JP3230771B2 - Resin composition for semiconductor encapsulation - Google Patents

Resin composition for semiconductor encapsulation

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Publication number
JP3230771B2
JP3230771B2 JP30667192A JP30667192A JP3230771B2 JP 3230771 B2 JP3230771 B2 JP 3230771B2 JP 30667192 A JP30667192 A JP 30667192A JP 30667192 A JP30667192 A JP 30667192A JP 3230771 B2 JP3230771 B2 JP 3230771B2
Authority
JP
Japan
Prior art keywords
resin
curing agent
epoxy resin
resin composition
semiconductor encapsulation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP30667192A
Other languages
Japanese (ja)
Other versions
JPH06157725A (en
Inventor
浩規 大須賀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
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Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP30667192A priority Critical patent/JP3230771B2/en
Publication of JPH06157725A publication Critical patent/JPH06157725A/en
Application granted granted Critical
Publication of JP3230771B2 publication Critical patent/JP3230771B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Compositions Of Macromolecular Compounds (AREA)
  • Epoxy Resins (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、耐半田ストレス性及び
耐湿性に優れた半導体封止用樹脂組成物に関するもので
ある。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a resin composition for encapsulating a semiconductor having excellent resistance to soldering stress and moisture.

【0002】[0002]

【従来の技術】従来、ダイオード、トランジスタ、集積
回路等の電子部品を熱硬化性樹脂で封止しているが、特
に集積回路では耐熱性、耐湿性に優れたO−クレゾール
ノボラックエポキシ樹脂をノボラック型フェノール樹脂
で硬化させるエポキシ樹脂組成物が用いられてきた。し
かし近年の電子機器の小型・軽量化・高性能化の市場動
向において、半導体の高集積化も年々進み、パッケージ
においては小型・薄型の表面実装タイプが主流と成りつ
つあり、また半導体の高集積化に伴うチップの大型化か
ら封止樹脂への要求は益々厳しいものとなり従来の樹脂
組成物では信頼性の確保が困難になってきている。これ
は半導体の実装方法が従来のピン挿入型から表面実装型
(VPSリフロー型、IRリフロー型、半田浸漬法等)
に変わる事により、半田浸漬の工程において急激に20
0℃以上の高温にさらされることになりパッケージが割
れたり、チップと封止樹脂の界面剥離が生じ、耐湿性が
劣化し信頼性が低くなるといった問題が起きる為であ
り、小型・薄型パッケージでは一層影響が大きくなる為
である。 この様な状況から、半田浸漬等の厳しい条件
においても耐クラック性、耐湿性に優れた高信頼性の樹
脂の開発が急がれている。
2. Description of the Related Art Conventionally, electronic components such as diodes, transistors, and integrated circuits are sealed with a thermosetting resin. In particular, in an integrated circuit, an O-cresol novolak epoxy resin having excellent heat resistance and moisture resistance is made of novolak. Epoxy resin compositions cured with a type phenolic resin have been used. However, in recent years, in the market trend of miniaturization, weight reduction and high performance of electronic devices, high integration of semiconductors is progressing year by year, and small and thin surface mount type packages are becoming mainstream. The demand for the sealing resin is becoming increasingly severe due to the increase in size of the chip accompanying the development of the semiconductor device, and it has become difficult to secure the reliability of the conventional resin composition. This is because the semiconductor mounting method changes from the conventional pin insertion type to the surface mounting type (VPS reflow type, IR reflow type, solder immersion method, etc.)
, The solder immersion process suddenly becomes 20
Exposure to a high temperature of 0 ° C or higher may cause the package to crack, peel off the interface between the chip and the sealing resin, degrade moisture resistance, and reduce reliability. This is because the influence is further increased. Under such circumstances, development of a highly reliable resin having excellent crack resistance and moisture resistance even under severe conditions such as solder immersion is urgently required.

