JP2668512B2 - 軟ｘ線による物体表面の静電気除去装置 - Google Patents

軟ｘ線による物体表面の静電気除去装置

Info

Publication number
JP2668512B2
JP2668512B2 JP6282482A JP28248294A JP2668512B2 JP 2668512 B2 JP2668512 B2 JP 2668512B2 JP 6282482 A JP6282482 A JP 6282482A JP 28248294 A JP28248294 A JP 28248294A JP 2668512 B2 JP2668512 B2 JP 2668512B2
Authority
JP
Japan
Prior art keywords
soft
static electricity
air
ionized
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP6282482A
Other languages
English (en)
Japanese (ja)
Other versions
JPH08124695A (ja
Inventor
一郎 白濱
圭二 小泉
Original Assignee
株式会社レヨーン工業
ソフテックス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社レヨーン工業, ソフテックス株式会社 filed Critical 株式会社レヨーン工業
Priority to JP6282482A priority Critical patent/JP2668512B2/ja
Priority to TW84113301A priority patent/TW289205B/zh
Publication of JPH08124695A publication Critical patent/JPH08124695A/ja
Application granted granted Critical
Publication of JP2668512B2 publication Critical patent/JP2668512B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Elimination Of Static Electricity (AREA)
JP6282482A 1994-10-24 1994-10-24 軟ｘ線による物体表面の静電気除去装置 Expired - Fee Related JP2668512B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP6282482A JP2668512B2 (ja) 1994-10-24 1994-10-24 軟ｘ線による物体表面の静電気除去装置
TW84113301A TW289205B (enrdf_load_stackoverflow) 1994-10-24 1995-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6282482A JP2668512B2 (ja) 1994-10-24 1994-10-24 軟ｘ線による物体表面の静電気除去装置

Publications (2)

Publication Number Publication Date
JPH08124695A JPH08124695A (ja) 1996-05-17
JP2668512B2 true JP2668512B2 (ja) 1997-10-27

Family

ID=17653017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6282482A Expired - Fee Related JP2668512B2 (ja) 1994-10-24 1994-10-24 軟ｘ線による物体表面の静電気除去装置

Country Status (2)

Country Link
JP (1) JP2668512B2 (enrdf_load_stackoverflow)
TW (1) TW289205B (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002098188A1 (en) * 2001-05-29 2002-12-05 Techno Ryowa Ltd. Ionized air flow discharge type non-dusting ionizer

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3223142B2 (ja) 1997-08-22 2001-10-29 チッソ株式会社 液晶表示素子の製造法
JP4751275B2 (ja) * 2006-08-23 2011-08-17 近藤工業株式会社 軟ｘ線式静電除去装置に使用する軟ｘ線遮蔽シートおよびその製造方法
KR101471382B1 (ko) * 2013-10-15 2014-12-10 (주)선재하이테크 진공챔버용 연엑스선 제전장치
KR101439209B1 (ko) * 2013-10-30 2014-09-12 (주)선재하이테크 에어 분사 방식을 갖는 연엑스선 이오나이저

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4827371A (en) * 1988-04-04 1989-05-02 Ion Systems, Inc. Method and apparatus for ionizing gas with point of use ion flow delivery
JP2677945B2 (ja) * 1993-06-18 1997-11-17 浜松ホトニクス株式会社 イオンガス発生装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002098188A1 (en) * 2001-05-29 2002-12-05 Techno Ryowa Ltd. Ionized air flow discharge type non-dusting ionizer
US7126807B2 (en) 2001-05-29 2006-10-24 Techno Ryowa Ltd. Ionized air flow discharge type non-dusting ionizer
CN1301633C (zh) * 2001-05-29 2007-02-21 菱和技术株式会社 离子化气流释出型无发尘静电消除机

Also Published As

Publication number Publication date
JPH08124695A (ja) 1996-05-17
TW289205B (enrdf_load_stackoverflow) 1996-10-21

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