JP3800292B2 - 光変調デバイス及び表示装置 - Google Patents

光変調デバイス及び表示装置 Download PDF

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Publication number
JP3800292B2
JP3800292B2 JP28027599A JP28027599A JP3800292B2 JP 3800292 B2 JP3800292 B2 JP 3800292B2 JP 28027599 A JP28027599 A JP 28027599A JP 28027599 A JP28027599 A JP 28027599A JP 3800292 B2 JP3800292 B2 JP 3800292B2
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Japan
Prior art keywords
mirror
light
modulation device
mirror element
light modulation
Prior art date
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Expired - Fee Related
Application number
JP28027599A
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English (en)
Japanese (ja)
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JP2001100119A (ja
JP2001100119A5 (de
Inventor
士郎 矢崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Publication date
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Priority to JP28027599A priority Critical patent/JP3800292B2/ja
Publication of JP2001100119A publication Critical patent/JP2001100119A/ja
Publication of JP2001100119A5 publication Critical patent/JP2001100119A5/ja
Application granted granted Critical
Publication of JP3800292B2 publication Critical patent/JP3800292B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP28027599A 1999-09-30 1999-09-30 光変調デバイス及び表示装置 Expired - Fee Related JP3800292B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28027599A JP3800292B2 (ja) 1999-09-30 1999-09-30 光変調デバイス及び表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28027599A JP3800292B2 (ja) 1999-09-30 1999-09-30 光変調デバイス及び表示装置

Publications (3)

Publication Number Publication Date
JP2001100119A JP2001100119A (ja) 2001-04-13
JP2001100119A5 JP2001100119A5 (de) 2004-08-26
JP3800292B2 true JP3800292B2 (ja) 2006-07-26

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JP28027599A Expired - Fee Related JP3800292B2 (ja) 1999-09-30 1999-09-30 光変調デバイス及び表示装置

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JP (1) JP3800292B2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10295726B2 (en) 2015-06-30 2019-05-21 Samsung Display Co., Ltd. Display apparatus

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003045642A (ja) * 2001-07-27 2003-02-14 Sony Corp 表示素子とその製造方法
JP2007073553A (ja) * 2005-09-02 2007-03-22 Kyoto Univ 圧電アクチュエータ及びその製造方法
JP5952391B2 (ja) 2012-04-23 2016-07-13 キヤノン電子株式会社 光走査装置及び画像読取装置
JP6390508B2 (ja) * 2015-05-07 2018-09-19 株式会社デンソー 光走査装置
US10816733B2 (en) * 2016-04-01 2020-10-27 Intel Corporation Piezoelectrically actuated mirrors for optical communications

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10295726B2 (en) 2015-06-30 2019-05-21 Samsung Display Co., Ltd. Display apparatus

Also Published As

Publication number Publication date
JP2001100119A (ja) 2001-04-13

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