights 31A and 31B to be inspected; an evaluation camera 35 provided with an imaging unit 37; and a humidifying device 41 that humidifies the inside of the inspection chamber 21.
According to the above configuration, the humidifying device 41 humidifies the inside of the inspection chamber 21, thereby suppressing the generation of static electricity due to friction between the conveying roller 25 and the liquid crystal panel 10 and suppressing the generation of light leakage due to the static electricity. This can avoid a reduction in the detection accuracy of the bright point defect.
The inspection apparatus 20 further includes a humidity sensor 43, and the humidity sensor 43 is disposed inside the inspection chamber 21 and detects the humidity inside the inspection chamber 21. According to this configuration, the humidity in the inspection chamber 21 is measured, and based on the measurement result, the humidity in the inspection chamber 21 is adjusted to be high enough to suppress the generation of static electricity due to friction between the liquid crystal panel 10 and the transport roller 25, but not so high that condensation occurs in the inspection chamber 21 and adversely affects the equipment.
Further, the liquid crystal panel 10 has a conveying surface 11 which is in contact with the conveying roller 25, and the humidifying device 41 has an ejection port 42 which ejects humidified air, and the ejection port 42 is disposed toward the conveying surface 11. According to this configuration, the humidified air is discharged toward the conveying surface 11 of the liquid crystal panel 10, that is, the surface on which static electricity is likely to be generated due to contact with the conveying roller 25, and thus generation of static electricity can be effectively suppressed.
< other embodiment >
The present invention is not limited to the embodiments described above and illustrated in the drawings, and for example, the following embodiments are also included in the technical scope of the present invention.
(1) The imaging device may be a device including an area sensor as an imaging unit, for example.
(2) The inspection apparatus may be provided with only the main camera 33 without the evaluation camera 35.
(3) The liquid crystal panel may be in a so-called normally white mode in which white display is performed with the transmittance of light maximized in a state where no electric field is applied to the liquid crystal.
(4) For example, when the liquid crystal panel is inspected in a state where polarizing plates are bonded to both sides, the inspection apparatus may not include a polarizing plate.
Description of the reference numerals
10: liquid crystal panel
11: carrying noodles
20: inspection apparatus
21: examination room
22: carrying-in port
23: conveying outlet
24: roller conveyor (handling device)
25: carrying roller
31A: first inspection backlight (illuminating device)
31B: second inspection backlight (Lighting device)
32A: a first polarizing plate
32B: a second polarizing plate
32C: third polarizing plate
32D: a fourth polarizing plate
33: main camera (shooting device)
34: line sensor (image pickup part)
35: evaluating camera (shooting device)
36: image forming section
37: image pickup unit
41: humidifying device 1
42: discharge port
43: humidity sensor
Claims (3)
1. An inspection apparatus, comprising:
an inspection chamber for accommodating a liquid crystal panel therein and inspecting the liquid crystal panel;
a conveying device which is provided with a plurality of rotatable conveying rollers and conveys the liquid crystal panel to the interior of the inspection chamber;
an illumination device which is disposed on one surface side of the liquid crystal panel in the inspection chamber and irradiates light to the liquid crystal panel;
an imaging device which is disposed on the other surface side of the liquid crystal panel in the inspection chamber and which images the liquid crystal panel irradiated with light by the illumination device;
and a humidifying device that humidifies the inside of the inspection chamber.
2. The inspection apparatus according to claim 1, comprising a humidity sensor which is disposed inside the inspection chamber and detects humidity inside the inspection chamber.
3. The inspection apparatus of claim 1 or 2,
the liquid crystal panel has a conveying surface contacting with the conveying roller,
the humidifying device has an ejection port for ejecting humidified air, and the ejection port is disposed facing the transport surface.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201962871629P | 2019-07-08 | 2019-07-08 | |
| US62/871629 | 2019-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112198166A true CN112198166A (en) | 2021-01-08 |
Family
ID=74005651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010626320.3A Pending CN112198166A (en) | 2019-07-08 | 2020-07-01 | Inspection apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112198166A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003098528A (en) * | 2001-09-21 | 2003-04-03 | Seiko Epson Corp | Manufacturing device and manufacturing method for liquid crystal device and liquid crystal device |
| CN101118713A (en) * | 2006-08-02 | 2008-02-06 | 富士通株式会社 | Display panel inspection apparatus and method |
| JP2008224371A (en) * | 2007-03-12 | 2008-09-25 | Micronics Japan Co Ltd | In-line automatic inspection device and in-line automatic inspection system |
| CN101324713A (en) * | 2007-05-30 | 2008-12-17 | 日本麦可罗尼克斯股份有限公司 | Liquid crystal panel inspection method and apparatus |
| WO2011145617A1 (en) * | 2010-05-18 | 2011-11-24 | シャープ株式会社 | Substrate conveyance device and static eraser |
| CN102602684A (en) * | 2012-03-14 | 2012-07-25 | 深圳市华星光电技术有限公司 | Method and system for transport control for base materials of liquid crystal display panels |
| CN104102029A (en) * | 2013-04-01 | 2014-10-15 | 日本麦可罗尼克斯股份有限公司 | Liquid Crystal Panel Detection Device |
-
2020
- 2020-07-01 CN CN202010626320.3A patent/CN112198166A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003098528A (en) * | 2001-09-21 | 2003-04-03 | Seiko Epson Corp | Manufacturing device and manufacturing method for liquid crystal device and liquid crystal device |
| CN101118713A (en) * | 2006-08-02 | 2008-02-06 | 富士通株式会社 | Display panel inspection apparatus and method |
| JP2008039462A (en) * | 2006-08-02 | 2008-02-21 | Fujitsu Ltd | Display panel inspection device and method |
| JP2008224371A (en) * | 2007-03-12 | 2008-09-25 | Micronics Japan Co Ltd | In-line automatic inspection device and in-line automatic inspection system |
| CN101324713A (en) * | 2007-05-30 | 2008-12-17 | 日本麦可罗尼克斯股份有限公司 | Liquid crystal panel inspection method and apparatus |
| WO2011145617A1 (en) * | 2010-05-18 | 2011-11-24 | シャープ株式会社 | Substrate conveyance device and static eraser |
| CN102602684A (en) * | 2012-03-14 | 2012-07-25 | 深圳市华星光电技术有限公司 | Method and system for transport control for base materials of liquid crystal display panels |
| CN104102029A (en) * | 2013-04-01 | 2014-10-15 | 日本麦可罗尼克斯股份有限公司 | Liquid Crystal Panel Detection Device |
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Application publication date: 20210108 |