JP3778640B2 - 半導体ヒータおよびその製造方法 - Google Patents

半導体ヒータおよびその製造方法 Download PDF

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Publication number
JP3778640B2
JP3778640B2 JP32613596A JP32613596A JP3778640B2 JP 3778640 B2 JP3778640 B2 JP 3778640B2 JP 32613596 A JP32613596 A JP 32613596A JP 32613596 A JP32613596 A JP 32613596A JP 3778640 B2 JP3778640 B2 JP 3778640B2
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Japan
Prior art keywords
layer
semiconductor
heater
air gap
heating element
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Expired - Fee Related
Application number
JP32613596A
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English (en)
Japanese (ja)
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JPH09205009A5 (https=
JPH09205009A (ja
Inventor
ダニエル・ジェイ・コッチ
ケネス・ジー・ゴールドマン
キース・ジー・ケイメコナ
マーク・ディー・サマーズ
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NXP USA Inc
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NXP USA Inc
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Publication date
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Publication of JPH09205009A publication Critical patent/JPH09205009A/ja
Publication of JPH09205009A5 publication Critical patent/JPH09205009A5/ja
Application granted granted Critical
Publication of JP3778640B2 publication Critical patent/JP3778640B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
    • B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
    • B41J2/335—Structure of thermal heads
    • B41J2/33555—Structure of thermal heads characterised by type
    • B41J2/3357—Surface type resistors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
    • B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
    • B41J2/335—Structure of thermal heads
    • B41J2/33585—Hollow parts under the heater

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP32613596A 1995-11-30 1996-11-21 半導体ヒータおよびその製造方法 Expired - Fee Related JP3778640B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/565,735 US6023091A (en) 1995-11-30 1995-11-30 Semiconductor heater and method for making
US565735 1995-11-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005196440A Division JP2006024937A (ja) 1995-11-30 2005-07-05 半導体ヒータおよびその製造方法

Publications (3)

Publication Number Publication Date
JPH09205009A JPH09205009A (ja) 1997-08-05
JPH09205009A5 JPH09205009A5 (https=) 2004-11-04
JP3778640B2 true JP3778640B2 (ja) 2006-05-24

Family

ID=24259895

Family Applications (2)

Application Number Title Priority Date Filing Date
JP32613596A Expired - Fee Related JP3778640B2 (ja) 1995-11-30 1996-11-21 半導体ヒータおよびその製造方法
JP2005196440A Pending JP2006024937A (ja) 1995-11-30 2005-07-05 半導体ヒータおよびその製造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2005196440A Pending JP2006024937A (ja) 1995-11-30 2005-07-05 半導体ヒータおよびその製造方法

Country Status (2)

Country Link
US (1) US6023091A (https=)
JP (2) JP3778640B2 (https=)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6023091A (en) * 1995-11-30 2000-02-08 Motorola, Inc. Semiconductor heater and method for making
JP2001168651A (ja) * 1999-12-14 2001-06-22 Mitsumi Electric Co Ltd 半導体装置
US6986566B2 (en) 1999-12-22 2006-01-17 Eastman Kodak Company Liquid emission device
US6457815B1 (en) * 2001-01-29 2002-10-01 Hewlett-Packard Company Fluid-jet printhead and method of fabricating a fluid-jet printhead
JP3868755B2 (ja) * 2001-04-05 2007-01-17 アルプス電気株式会社 サーマルヘッド及びその製造方法
KR100449069B1 (ko) * 2001-09-12 2004-09-18 한국전자통신연구원 미소전극, 미소전극 어레이 및 미소전극 제조 방법
US7492019B2 (en) * 2003-03-07 2009-02-17 Ic Mechanics, Inc. Micromachined assembly with a multi-layer cap defining a cavity
WO2004077523A2 (en) 2003-02-25 2004-09-10 Ic Mechanics, Inc. Micromachined assembly with a multi-layer cap defining cavity
JP3729353B2 (ja) * 2003-06-18 2005-12-21 松下電器産業株式会社 固体撮像装置およびその製造方法
US7480006B1 (en) * 2004-04-13 2009-01-20 Pixim, Inc. Optical package for image sensor with integrated heater
US7714694B2 (en) 2004-09-21 2010-05-11 Microbridge Technologies Canada, Inc. Compensating for linear and non-linear trimming-induced shift of temperature coefficient of resistance
JP2010096655A (ja) * 2008-10-17 2010-04-30 Kurabo Ind Ltd 流体制御方法
US8767448B2 (en) 2012-11-05 2014-07-01 International Business Machines Corporation Magnetoresistive random access memory
US9324937B1 (en) 2015-03-24 2016-04-26 International Business Machines Corporation Thermally assisted MRAM including magnetic tunnel junction and vacuum cavity
JP1551077S (https=) * 2015-09-29 2016-06-06
JP1551076S (https=) * 2015-09-29 2016-06-06
JP1551075S (https=) * 2015-09-29 2016-06-06
CN112938937B (zh) * 2021-03-25 2022-05-31 安徽晟捷新能源科技股份有限公司 一种基于碳纳米管生产的气体加热流量控制设备
CN114089598A (zh) * 2022-01-24 2022-02-25 浙江光特科技有限公司 半导体器件的制造方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58167A (ja) * 1981-06-25 1983-01-05 Fujitsu Ltd 半導体装置
US4601777A (en) * 1985-04-03 1986-07-22 Xerox Corporation Thermal ink jet printhead and process therefor
US4638337A (en) * 1985-08-02 1987-01-20 Xerox Corporation Thermal ink jet printhead
US4639748A (en) * 1985-09-30 1987-01-27 Xerox Corporation Ink jet printhead with integral ink filter
JPH01109250A (ja) * 1987-10-22 1989-04-26 Toshiba Corp ガスセンサ
US4967589A (en) * 1987-12-23 1990-11-06 Ricoh Company, Ltd. Gas detecting device
JP2703773B2 (ja) * 1988-04-14 1998-01-26 シャープ株式会社 半導体装置の製造方法
JP2847970B2 (ja) * 1989-12-28 1999-01-20 富士電機株式会社 ガスセンサおよびその製造方法
JP3033143B2 (ja) * 1989-12-28 2000-04-17 富士電機株式会社 ガスセンサの製造方法
US5169806A (en) * 1990-09-26 1992-12-08 Xerox Corporation Method of making amorphous deposited polycrystalline silicon thermal ink jet transducers
US5285131A (en) * 1990-12-03 1994-02-08 University Of California - Berkeley Vacuum-sealed silicon incandescent light
US5464966A (en) * 1992-10-26 1995-11-07 The United States Of America As Represented By The Secretary Of Commerce Micro-hotplate devices and methods for their fabrication
US5345213A (en) * 1992-10-26 1994-09-06 The United States Of America, As Represented By The Secretary Of Commerce Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation
US5450109A (en) * 1993-03-24 1995-09-12 Hewlett-Packard Company Barrier alignment and process monitor for TIJ printheads
US5324683A (en) * 1993-06-02 1994-06-28 Motorola, Inc. Method of forming a semiconductor structure having an air region
US5466484A (en) * 1993-09-29 1995-11-14 Motorola, Inc. Resistor structure and method of setting a resistance value
FR2736205B1 (fr) * 1995-06-30 1997-09-19 Motorola Semiconducteurs Dispositif detecteur a semiconducteur et son procede de formation
US6023091A (en) * 1995-11-30 2000-02-08 Motorola, Inc. Semiconductor heater and method for making

Also Published As

Publication number Publication date
US6023091A (en) 2000-02-08
JP2006024937A (ja) 2006-01-26
JPH09205009A (ja) 1997-08-05

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