JP3172401B2 - 溶剤の再生回収方法及び再生回収装置 - Google Patents

溶剤の再生回収方法及び再生回収装置

Info

Publication number
JP3172401B2
JP3172401B2 JP21974895A JP21974895A JP3172401B2 JP 3172401 B2 JP3172401 B2 JP 3172401B2 JP 21974895 A JP21974895 A JP 21974895A JP 21974895 A JP21974895 A JP 21974895A JP 3172401 B2 JP3172401 B2 JP 3172401B2
Authority
JP
Japan
Prior art keywords
solvent
boiling
component
low
mist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP21974895A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0949093A (ja
Inventor
和樹 小林
康司 松岡
謙介 矢野
教夫 足立
龍男 高見
裕司 森川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kimura Chemical Plants Co Ltd
Sharp Corp
Original Assignee
Kimura Chemical Plants Co Ltd
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kimura Chemical Plants Co Ltd, Sharp Corp filed Critical Kimura Chemical Plants Co Ltd
Priority to JP21974895A priority Critical patent/JP3172401B2/ja
Priority to US08/620,237 priority patent/US5925224A/en
Priority to KR1019960008292A priority patent/KR100395363B1/ko
Priority to TW085105563A priority patent/TW305767B/zh
Publication of JPH0949093A publication Critical patent/JPH0949093A/ja
Application granted granted Critical
Publication of JP3172401B2 publication Critical patent/JP3172401B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
    • B01D3/14—Fractional distillation or use of a fractionation or rectification column
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/06—Evaporators with vertical tubes
    • B01D1/10—Evaporators with vertical tubes with long tubes, e.g. Kestner evaporators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D5/00—Condensation of vapours; Recovering volatile solvents by condensation
    • B01D5/0057—Condensation of vapours; Recovering volatile solvents by condensation in combination with other processes
    • B01D5/006—Condensation of vapours; Recovering volatile solvents by condensation in combination with other processes with evaporation or distillation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/36—Regeneration of waste pickling liquors
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/04—Apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP21974895A 1995-08-04 1995-08-04 溶剤の再生回収方法及び再生回収装置 Expired - Fee Related JP3172401B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP21974895A JP3172401B2 (ja) 1995-08-04 1995-08-04 溶剤の再生回収方法及び再生回収装置
US08/620,237 US5925224A (en) 1995-08-04 1996-03-22 Method of and apparatus for purifying a solvent
KR1019960008292A KR100395363B1 (ko) 1995-08-04 1996-03-26 용제의 정제방법 및 장치
TW085105563A TW305767B (esLanguage) 1995-08-04 1996-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21974895A JP3172401B2 (ja) 1995-08-04 1995-08-04 溶剤の再生回収方法及び再生回収装置

Publications (2)

Publication Number Publication Date
JPH0949093A JPH0949093A (ja) 1997-02-18
JP3172401B2 true JP3172401B2 (ja) 2001-06-04

Family

ID=16740382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21974895A Expired - Fee Related JP3172401B2 (ja) 1995-08-04 1995-08-04 溶剤の再生回収方法及び再生回収装置

Country Status (4)

Country Link
US (1) US5925224A (esLanguage)
JP (1) JP3172401B2 (esLanguage)
KR (1) KR100395363B1 (esLanguage)
TW (1) TW305767B (esLanguage)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3721016B2 (ja) 1999-09-30 2005-11-30 宮崎沖電気株式会社 レジスト処理装置
KR100858047B1 (ko) 2005-09-30 2008-09-10 니폰 리파인 가부시키가이샤 용제 회수 장치 및 용제 회수 방법
KR100891747B1 (ko) * 2007-09-05 2009-04-03 주식회사 코렉스 포토레지스트 스트리퍼의 재생장치
WO2009031731A1 (en) * 2007-09-05 2009-03-12 Korex Corporation Method and apparatus for recycling photoresist stripper waste
US8961744B2 (en) * 2013-02-25 2015-02-24 Korex Corporation System and method for recycling high-boiling-point waste photoresist stripper
CN105060602B (zh) * 2015-09-17 2017-05-24 天津科技大学 工业废水超声协同处理和超声蒸发结晶一体化工艺及装置
JP7191831B2 (ja) * 2017-08-02 2022-12-19 株式会社クラレ 回収レジスト剥離剤からのジメチルスルホキシドの回収方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3073755A (en) * 1959-08-11 1963-01-15 Laporte Chemical Concentration of hydrogen peroxide
US5348588A (en) * 1993-06-29 1994-09-20 Church & Dwight Co., Inc. Evaporative treatment of inorganic saponifier wash water
TW305821B (esLanguage) * 1993-09-13 1997-05-21 Mitsubishi Gas Chemical Co

Also Published As

Publication number Publication date
US5925224A (en) 1999-07-20
TW305767B (esLanguage) 1997-05-21
KR970009840A (ko) 1997-03-27
KR100395363B1 (ko) 2003-12-01
JPH0949093A (ja) 1997-02-18

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