JP3601822B2 - 双音さ型振動ジャイロセンサ - Google Patents

双音さ型振動ジャイロセンサ Download PDF

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Publication number
JP3601822B2
JP3601822B2 JP2002264872A JP2002264872A JP3601822B2 JP 3601822 B2 JP3601822 B2 JP 3601822B2 JP 2002264872 A JP2002264872 A JP 2002264872A JP 2002264872 A JP2002264872 A JP 2002264872A JP 3601822 B2 JP3601822 B2 JP 3601822B2
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JP
Japan
Prior art keywords
detection
gyro sensor
portions
double
double tone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002264872A
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English (en)
Japanese (ja)
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JP2004101392A5 (enExample
JP2004101392A (ja
Inventor
義朗 富川
健二 佐藤
淳 小野
Original Assignee
東洋通信機株式会社
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Application filed by 東洋通信機株式会社 filed Critical 東洋通信機株式会社
Priority to JP2002264872A priority Critical patent/JP3601822B2/ja
Priority to US10/664,821 priority patent/US6915694B2/en
Publication of JP2004101392A publication Critical patent/JP2004101392A/ja
Application granted granted Critical
Publication of JP3601822B2 publication Critical patent/JP3601822B2/ja
Publication of JP2004101392A5 publication Critical patent/JP2004101392A5/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2468—Tuning fork resonators
    • H03H9/2473—Double-Ended Tuning Fork [DETF] resonators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2002264872A 2002-09-11 2002-09-11 双音さ型振動ジャイロセンサ Expired - Fee Related JP3601822B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002264872A JP3601822B2 (ja) 2002-09-11 2002-09-11 双音さ型振動ジャイロセンサ
US10/664,821 US6915694B2 (en) 2002-09-11 2003-09-17 Double-ended tuning fork vibratory gyro-sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002264872A JP3601822B2 (ja) 2002-09-11 2002-09-11 双音さ型振動ジャイロセンサ
US10/664,821 US6915694B2 (en) 2002-09-11 2003-09-17 Double-ended tuning fork vibratory gyro-sensor

Publications (3)

Publication Number Publication Date
JP2004101392A JP2004101392A (ja) 2004-04-02
JP3601822B2 true JP3601822B2 (ja) 2004-12-15
JP2004101392A5 JP2004101392A5 (enExample) 2005-04-07

Family

ID=34525324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002264872A Expired - Fee Related JP3601822B2 (ja) 2002-09-11 2002-09-11 双音さ型振動ジャイロセンサ

Country Status (2)

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US (1) US6915694B2 (enExample)
JP (1) JP3601822B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220236057A1 (en) * 2019-07-30 2022-07-28 Seiko Epson Corporation Vibrator Device, Electronic Apparatus, And Vehicle

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3601822B2 (ja) 2002-09-11 2004-12-15 東洋通信機株式会社 双音さ型振動ジャイロセンサ
JP4569209B2 (ja) * 2004-07-30 2010-10-27 エプソントヨコム株式会社 双音さ型振動ジャイロセンサ及びその製造方法
JP2009250859A (ja) * 2008-04-09 2009-10-29 Epson Toyocom Corp 加速度検知装置
JP2011145278A (ja) * 2009-12-16 2011-07-28 Seiko Epson Corp 振動片、振動子、物理量センサー、および電子機器
JP5655863B2 (ja) * 2010-12-15 2015-01-21 株式会社村田製作所 振動ジャイロ
US10429405B2 (en) 2012-02-03 2019-10-01 Honeywell International Inc. Vibrating beam accelerometer
JP6255903B2 (ja) * 2013-10-31 2018-01-10 セイコーエプソン株式会社 角速度センサー、電子機器および移動体
JP6318552B2 (ja) * 2013-10-31 2018-05-09 セイコーエプソン株式会社 角速度センサー、電子機器および移動体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0786417B2 (ja) 1990-05-25 1995-09-20 赤井電機株式会社 振動ジャイロ
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
JP3999377B2 (ja) * 1997-11-04 2007-10-31 日本碍子株式会社 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法
US6481283B1 (en) * 1999-04-05 2002-11-19 Milli Sensor Systems & Actuators, Inc. Coriolis oscillating gyroscopic instrument
JP4529203B2 (ja) 1999-08-05 2010-08-25 パナソニック株式会社 角速度センサ
JP3601822B2 (ja) 2002-09-11 2004-12-15 東洋通信機株式会社 双音さ型振動ジャイロセンサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220236057A1 (en) * 2019-07-30 2022-07-28 Seiko Epson Corporation Vibrator Device, Electronic Apparatus, And Vehicle
US11940275B2 (en) * 2019-07-30 2024-03-26 Seiko Epson Corporation Vibrator device, electronic apparatus, and vehicle

Also Published As

Publication number Publication date
US6915694B2 (en) 2005-07-12
US20050056095A1 (en) 2005-03-17
JP2004101392A (ja) 2004-04-02

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