JP3645381B2 - 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置 - Google Patents
半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置 Download PDFInfo
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- JP3645381B2 JP3645381B2 JP32797896A JP32797896A JP3645381B2 JP 3645381 B2 JP3645381 B2 JP 3645381B2 JP 32797896 A JP32797896 A JP 32797896A JP 32797896 A JP32797896 A JP 32797896A JP 3645381 B2 JP3645381 B2 JP 3645381B2
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- oxide film
- thermal oxide
- film
- heat treatment
- forming
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- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
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- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Recrystallisation Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32797896A JP3645381B2 (ja) | 1996-01-19 | 1996-11-22 | 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置 |
Applications Claiming Priority (15)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2621096 | 1996-01-19 | ||
| JP2603796 | 1996-01-20 | ||
| JP8-32874 | 1996-01-26 | ||
| JP3287596 | 1996-01-26 | ||
| JP3287496 | 1996-01-26 | ||
| JP3298196 | 1996-01-27 | ||
| JP5833496 | 1996-02-20 | ||
| JP8-32875 | 1996-03-17 | ||
| JP8-26210 | 1996-03-17 | ||
| JP8-88759 | 1996-03-17 | ||
| JP8875996 | 1996-03-17 | ||
| JP8-32981 | 1996-03-17 | ||
| JP8-26037 | 1996-03-17 | ||
| JP8-58334 | 1996-03-17 | ||
| JP32797896A JP3645381B2 (ja) | 1996-01-19 | 1996-11-22 | 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH09312259A JPH09312259A (ja) | 1997-12-02 |
| JPH09312259A5 JPH09312259A5 (enExample) | 2004-11-11 |
| JP3645381B2 true JP3645381B2 (ja) | 2005-05-11 |
Family
ID=27572022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32797896A Expired - Fee Related JP3645381B2 (ja) | 1996-01-19 | 1996-11-22 | 半導体装置の作製方法、情報端末、ヘッドマウントディスプレイ、カーナビゲーション、携帯電話、ビデオカメラ、投写型表示装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3645381B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4646343B2 (ja) * | 1998-11-27 | 2011-03-09 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP2002124678A (ja) * | 2000-10-13 | 2002-04-26 | Sony Corp | 薄膜トランジスタの製造方法 |
| KR100623229B1 (ko) * | 2003-11-29 | 2006-09-18 | 삼성에스디아이 주식회사 | 유기 전계 발광 표시 장치 및 그의 제조 방법 |
-
1996
- 1996-11-22 JP JP32797896A patent/JP3645381B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09312259A (ja) | 1997-12-02 |
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