JP3772005B2 - 移動装置及び移動装置を有する走査型プローブ顕微鏡 - Google Patents

移動装置及び移動装置を有する走査型プローブ顕微鏡 Download PDF

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Publication number
JP3772005B2
JP3772005B2 JP28977797A JP28977797A JP3772005B2 JP 3772005 B2 JP3772005 B2 JP 3772005B2 JP 28977797 A JP28977797 A JP 28977797A JP 28977797 A JP28977797 A JP 28977797A JP 3772005 B2 JP3772005 B2 JP 3772005B2
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Japan
Prior art keywords
moving object
moving
elastic member
arm
arrow
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Expired - Fee Related
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JP28977797A
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English (en)
Japanese (ja)
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JPH11126110A5 (enExample
JPH11126110A (ja
Inventor
喜裕 上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP28977797A priority Critical patent/JP3772005B2/ja
Publication of JPH11126110A publication Critical patent/JPH11126110A/ja
Publication of JPH11126110A5 publication Critical patent/JPH11126110A5/ja
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Publication of JP3772005B2 publication Critical patent/JP3772005B2/ja
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Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type

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  • Microscoopes, Condenser (AREA)
  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP28977797A 1997-10-22 1997-10-22 移動装置及び移動装置を有する走査型プローブ顕微鏡 Expired - Fee Related JP3772005B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28977797A JP3772005B2 (ja) 1997-10-22 1997-10-22 移動装置及び移動装置を有する走査型プローブ顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28977797A JP3772005B2 (ja) 1997-10-22 1997-10-22 移動装置及び移動装置を有する走査型プローブ顕微鏡

Publications (3)

Publication Number Publication Date
JPH11126110A JPH11126110A (ja) 1999-05-11
JPH11126110A5 JPH11126110A5 (enExample) 2004-12-09
JP3772005B2 true JP3772005B2 (ja) 2006-05-10

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ID=17747634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28977797A Expired - Fee Related JP3772005B2 (ja) 1997-10-22 1997-10-22 移動装置及び移動装置を有する走査型プローブ顕微鏡

Country Status (1)

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JP (1) JP3772005B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4797150B2 (ja) * 2000-03-14 2011-10-19 オリンパス株式会社 走査機構およびこれを用いた機械走査型顕微鏡
KR100493151B1 (ko) * 2000-07-19 2005-06-02 삼성전자주식회사 멀티폴디스 스프링을 이용한 다축 구동을 위한싱글스테이지 마이크로 구동기
JP4642294B2 (ja) * 2001-09-20 2011-03-02 オリンパス株式会社 微動機構
US7687767B2 (en) * 2002-12-20 2010-03-30 Agilent Technologies, Inc. Fast scanning stage for a scanning probe microscope
JP5270384B2 (ja) * 2009-01-15 2013-08-21 株式会社ミツトヨ 直線案内機構および測定装置
JP5295814B2 (ja) * 2009-02-17 2013-09-18 オリンパス株式会社 走査機構および走査型プローブ顕微鏡

Also Published As

Publication number Publication date
JPH11126110A (ja) 1999-05-11

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