【0003】これらの問題を解決するために半田付け時
の熱衝撃を緩和する目的で、熱可塑性オリゴマーの添加
(特開昭62−115849号公報)や各種シリコーン
化合物の添加(特開昭62−11585号公報、62−
116654号公報、62−128162号公報)、さ
らにはシリコーン変性(特開昭62−136860号公
報)などの手法で対応しているがいずれも半田浸漬時に
パッケージにクラックが発生し信頼性の優れた半導体封
止用エポキシ樹脂組成物を得るまでには至らなかった。
一方、半田浸漬時の耐半田クラック性に優れた半導体封
止用エポキシ樹脂組成物を得るために、硬化剤としてフ
ェノールアラルキル樹脂の使用(特開昭59−6766
0号公報)等が検討されてきたがフェノールアラルキル
樹脂の使用によりリードフレームとの密着性及び低吸水
性が向上し、クラック発生が低減するが、フェノールア
ラルキル樹脂硬化剤系では硬化物のガラス転移温度が、
従来のフェノールノボラック硬化剤系に比べ著しく低く
なり、長期耐熱性が劣るという欠点がある。
In order to solve these problems, addition of thermoplastic oligomers (Japanese Patent Laid-Open No. 62-15849) and addition of various silicone compounds (Japanese Patent Laid-Open No. 62-15849) have been proposed for the purpose of reducing thermal shock during soldering. No. 11585, 62-
116654, 62-128162) and silicone modification (Japanese Patent Application Laid-Open No. 62-136860), all of which have cracks in the package during solder immersion and have excellent reliability. It has not been possible to obtain an epoxy resin composition for semiconductor encapsulation.
On the other hand, in order to obtain an epoxy resin composition for semiconductor encapsulation having excellent resistance to solder cracking during solder immersion, a phenol aralkyl resin is used as a curing agent (JP-A-59-6766).
No. 0) has been studied, but the use of a phenol aralkyl resin improves the adhesion to the lead frame and low water absorption, and reduces the occurrence of cracks. temperature,
It has a drawback that it is significantly lower than the conventional phenol novolak curing agent system and has poor long-term heat resistance.

【0004】[0004]

【発明が解決しようとする課題】本発明は、このような
問題に対して耐半田クラック性、耐湿性及び耐熱性が著
しく優れた半導体封止用樹脂組成物を提供するものであ
る。
An object of the present invention is to provide a resin composition for semiconductor encapsulation which is remarkably excellent in solder crack resistance, moisture resistance and heat resistance against such problems.

【0005】[0005]

【課題を解決するための手段】本発明者らは、これらの
問題を解決するために鋭意研究を進め、次の組成を持つ
樹脂組成物を見いだした。すなわち本発明は、(A)エ
ポキシ樹脂、(B)硬化剤として、式(1)の化学構造
式で示されるフェノール樹脂化合物を総硬化剤量に対し
て50〜100重量%含む硬化剤および
Means for Solving the Problems The present inventors have intensively studied to solve these problems and found a resin composition having the following composition. That is, the present invention relates to (A) an epoxy resin, (B) a curing agent containing 50 to 100% by weight of a phenol resin compound represented by the chemical structural formula (1) based on the total curing agent amount, as a curing agent;

【0006】[0006]

【化3】 Embedded image

【0007】(C)無機充填材を必須成分とし、(C)
無機充填材が全組成物中70〜90重量%である半導体
封止用樹脂組成物である。本発明に用いられる(A)エ
ポキシ樹脂はビスフェノール型、フェノールノボラック
型、オルソクレゾールノボラック型、トリスフェニルメ
タン型、ナフタレン骨格含有型等各種のエポキシ樹脂が
適用可能であり、2種以上併用しても差し支えないが、
特に式(2)に示したビフェニル型エポキシを用いると
エポキシ樹脂自体の溶融粘度が低いため流動性を損なう
ことなく、無機充填材を多量に配合でき、延いては高強
度で吸湿量の少ない耐半田ストレス性に優れた樹脂組成
物が得られる。
[0007] (C) an inorganic filler as an essential component,
The resin composition for semiconductor encapsulation wherein the inorganic filler is 70 to 90% by weight of the total composition. As the epoxy resin (A) used in the present invention, various epoxy resins such as bisphenol type, phenol novolak type, orthocresol novolak type, trisphenylmethane type and naphthalene skeleton-containing type can be applied. No problem,
In particular, when the biphenyl type epoxy represented by the formula (2) is used, a large amount of an inorganic filler can be blended without impairing the fluidity because the melt viscosity of the epoxy resin itself is low, and thus the high strength and low moisture absorption resistance can be obtained. A resin composition having excellent solder stress properties can be obtained.

