JP3823567B2 - インクジェット記録ヘッド及びその製造方法及びプリンタ装置 - Google Patents

インクジェット記録ヘッド及びその製造方法及びプリンタ装置 Download PDF

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Publication number
JP3823567B2
JP3823567B2 JP29791998A JP29791998A JP3823567B2 JP 3823567 B2 JP3823567 B2 JP 3823567B2 JP 29791998 A JP29791998 A JP 29791998A JP 29791998 A JP29791998 A JP 29791998A JP 3823567 B2 JP3823567 B2 JP 3823567B2
Authority
JP
Japan
Prior art keywords
ink
recording head
jet recording
manufacturing
energy generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP29791998A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000117990A (ja
JP2000117990A5 (https=
Inventor
修司 小池
義明 坂本
知久 三上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP29791998A priority Critical patent/JP3823567B2/ja
Priority to DE19983673T priority patent/DE19983673B4/de
Priority to PCT/JP1999/001570 priority patent/WO2000023277A1/ja
Publication of JP2000117990A publication Critical patent/JP2000117990A/ja
Priority to US09/807,430 priority patent/US6623110B2/en
Publication of JP2000117990A5 publication Critical patent/JP2000117990A5/ja
Application granted granted Critical
Publication of JP3823567B2 publication Critical patent/JP3823567B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/1425—Embedded thin film piezoelectric element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP29791998A 1998-10-20 1998-10-20 インクジェット記録ヘッド及びその製造方法及びプリンタ装置 Expired - Fee Related JP3823567B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP29791998A JP3823567B2 (ja) 1998-10-20 1998-10-20 インクジェット記録ヘッド及びその製造方法及びプリンタ装置
DE19983673T DE19983673B4 (de) 1998-10-20 1999-03-26 Tintenstrahlaufzeichnungskopf Herstellungsverfahren
PCT/JP1999/001570 WO2000023277A1 (en) 1998-10-20 1999-03-26 Ink jet recording head, its manufacturing method, and printer device
US09/807,430 US6623110B2 (en) 1998-10-20 2001-04-20 Ink jet recording head and production methods therefor and printer apparatus therewith

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29791998A JP3823567B2 (ja) 1998-10-20 1998-10-20 インクジェット記録ヘッド及びその製造方法及びプリンタ装置

Publications (3)

Publication Number Publication Date
JP2000117990A JP2000117990A (ja) 2000-04-25
JP2000117990A5 JP2000117990A5 (https=) 2005-12-02
JP3823567B2 true JP3823567B2 (ja) 2006-09-20

Family

ID=17852799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29791998A Expired - Fee Related JP3823567B2 (ja) 1998-10-20 1998-10-20 インクジェット記録ヘッド及びその製造方法及びプリンタ装置

Country Status (4)

Country Link
US (1) US6623110B2 (https=)
JP (1) JP3823567B2 (https=)
DE (1) DE19983673B4 (https=)
WO (1) WO2000023277A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69931526T2 (de) 1999-12-10 2007-04-26 Fuji Photo Film Co., Ltd., Minami-Ashigara Tintenstrahldruckkopf, verfahren zur herstellung von druckköpfen und drucker
WO2001042017A1 (en) 1999-12-10 2001-06-14 Fujitsu Limited Ink-jet head and printer
WO2001047716A1 (en) 1999-12-24 2001-07-05 Fujitsu Limited Method of manufacturing ink-jet record head
JP4432100B2 (ja) 1999-12-24 2010-03-17 富士フイルム株式会社 インクジェット記録ヘッド及びその製造方法
US6886924B2 (en) * 2002-09-30 2005-05-03 Spectra, Inc. Droplet ejection device
JP3820589B2 (ja) * 2003-09-26 2006-09-13 富士写真フイルム株式会社 液体吐出ヘッドとその製造方法及びインクジェット記録装置
US8042913B2 (en) * 2006-09-14 2011-10-25 Hewlett-Packard Development Company, L.P. Fluid ejection device with deflective flexible membrane
US7651204B2 (en) * 2006-09-14 2010-01-26 Hewlett-Packard Development Company, L.P. Fluid ejection device
JP5382905B2 (ja) * 2008-03-10 2014-01-08 富士フイルム株式会社 圧電素子の製造方法及び液体吐出ヘッドの製造方法
EP2974867B1 (en) * 2013-03-15 2023-12-06 Konica Minolta, Inc. Inkjet head, method for manufacturing same, and inkjet printer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128948A (ja) * 1986-11-19 1988-06-01 Sharp Corp インクジエツトヘツド
US4825227A (en) * 1988-02-29 1989-04-25 Spectra, Inc. Shear mode transducer for ink jet systems
JP3144949B2 (ja) 1992-05-27 2001-03-12 日本碍子株式会社 圧電／電歪アクチュエータ
US5907338A (en) * 1995-01-13 1999-05-25 Burr; Ronald F. High-performance ink jet print head
JP3503386B2 (ja) * 1996-01-26 2004-03-02 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法
JPH09300608A (ja) * 1996-05-09 1997-11-25 Minolta Co Ltd インクジェット記録ヘッド
JPH10202874A (ja) * 1997-01-24 1998-08-04 Seiko Epson Corp インクジェットプリンタヘッド及びその製造方法
JP3666177B2 (ja) * 1997-04-14 2005-06-29 松下電器産業株式会社 インクジェット記録装置

Also Published As

Publication number Publication date
JP2000117990A (ja) 2000-04-25
US6623110B2 (en) 2003-09-23
DE19983673T1 (de) 2002-02-14
US20010022602A1 (en) 2001-09-20
WO2000023277A1 (en) 2000-04-27
DE19983673B4 (de) 2008-02-14

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