JP3777709B2 - マーク位置検出装置及びそれを備えた投影露光装置、及びマーク位置検出方法 - Google Patents

マーク位置検出装置及びそれを備えた投影露光装置、及びマーク位置検出方法 Download PDF

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Publication number
JP3777709B2
JP3777709B2 JP08515297A JP8515297A JP3777709B2 JP 3777709 B2 JP3777709 B2 JP 3777709B2 JP 08515297 A JP08515297 A JP 08515297A JP 8515297 A JP8515297 A JP 8515297A JP 3777709 B2 JP3777709 B2 JP 3777709B2
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Japan
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mark
image
position detection
stage
image data
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Expired - Lifetime
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JP08515297A
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Japanese (ja)
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JPH10281729A (ja
JPH10281729A5 (enExample
Inventor
一明 鈴木
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Nikon Corp
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Nikon Corp
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Priority to JP08515297A priority Critical patent/JP3777709B2/ja
Publication of JPH10281729A publication Critical patent/JPH10281729A/ja
Priority to US09/722,310 priority patent/US6384898B1/en
Publication of JPH10281729A5 publication Critical patent/JPH10281729A5/ja
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Publication of JP3777709B2 publication Critical patent/JP3777709B2/ja
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  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Image Processing (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Image Analysis (AREA)
JP08515297A 1997-02-06 1997-04-03 マーク位置検出装置及びそれを備えた投影露光装置、及びマーク位置検出方法 Expired - Lifetime JP3777709B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP08515297A JP3777709B2 (ja) 1997-04-03 1997-04-03 マーク位置検出装置及びそれを備えた投影露光装置、及びマーク位置検出方法
US09/722,310 US6384898B1 (en) 1997-02-06 2000-11-28 Projection exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08515297A JP3777709B2 (ja) 1997-04-03 1997-04-03 マーク位置検出装置及びそれを備えた投影露光装置、及びマーク位置検出方法

Publications (3)

Publication Number Publication Date
JPH10281729A JPH10281729A (ja) 1998-10-23
JPH10281729A5 JPH10281729A5 (enExample) 2005-03-03
JP3777709B2 true JP3777709B2 (ja) 2006-05-24

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JP08515297A Expired - Lifetime JP3777709B2 (ja) 1997-02-06 1997-04-03 マーク位置検出装置及びそれを備えた投影露光装置、及びマーク位置検出方法

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JP (1) JP3777709B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4506027B2 (ja) * 2001-04-27 2010-07-21 株式会社村田製作所 電子部品装着装置
US7026832B2 (en) 2002-10-28 2006-04-11 Dainippon Screen Mfg. Co., Ltd. Probe mark reading device and probe mark reading method
JP5152567B2 (ja) * 2008-01-10 2013-02-27 株式会社島津製作所 Ｔｆｔアレイ検査装置
JP5247617B2 (ja) * 2009-07-16 2013-07-24 キヤノン株式会社 画像処理装置およびその方法
JP5751940B2 (ja) * 2011-06-10 2015-07-22 株式会社ディスコ 加工装置
JP7310617B2 (ja) * 2020-01-22 2023-07-19 ウシオ電機株式会社 アライメントマーク検出装置およびアライメントマーク検出方法

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Publication number Publication date
JPH10281729A (ja) 1998-10-23

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