【0008】[0008]

【化4】 (R1、R2、R3、R4はHまたはCH3Embedded image (R 1 , R 2 , R 3 and R 4 are H or CH 3 )

【0009】ビフェニル型エポキシを用いる場合には総
エポキシ量に対し50重量%以上、好ましくは70重量
%以上の使用が望ましい。50重量%未満では樹脂の低
粘度化がはかれず目的とする無機充填材の多量配合が困
難である。
When using a biphenyl type epoxy, it is desirable to use 50% by weight or more, preferably 70% by weight or more based on the total amount of epoxy. If it is less than 50% by weight, the viscosity of the resin cannot be reduced, and it is difficult to mix a large amount of the desired inorganic filler.

【0010】式(1)で示される構造のフェノール樹脂
硬化剤の特徴としては、以下の2点が挙げられる。第1
の点は分子鎖中にXで示されるシクロアルカン類を有し
ていることであり、従来のフェノールノボラック樹脂に
比べ、耐湿性に優れ、また熱時可撓性に優れているとい
う効果がある。この様な可撓構造を有するシクロアルカ
ン類を分子内に取り入れると反応性が低下し、さらに硬
化物の架橋密度が低くなるために、ガラス転移温度が低
下するという問題がある。そこで、分子側鎖にフェノー
ル性水酸基を取り入れることが、第2の点であり、これ
により反応性及びガラス転移温度を向上させる効果があ
る。式(1)のnの値は1〜8であり、8を越えると流
動性が低下し成形性が悪くなる。また式(1)のXは、
単独で用いても2種類を混合して用いても差し支えな
い。 このフェノール樹脂硬化剤の使用量は、これを調
節することにより耐半田クラック性を最大限に引き出す
ことができる。耐半田クラック性の効果を出すためには
式(1)で示されるフェノール樹脂硬化剤を総フェノー
ル樹脂硬化剤量の50重量%以上好ましくは70重量%
以上の使用が望ましい。50重量%未満だと、低吸湿性
と熱時可撓性が得られず、耐半田クラック特性が不充分
である。
The phenol resin curing agent having the structure represented by the formula (1) has the following two features. First
Is that the compound has a cycloalkane represented by X in the molecular chain, and has an effect of being excellent in moisture resistance and excellent in flexibility when heated compared to a conventional phenol novolak resin. . When cycloalkanes having such a flexible structure are incorporated into the molecule, the reactivity is lowered, and the crosslink density of the cured product is lowered, so that the glass transition temperature is lowered. Thus, the second point is to incorporate a phenolic hydroxyl group into the molecular side chain, which has the effect of improving the reactivity and the glass transition temperature. The value of n in the formula (1) is from 1 to 8, and if it exceeds 8, the fluidity decreases and the moldability deteriorates. X in the formula (1) is
They may be used alone or as a mixture of two types. By adjusting the amount of the phenol resin curing agent used, solder crack resistance can be maximized. In order to obtain the effect of solder crack resistance, the phenolic resin curing agent represented by the formula (1) is used in an amount of 50% by weight or more, preferably 70% by weight of the total amount of the phenolic resin curing agent.
The above use is desirable. If the amount is less than 50% by weight, low moisture absorption and flexibility under heat cannot be obtained, and the solder crack resistance is insufficient.

【0011】式(1)で示される変性フェノール樹脂硬
化剤以外に他のフェノール樹脂系硬化剤を併用する場
合、用いるフェノール樹脂系硬化剤とはフェノール性水
酸基を有する化合物全般をいう。例えば、ビスフェノー
ルA、ビスフェノールF、フェノールノボラック樹脂、
クレゾールノボラック樹脂、フェノールアラルキル樹脂
等を用いることができる。これら併用されるフェノール
樹脂は、硬化性の調整、可撓性の付与等の目的で適宜使
用されるが流動性の調整ではビスフェノールFや狭低分
子量フェノールノボラック樹脂等の低分子化合物が好適
である。
When another phenolic resin-based curing agent is used in addition to the modified phenolic resin-based curing agent represented by the formula (1), the phenolic resin-based curing agent used refers to all compounds having a phenolic hydroxyl group. For example, bisphenol A, bisphenol F, phenol novolak resin,
Cresol novolak resin, phenol aralkyl resin and the like can be used. These phenolic resins used in combination are appropriately used for the purpose of adjusting curability, imparting flexibility, etc., but for adjusting fluidity, low molecular weight compounds such as bisphenol F and narrow low molecular weight phenol novolak resins are suitable. .

