JP2668512B2 - Static electricity removal device for object surface by soft X-ray - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a process for manufacturing liquid crystal, integrated circuits, printed circuit boards and various materials in electronic materials and related industries, or printing materials and papermaking.
The present invention relates to an apparatus for preventing static electricity, that is, static electricity, of sheet materials and materials in related industries such as polymer materials, and products in textile related industries.

[0002]

2. Description of the Related Art Conventionally, electronic materials and related industries, or printing materials and related industries such as paper and polymer materials,
Further, in the products and the like of the textile-related industry, static electricity is easily generated due to the nature of the products. The static electricity generated in the products and the like is extremely low with respect to the static electricity in electronic parts such as liquid crystal, field effect transistor and CMOS device. It is vulnerable to damage to electronic parts easily, and also exerts an adsorbing force on sheet-like or plate-like products such as paper and plastic films during printing and transport processes, causing problems such as stacking two sheets, Furthermore, the flash generated by the discharge at the time of high-voltage electrostatic charging causes an important problem such as exposing a material coated with a photosensitizer such as a film. The following devices are generally employed as devices for removing static electricity generated in products and the like. That is, by applying a high voltage to a needle-shaped or rod-shaped electrode made of tungsten or stainless steel, a corona discharge is generated at the tip of the needle-shaped or rod-shaped electrode, and then the corona discharge is generated. It is composed of a device that removes static electricity by using ionized air generated around the tip of the needle-shaped or rod-shaped electrode with the above, or a fiber connected to the ground potential and made of a conductive material. The brush is a device that removes static electricity by causing a brush to be brought close to or in contact with the surface of a charged object, thereby discharging the charge on the surface of the object through the brush.

[0003]

However, in the above-mentioned conventional device, a high voltage is applied to the needle or rod-shaped electrode made of tungsten or stainless steel, so that the needle or rod-shaped electrode is turned off. After generating a corona discharge at the tip, the device removes static electricity by utilizing ionized air generated around the tip of the needle-shaped or rod-shaped electrode accompanying the corona discharge . Place
In the case of the corona discharge generated at the tip of the electrode, the high voltage applied to the electrode causes noise harmful to the electronic component, and is generated at the tip of the electrode. Corona discharge also stays in a narrow range,
In order to remove a wide range of static electricity, enormous equipment is required. Furthermore, when corona discharge is generated to generate ionized air, since the distance between the electrode and the surface of the object to be neutralized is usually 10 to 100 mm, the positioning operation of the object to be neutralized is performed. In such a case, there is a risk that an electric shock may occur, and furthermore, corona discharge of the electrode itself may cause an explosion or the like.

On the other hand, a brush made of a fiber made of a conductive material is connected to an earth potential and brought close to or in contact with the surface of a charged object, thereby discharging electric charges on the surface of the object through the brush. A place for equipment that removes static electricity
When discharging when contacting the surface of the object to be neutralized,
In addition to the fact that fibers made of a conductive material constituting the brush may damage the surface of the object to be neutralized, there is also a problem that dust attached to the surface of the brush itself is re-attached to the surface of the object to be neutralized. In addition, there is a disadvantage that the static elimination effect becomes non-uniform due to how the brush abuts on the object to be neutralized.

Therefore, the present invention is intended to improve the drawbacks of the above-mentioned conventional ones, and can be manufactured simply and inexpensively.
This structure enables the static electricity removal work to be carried out quickly and reliably while ensuring the safety of workers and the like.

[0006]

For this purpose, the maximum effective irradiation space in the shielded space such as the ionization chamber is reduced by the air sucked from outside into the shielded space such as the ionization chamber by the suction sirocco fan. In order to secure the ionized air, a soft X-ray generated from a soft X-ray tube arranged on the wall surface alone or opposite to each other is applied to the ionized state, and the air in the ionized state is exhausted by a sirocco fan for exhaust. By spraying on the surface of the object, it becomes ionized.
Use static air to remove static electricity on the surface of the object
It becomes .

