JP3789097B2 - 被検査物の外周検査方法および外周検査装置 - Google Patents
被検査物の外周検査方法および外周検査装置 Download PDFInfo
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- JP3789097B2 JP3789097B2 JP2002044187A JP2002044187A JP3789097B2 JP 3789097 B2 JP3789097 B2 JP 3789097B2 JP 2002044187 A JP2002044187 A JP 2002044187A JP 2002044187 A JP2002044187 A JP 2002044187A JP 3789097 B2 JP3789097 B2 JP 3789097B2
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- light
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- 230000002093 peripheral effect Effects 0.000 title claims description 77
- 238000000034 method Methods 0.000 title claims description 6
- 230000007547 defect Effects 0.000 claims description 36
- 238000009792 diffusion process Methods 0.000 claims description 16
- 238000002834 transmittance Methods 0.000 claims description 15
- 238000005286 illumination Methods 0.000 description 12
- 238000001514 detection method Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 2
- 238000011179 visual inspection Methods 0.000 description 2
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- 235000012489 doughnuts Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
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- 238000003384 imaging method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002044187A JP3789097B2 (ja) | 2002-02-21 | 2002-02-21 | 被検査物の外周検査方法および外周検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002044187A JP3789097B2 (ja) | 2002-02-21 | 2002-02-21 | 被検査物の外周検査方法および外周検査装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003240728A JP2003240728A (ja) | 2003-08-27 |
| JP2003240728A5 JP2003240728A5 (enrdf_load_stackoverflow) | 2004-12-09 |
| JP3789097B2 true JP3789097B2 (ja) | 2006-06-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002044187A Expired - Fee Related JP3789097B2 (ja) | 2002-02-21 | 2002-02-21 | 被検査物の外周検査方法および外周検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3789097B2 (enrdf_load_stackoverflow) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG157977A1 (en) * | 2008-06-23 | 2010-01-29 | Semiconductor Tech & Instr Inc | System and method for inspection of semiconductor packages |
| JP6489540B2 (ja) * | 2014-02-27 | 2019-03-27 | 株式会社ＮｅｊｉＬａｗ | 撮像システム、照明手段 |
| US9759670B2 (en) * | 2014-12-23 | 2017-09-12 | Mitutoyo Corporation | Bore imaging system |
| JP2017009542A (ja) * | 2015-06-25 | 2017-01-12 | 株式会社ＮｅｊｉＬａｗ | 撮像システム |
| JP6834174B2 (ja) * | 2016-05-13 | 2021-02-24 | 株式会社ジェイテクト | 外観検査方法および外観検査装置 |
| JP2019117139A (ja) * | 2017-12-27 | 2019-07-18 | 株式会社ケージェーケー | ベアリングの検査方法と検査装置 |
| CN114061481A (zh) * | 2020-08-04 | 2022-02-18 | 广东博智林机器人有限公司 | 一种光源组件及检测装置 |
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2002
- 2002-02-21 JP JP2002044187A patent/JP3789097B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003240728A (ja) | 2003-08-27 |
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