【0012】本発明に用いる無機充填材としては、溶融
シリカ粉末、結晶シリカ粉末、アルミナ粉末、水和アル
ミナ粉末、窒化珪素粉末、炭酸カルシウム粉末等が挙げ
られ、特に溶融シリカ粉末が好ましい。無機充填材の配
合量は70〜90重量%の範囲が好ましい。70重量%
以下の場合は吸湿量が多くなり、また熱膨張係数も大き
く実装時の熱ストレスに耐えられない。また90重量%
以上になると流動特性が劣化し実用不可となる。
The inorganic filler used in the present invention includes fused silica powder, crystalline silica powder, alumina powder, hydrated alumina powder, silicon nitride powder, calcium carbonate powder, and the like, with fused silica powder being particularly preferred. The amount of the inorganic filler is preferably in the range of 70 to 90% by weight. 70% by weight
In the following cases, the amount of moisture absorption is large, and the coefficient of thermal expansion is too large to withstand thermal stress during mounting. 90% by weight
Above this, the flow characteristics deteriorate, making it impractical.

【0013】本発明の封止用エポキシ樹脂組成物はエポ
キシ樹脂、硬化剤及び無機充填材を必須成分とするが、
これ以外に必要に応じて硬化促進剤、シランカップリン
グ剤、ブロム化エポキシ樹脂、三酸化アンチモン、ヘキ
サブロムベンゼン等の難燃剤、カーボンブラック、ベン
ガラ等の着色剤、天然ワックス、合成ワックス等の離型
剤およびシリコーンオイル、ゴム等の低応力添加剤等の
種々の添加剤を適宜配合しても差し支えない。又、本発
明の封止用エポキシ樹脂組成物を成形材料として製造す
るには、エポキシ樹脂、硬化剤、硬化促進剤、充填剤、
その他の添加剤をミキサー等により十分に均一混合した
後、さらに熱ロールまたはニーダー等で溶融混合し、冷
却後粉砕して成形材料とすることができる。これらの成
形材料は電子部品あるいは電気部品の封止、被覆、絶縁
等に適用することができる。
The epoxy resin composition for sealing of the present invention comprises an epoxy resin, a curing agent and an inorganic filler as essential components.
In addition, if necessary, a curing accelerator, a silane coupling agent, a brominated epoxy resin, a flame retardant such as antimony trioxide, hexabromobenzene, a coloring agent such as carbon black or red iron, a natural wax, a synthetic wax, etc. Various additives such as a mold agent and low stress additives such as silicone oil and rubber may be appropriately compounded. Further, in order to produce the sealing epoxy resin composition of the present invention as a molding material, an epoxy resin, a curing agent, a curing accelerator, a filler,
After sufficiently mixing other additives with a mixer or the like, the mixture is further melt-mixed with a hot roll or a kneader or the like, cooled and pulverized to obtain a molding material. These molding materials can be applied to sealing, coating, insulating and the like of electronic parts or electric parts.

【0014】[0014]

【実施例】以下に本発明を実施例で示す。配合割合は重
量部とする。 実施例1〜6、比較例1〜4 (A)エポキシ樹脂 オルソクレゾールノボラック型エポキシ樹脂(エポ
キシ当量200、軟化点65℃) ビフェニル型エポキシ:3,3’,5,5’−テト
ラメチル−4,4’−ジヒドロキシビフェニルグリシジ
ルエーテル(エポキシ当量195) (B)フェノール樹脂硬化剤 式(3)で示されるフェノール樹脂(水酸基当量1
75、軟化点80℃)
The present invention will be described below by way of examples. The mixing ratio is by weight. Examples 1 to 6, Comparative Examples 1 to 4 (A) Epoxy resin ortho-cresol novolak type epoxy resin (epoxy equivalent 200, softening point 65 ° C) Biphenyl type epoxy: 3,3 ', 5,5'-tetramethyl-4 4,4'-dihydroxybiphenyl glycidyl ether (epoxy equivalent 195) (B) phenol resin curing agent A phenol resin represented by the formula (3) (hydroxyl equivalent 1
75, softening point 80 ° C)

【0015】[0015]

【化5】 Embedded image

【0016】 式(4)で示されるフェノール樹脂
(水酸基当量180、軟化点80℃)
A phenol resin represented by the formula (4) (hydroxyl equivalent 180, softening point 80 ° C.)

