JP3715920B2 - 熱式流量計 - Google Patents

熱式流量計 Download PDF

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Publication number
JP3715920B2
JP3715920B2 JP2001395007A JP2001395007A JP3715920B2 JP 3715920 B2 JP3715920 B2 JP 3715920B2 JP 2001395007 A JP2001395007 A JP 2001395007A JP 2001395007 A JP2001395007 A JP 2001395007A JP 3715920 B2 JP3715920 B2 JP 3715920B2
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JP
Japan
Prior art keywords
flow path
sensor
flow
thermal
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001395007A
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English (en)
Japanese (ja)
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JP2003194608A5 (enExample
JP2003194608A (ja
Inventor
彰浩 伊藤
尚嗣 世古
茂 林本
昭市 北川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
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CKD Corp
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Publication date
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Priority to JP2001395007A priority Critical patent/JP3715920B2/ja
Publication of JP2003194608A publication Critical patent/JP2003194608A/ja
Publication of JP2003194608A5 publication Critical patent/JP2003194608A5/ja
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Publication of JP3715920B2 publication Critical patent/JP3715920B2/ja
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Expired - Fee Related legal-status Critical Current

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JP2001395007A 2001-12-26 2001-12-26 熱式流量計 Expired - Fee Related JP3715920B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001395007A JP3715920B2 (ja) 2001-12-26 2001-12-26 熱式流量計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001395007A JP3715920B2 (ja) 2001-12-26 2001-12-26 熱式流量計

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP2003139702A Division JP3637050B2 (ja) 2003-05-19 2003-05-19 熱式流量計
JP2004323487A Division JP3645900B2 (ja) 2004-11-08 2004-11-08 熱式流量計
JP2004323486A Division JP3645899B2 (ja) 2004-11-08 2004-11-08 熱式流量計

Publications (3)

Publication Number Publication Date
JP2003194608A JP2003194608A (ja) 2003-07-09
JP2003194608A5 JP2003194608A5 (enExample) 2005-06-30
JP3715920B2 true JP3715920B2 (ja) 2005-11-16

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ID=27601563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001395007A Expired - Fee Related JP3715920B2 (ja) 2001-12-26 2001-12-26 熱式流量計

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JP (1) JP3715920B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100974515B1 (ko) * 2002-05-29 2010-08-10 씨케이디 가부시키 가이샤 열식 유량계
US6928865B2 (en) 2002-05-29 2005-08-16 Ckd Corporation Thermal flowmeter having a laminate structure
JP3905793B2 (ja) * 2002-06-04 2007-04-18 株式会社山武 吸着確認センサ
JP2005300365A (ja) * 2004-04-13 2005-10-27 Keyence Corp 分流式流量センサ装置
JP6819863B2 (ja) * 2016-04-07 2021-01-27 日立金属株式会社 バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置

Also Published As

Publication number Publication date
JP2003194608A (ja) 2003-07-09

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