JP3562160B2 - テープ走行装置 - Google Patents

テープ走行装置 Download PDF

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Publication number
JP3562160B2
JP3562160B2 JP23613796A JP23613796A JP3562160B2 JP 3562160 B2 JP3562160 B2 JP 3562160B2 JP 23613796 A JP23613796 A JP 23613796A JP 23613796 A JP23613796 A JP 23613796A JP 3562160 B2 JP3562160 B2 JP 3562160B2
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JP
Japan
Prior art keywords
speed
tape
reel
running
deceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP23613796A
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English (en)
Japanese (ja)
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JPH09134563A (ja
JPH09134563A5 (https=
Inventor
正幸 木島
英男 西島
周幸 岡本
丈夫 大河内
行伸 多田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
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Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP23613796A priority Critical patent/JP3562160B2/ja
Publication of JPH09134563A publication Critical patent/JPH09134563A/ja
Application granted granted Critical
Publication of JP3562160B2 publication Critical patent/JP3562160B2/ja
Publication of JPH09134563A5 publication Critical patent/JPH09134563A5/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP23613796A 1995-09-08 1996-09-06 テープ走行装置 Expired - Fee Related JP3562160B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23613796A JP3562160B2 (ja) 1995-09-08 1996-09-06 テープ走行装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP23102095 1995-09-08
JP7-231020 1995-09-08
JP23613796A JP3562160B2 (ja) 1995-09-08 1996-09-06 テープ走行装置

Publications (3)

Publication Number Publication Date
JPH09134563A JPH09134563A (ja) 1997-05-20
JP3562160B2 true JP3562160B2 (ja) 2004-09-08
JPH09134563A5 JPH09134563A5 (https=) 2004-09-09

Family

ID=26529656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23613796A Expired - Fee Related JP3562160B2 (ja) 1995-09-08 1996-09-06 テープ走行装置

Country Status (1)

Country Link
JP (1) JP3562160B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100463108C (zh) 2004-04-23 2009-02-18 尼康股份有限公司 测量方法、测量装置、曝光方法及曝光装置

Also Published As

Publication number Publication date
JPH09134563A (ja) 1997-05-20

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