【0017】[0017]

【化6】 Embedded image

【0018】 フェノールノボラック樹脂(水酸基当
量105、軟化点80℃) 式(5)で示されるフェノールアラルキル樹脂(水
酸基当量180、軟化点80℃)
Phenol novolak resin (hydroxyl equivalent 105, softening point 80 ° C.) Phenol aralkyl resin represented by the formula (5) (hydroxyl equivalent 180, softening point 80 ° C.)

【0019】[0019]

【化7】 Embedded image

【0020】(C)無機充填材 溶融シリカ粉末(平均粒子径14μm) (D)その他原料 硬化促進剤:トリフェニルホスフィン 離型剤:カルナバワックス を表1に示したそれぞれの割合でミキサーで常温で混合
し、70〜100℃で2軸ロールにより混練し、冷却後
粉砕し成形材料とし、これをタブレット化して半導体封
止用エポキシ樹脂組成物を得た。この組成物を低圧トラ
ンスファー成形機(成形条件:175℃、70kg/c
m2、120秒)を用いて成形し、得られた成形品を17
5℃、8時間で後硬化し評価した。結果を表1に示す。
(C) Inorganic filler Fused silica powder (average particle size: 14 μm) (D) Other raw materials Curing accelerator: triphenylphosphine Release agent: carnauba wax at room temperature in a mixer at the respective ratios shown in Table 1. The mixture was mixed, kneaded with a biaxial roll at 70 to 100 ° C., cooled and pulverized to obtain a molding material, which was tabletted to obtain an epoxy resin composition for semiconductor encapsulation. A low-pressure transfer molding machine (molding conditions: 175 ° C., 70 kg / c)
m 2 , 120 seconds).
Post-curing was performed at 5 ° C. for 8 hours and evaluated. Table 1 shows the results.

【0021】評価方法 *1 スパイラルフロー EMMI−I−66に準じたスパイラルフロー観測用金
型を用い、金型温度175℃、注入圧力70kg/cm2
硬化時間2分で測定。 *2 硬化性 ショアD硬度計を用い、金型温度175℃、硬化時間2
分で測定。 *3 耐熱性 175℃、2分の条件で成形し、175℃で8時間、後
硬化させた試験片にて熱膨張特性を測定し硬化物のガラ
ス転移温度を求めた。 *4 半田クラック性試験 成形品(チップサイズ6×6mm、52pQFP)を85
℃、85%RHの環境下で48Hr及び72Hr処理
し、その後260℃の半田槽に10秒間浸漬後、顕微鏡
で外部クラックを観察した。 *5 半田耐湿性試験 成形品(チップサイズ3×6mm模擬素子、16pSO
P)を85℃、85%RHの環境下で72Hr処理し、
その後260℃の半田槽に10秒間浸漬後、プレッシャ
ークッカー試験(125℃、100%RH)をおこな
い、回路のオープン不良数を測定した。
Evaluation method * 1 Spiral flow Using a mold for spiral flow observation in accordance with EMMI-I-66, mold temperature 175 ° C, injection pressure 70 kg / cm 2 ,
Measured with a curing time of 2 minutes. * 2 Curability Using a Shore D hardness meter, mold temperature 175 ° C, curing time 2
Measured in minutes. * 3 Heat resistance The glass transition temperature of the cured product was determined by measuring the thermal expansion characteristics of a test piece molded at 175 ° C. for 2 minutes and post-cured at 175 ° C. for 8 hours. * 4 Solder cracking test 85 molded products (chip size 6 × 6 mm, 52pQFP)
After 48 hours and 72 hours of treatment in an environment of 85 ° C. and 85% RH, the wafer was immersed in a solder bath at 260 ° C. for 10 seconds, and external cracks were observed with a microscope. * 5 Solder moisture resistance test Molded product (chip size 3 x 6 mm simulation element, 16 pSO
P) is treated for 72 hours in an environment of 85 ° C. and 85% RH,
Then, after dipping in a solder bath at 260 ° C. for 10 seconds, a pressure cooker test (125 ° C., 100% RH) was performed to measure the number of open defects of the circuit.