[0007]

Since the air suctioned by the suction sirocco fan in the shielded space such as the ionization chamber is irradiated with the soft X-ray generated from the soft X-ray generation tube, the ionization is performed by the above-mentioned structure. Air sucked into a shielded space such as a box
It becomes an ionized state having a positive charge and a negative charge, and by blowing the ionized air onto the surface of the object charged by the exhaust sirocco fan, the positive or negative charge on the object surface is electrically neutralized. Static electricity can be removed, and the ionization of air generates the same amount of positive or negative charge, so that there is no risk of charging the object itself, and the amount of residual static electricity can be reduced.

Further, since the ionized air is generated by soft X-rays generated by a soft X-ray generating tube, not only nitrogen and oxygen, which are the main components of air, but also carbon dioxide and water are ionized. Since it is powerful enough to do so, the life of ionized molecules is extended, so it is possible to easily create a space that is less likely to be charged with static electricity, and reliably prevent static electricity. Air
Since it is made by blowing to the surface of the exhaust sirocco fan Thus static elimination target, while sufficiently ensuring the safety of workers, pairs in extensive and complicated static eliminator range
Since a large amount of ionized gas can be used, it is possible to safely and reliably cope with static electricity removal in powder.

[0009]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. (1) is an electrostatic eliminator according to an embodiment of the present invention. The static eliminator (1) includes an ionization chamber (2) containing a soft X-ray generating tube (3) for generating soft X-rays, Outside air is sucked into the ionization chamber (2),
Inhalation sirocco fan that discharges ionized air generated by irradiation of soft X-rays generated from a soft X-ray generating tube (3) contained in an ionization chamber (2) to the outside of the ionization chamber (2) (4) and an exhaust sirocco fan (5).

That is, with respect to the air sucked into the ionization chamber (2) from the outside by the suction sirocco fan (4), an appropriate irradiation space is ensured in the ionization chamber (2) so as to ensure the maximum effective irradiation space. Soft X-rays (shortest wavelength λmin. ≧) generated by applying a voltage of, for example, 10 kv to a soft X-ray tube (3) having a radiation angle θ and arranged alone or on the wall so as to face each other. 12.39
5 angstroms / 10 kv = 1.23 angstroms) to make it an ionized state, and the air in this ionized state is sprayed onto the surface of the object by the exhaust sirocco fan (5) onto the surface of the object (6) to be charged. Things.

Although fluorescent X-rays generated by irradiating the substance with X-rays, that is, secondary X-rays, poses a problem, they are generated by the soft X-ray generation tube (3) provided inside the ionization chamber (2). The soft X-rays to be ionized are irradiated to the air sucked into the ionization chamber (2) by the suction sirocco fan (4) to be in an ionized state. In this case, the secondary X-rays themselves are extremely weak. It is possible to prevent leakage to the outside of the ionization chamber (2) by shielding with an iron plate of about 2 mm, and the ionization state is caused by the balance between the ionizing ability of soft X-rays and the radiation absorbing ability of air. The length (L) is within a distance of about 400 mm. Therefore, the maximum effective irradiation space is 400 mm in length (L) from the soft X-ray generating tube (3), and the effective circle radius is L · tan θ / 2 is limited to the space shown.

Since the static eliminator (1) according to the embodiment of the present invention has the above-mentioned configuration, the static eliminator (1) has a pressure of 10 kV with respect to the air sucked by the suction sirocco fan (4) in the ionization chamber (2). By injecting a soft X-ray generated from a soft X-ray generating tube (3) installed inside the ionization chamber (2) by applying a high voltage, the air sucked into the ionization chamber (2) is An exhausted sirocco fan (5) is provided to prevent the ionized air from being recombined and electrically neutralized by the ionized state having the same amount of positive charge and negative charge. ) Is sprayed on the surface of the object (6) to be charged while being stirred appropriately, the positive or negative charge charged on the surface of the object (6) is electrically neutralized, so that static electricity is generated. Can be removed, Ionization of the gas is to generate a positive or negative the same amount of charge, static elimination target serving object (6) there is no possibility to charge itself, in which it is possible to reduce the residual amount of static electricity.

