JP2907904B2 - 多数の微細な開口を有する２次元的に拡張された金属製のマイクロ構造体を製造する方法及びそれに適した工具を製造する方法 - Google Patents

多数の微細な開口を有する２次元的に拡張された金属製のマイクロ構造体を製造する方法及びそれに適した工具を製造する方法

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Publication number
JP2907904B2
JP2907904B2 JP1320717A JP32071789A JP2907904B2 JP 2907904 B2 JP2907904 B2 JP 2907904B2 JP 1320717 A JP1320717 A JP 1320717A JP 32071789 A JP32071789 A JP 32071789A JP 2907904 B2 JP2907904 B2 JP 2907904B2
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JP
Japan
Prior art keywords
microstructure
tool
conductive layer
layer
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1320717A
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English (en)
Japanese (ja)
Other versions
JPH02194189A (ja
Inventor
ヴイルヘルム・ビール
アシム・マナー
クラウス・シユーベルト
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FUORUSHUNGUSUTSUENTORUMU KAARUSURUUE GmbH
Original Assignee
FUORUSHUNGUSUTSUENTORUMU KAARUSURUUE GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FUORUSHUNGUSUTSUENTORUMU KAARUSURUUE GmbH filed Critical FUORUSHUNGUSUTSUENTORUMU KAARUSURUUE GmbH
Publication of JPH02194189A publication Critical patent/JPH02194189A/ja
Application granted granted Critical
Publication of JP2907904B2 publication Critical patent/JP2907904B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/10—Moulds; Masks; Masterforms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Micromachines (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Mounting, Exchange, And Manufacturing Of Dies (AREA)
JP1320717A 1988-12-17 1989-12-12 多数の微細な開口を有する２次元的に拡張された金属製のマイクロ構造体を製造する方法及びそれに適した工具を製造する方法 Expired - Fee Related JP2907904B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3842610A DE3842610C1 (enExample) 1988-12-17 1988-12-17
DE3842610.2 1988-12-17

Publications (2)

Publication Number Publication Date
JPH02194189A JPH02194189A (ja) 1990-07-31
JP2907904B2 true JP2907904B2 (ja) 1999-06-21

Family

ID=6369459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1320717A Expired - Fee Related JP2907904B2 (ja) 1988-12-17 1989-12-12 多数の微細な開口を有する２次元的に拡張された金属製のマイクロ構造体を製造する方法及びそれに適した工具を製造する方法

Country Status (5)

Country Link
US (1) US5055163A (enExample)
EP (1) EP0374441B1 (enExample)
JP (1) JP2907904B2 (enExample)
DE (1) DE3842610C1 (enExample)
ES (1) ES2037936T3 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107394558A (zh) * 2016-05-17 2017-11-24 泰科电子(上海)有限公司 压印模板和在导电端子的镀层上形成微结构的方法

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4142001A1 (de) * 1991-12-19 1993-06-24 Microparts Gmbh Verfahren zum herstellen gestufter formeinsaetze, gestufte formeinsaetze und damit abgeformte mikrostrukturkoerper
DE4033233A1 (de) * 1990-10-19 1992-04-23 Kernforschungsz Karlsruhe Verfahren zur herstellung eines mikrostrukturkoerpers, insbesondere eines mikrostrukturierten abformwerkzeugs
DE4135676C1 (enExample) * 1991-10-30 1993-03-18 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe, De
DE4307869C2 (de) * 1993-03-12 1996-04-04 Microparts Gmbh Mikrostrukturkörper und Verfahren zu deren Herstellung
DE4404021A1 (de) * 1994-02-09 1995-08-10 Bosch Gmbh Robert Düsenplatte, insbesondere für Einspritzventile und Verfahren zur Herstellung einer Düsenplatte
DE19608824A1 (de) * 1996-03-07 1997-09-18 Inst Mikrotechnik Mainz Gmbh Verfahren zur Herstellung von Mikrowärmetauschern
AU4455601A (en) * 2000-03-22 2001-10-03 Citizen Watch Co. Ltd. Hole structure and production method for hole structure
US6422528B1 (en) 2001-01-17 2002-07-23 Sandia National Laboratories Sacrificial plastic mold with electroplatable base
US7090189B2 (en) * 2001-01-17 2006-08-15 Sandia National Laboratories Compliant cantilevered micromold
US6881203B2 (en) 2001-09-05 2005-04-19 3M Innovative Properties Company Microneedle arrays and methods of manufacturing the same
CN1691969A (zh) * 2002-07-19 2005-11-02 3M创新有限公司 微针装置和微针施用设备
JP4556055B2 (ja) * 2003-05-02 2010-10-06 独立行政法人理化学研究所 ハニカム構造体を鋳型としたメゾ構造体の作製
US9238309B2 (en) 2009-02-17 2016-01-19 The Board Of Trustees Of The University Of Illinois Methods for fabricating microstructures

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2805986A (en) * 1952-01-11 1957-09-10 Harold B Law Method of making fine mesh screens
CH591570A5 (enExample) * 1972-11-28 1977-09-30 Buser Ag Maschf Fritz
DE3537483C1 (de) * 1985-10-22 1986-12-04 Kernforschungszentrum Karlsruhe Gmbh, 7500 Karlsruhe Verfahren zum Herstellen einer Vielzahl plattenfoermiger Mikrostrukturkoerper aus Metall
DE3611732A1 (de) * 1986-04-08 1987-10-15 Kernforschungsz Karlsruhe Verfahren zur herstellung von katalysatortraeger-koerpern und danach hergestellte katalysatortraeger-koerper

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107394558A (zh) * 2016-05-17 2017-11-24 泰科电子(上海)有限公司 压印模板和在导电端子的镀层上形成微结构的方法

Also Published As

Publication number Publication date
ES2037936T3 (es) 1993-07-01
US5055163A (en) 1991-10-08
JPH02194189A (ja) 1990-07-31
DE3842610C1 (enExample) 1990-06-21
EP0374441A1 (de) 1990-06-27
EP0374441B1 (de) 1993-02-03

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