【0022】[0022]

【表1】 [Table 1]

【0023】[0023]

【発明の効果】本発明によると従来技術では得ることが
できなかった耐半田ストレス性を有するエポキシ樹脂組
成物を得ることができるので、半田付け工程による急激
な温度変化による熱ストレスを受けた時の耐クラック性
に非常に優れ、更に耐湿性が良好なことから電子、電気
部品の封止用、被覆用、絶縁用等に用いた場合、特に表
面実装パッケージに搭載された高集積大型チップICに
おいて非常に信頼性を必要とする製品について好適であ
る。
According to the present invention, it is possible to obtain an epoxy resin composition having soldering stress resistance, which cannot be obtained by the prior art. When used for encapsulation, coating, insulation, etc. of electronic and electrical components, especially for highly integrated large chip ICs mounted on surface mount packages because of their excellent crack resistance and excellent moisture resistance It is suitable for products that require extremely high reliability.

フロントページの続き (51)Int.Cl.7 識別記号 FI H01L 23/31 (58)調査した分野(Int.Cl.7,DB名) C08G 59/62 C08G 59/24 C08L 63/00 - 63/10 H01L 23/29 Continuation of the front page (51) Int.Cl. 7 identification code FI H01L 23/31 (58) Fields investigated (Int.Cl. 7 , DB name) C08G 59/62 C08G 59/24 C08L 63/00-63 / 10 H01L 23/29

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 (A)エポキシ樹脂、(B)硬化剤とし
て、式(1)の化学構造式で示されるフェノール樹脂化
合物を総硬化剤量に対して50〜100重量%含む硬化
剤および 【化1】 (C)無機充填材を必須成分とし、(C)無機充填材が
全組成物中70〜90重量%であることを特徴とする半
導体封止用樹脂組成物。
1. A curing agent containing (A) an epoxy resin, (B) a phenolic resin compound represented by the chemical structural formula (1) as a curing agent in an amount of 50 to 100% by weight based on the total amount of the curing agent, and Formula 1 (C) An inorganic filler is an essential component, and (C) 70 to 90% by weight of the inorganic filler in the total composition is a resin composition for semiconductor encapsulation.
【請求項2】 (A)エポキシ樹脂が式(2)で示され
るビフェニル型エポキシで、総エポキシ樹脂量に対して
50〜100重量%であることを特徴とする請求項1記
載の半導体封止用樹脂組成物。 【化2】 (R1、R2、R3、R4はHまたはCH3
2. The semiconductor encapsulation according to claim 1, wherein (A) the epoxy resin is a biphenyl type epoxy represented by the formula (2) and the amount of the epoxy resin is 50 to 100% by weight based on the total amount of the epoxy resin. Resin composition. Embedded image (R 1 , R 2 , R 3 and R 4 are H or CH 3 )
JP30667192A 1992-11-17 1992-11-17 Resin composition for semiconductor encapsulation Expired - Fee Related JP3230771B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30667192A JP3230771B2 (en) 1992-11-17 1992-11-17 Resin composition for semiconductor encapsulation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30667192A JP3230771B2 (en) 1992-11-17 1992-11-17 Resin composition for semiconductor encapsulation

Publications (2)

Publication Number Publication Date
JPH06157725A JPH06157725A (en) 1994-06-07
JP3230771B2 true JP3230771B2 (en) 2001-11-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP30667192A Expired - Fee Related JP3230771B2 (en) 1992-11-17 1992-11-17 Resin composition for semiconductor encapsulation

Country Status (1)

Country Link
JP (1) JP3230771B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112079978B (en) * 2020-08-31 2022-08-23 江苏东材新材料有限责任公司 DCPD-bisphenol type benzoxazine resin and copper-clad plate composition and preparation method thereof

Also Published As

Publication number Publication date
JPH06157725A (en) 1994-06-07

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