Further, the ionized air is supplied to an ionization chamber (2).
Because of the soft X-rays generated by the soft X-ray generating tube (3) installed inside, not only nitrogen and oxygen, which are the main components of air, but also carbon dioxide and water can be ionized. Since it is so powerful, the life of the ionized molecules is extended, so that the static electricity charged on the surface of the object (6) can be surely removed, and the air ionized by soft X-rays can be removed from the target object. Since it is sprayed on the surface of the object (6), the safety of the operator is sufficiently secured from an accident such as an electric shock, and a wide and complicated static electricity removal range is safely and surely dealt with. Is something that can be done.

Next, FIG. 3 shows an application of the present invention.
This is an example , and is a static eliminator (1 ') in a clean room or a clean booth (7). The static eliminator (1') in this clean room or a clean booth (7) is inside a ceiling (8). An air blower (9) is provided for sucking air from the outside and blowing air toward the ceiling (8), and the air blown toward the ceiling (8) by the air blower (9) is disposed. , The soft holes which are introduced into the clean room or the clean booth (7) through the suction holes (10) formed in the ceiling (8), and which are attached inwardly of the ceiling (8) and are arranged at positions opposite to each other. The X-ray generation tube (3) irradiates soft X-rays to produce ionized air, and the clean room or clean booth (7) lowers the clean room or clean room. By exhausting the air in the clean booth (7), the ionized air flows from the upper part to the lower part in the clean room or the clean booth (7). It is possible to remove static electricity charged on the surface of the clean room or the clean booth (7) and the object (6) while suppressing the generation and adhesion of dust and the like in (7).

Further , FIG. 4 shows another embodiment of the present invention .
This is an application example , and this static electricity removing device (1 ″) for highly compressed air introduces compressed air introduced from the outside into an ionization tank (11) that is shielded from the outside, and at the same time, inside the ionization tank (11). The compressed air, such as an air gun, is connected to the ionization tank (11) after the compressed air is irradiated with soft X-rays generated by the soft X-ray generation tube (3) to make the air ionized. By the discharge mechanism (12),
The charged surface of the object (6) is charged against the ionization tank (1
Since the high-pressure ionized air in 1) is blown, the ionized air can be used instantaneously and in large quantities for static electricity removal. It is possible to reliably remove static electricity from the powder, remove liquid and a liquid container or a pipe through which the liquid flows, and further remove local static electricity.

[0016]

As described above, inhalation sirocco fan
Therefore, by irradiating the inhaled air with soft X-rays,
The ionized air generated by the
Static by spraying on the surface of the static elimination target me by the emissions
It removes electricity and has a simple and inexpensive structure.
In addition to being able to cope with the removal of static electricity from the surface of a wide range or complicated object for static elimination, the life of the soft X-ray generating tube itself that generates soft X-rays that generate ionized air is long, and the cost can be reduced. Since the generation of soft X-rays uses the discharge phenomenon of the soft X-ray generating tube in particular, it has an excellent effect of preventing noise on electronic components. .

[Brief description of the drawings]

FIG. 1 is an overall perspective view of a static eliminator according to an embodiment of the present invention.

FIG. 2 is an overall side view of FIG.

FIG. 3 is a schematic diagram of a static electricity removing device for a clean room or a clean booth, which is an application example of the present invention.

FIG. 4 is a schematic diagram of a static eliminator of a static eliminator for highly compressed air which is another application example of the present invention.

[Explanation of symbols]

 1, 1 ', 1 "Static eliminator 2 Ionization box 3 Soft X-ray generation tube 4 Sirocco fan for suction 5 Sirocco fan for exhaust 6 Object 7 Clean room or clean booth 8 Ceiling 9 Blower blower 10 Suction hole 11 Ionization tank 12 Air gun etc. Compressed air discharge mechanism

Continuation of the front page (56) References JP-A-1-274396 (JP, A) JP-A-7-6860 (JP, A) WO 94/5138 (WO, A)

Claims (1)

(57) [Claims] 1. A single sirocco fan for air sucked from outside into a shielded space such as an ionization chamber so that a maximum effective irradiation space can be secured in the shielded space such as the ionization chamber. Is softened by irradiating soft X-rays generated from a soft X-ray tube arranged on the wall surface so as to face each other, and blowing the ionized air onto the object surface by an exhaust sirocco fan. A device for removing static electricity from the surface of an object using X-rays.