JP2664510B2 - 光検出装置，および光検出方法 - Google Patents

光検出装置，および光検出方法

Info

Publication number
JP2664510B2
JP2664510B2 JP2052393A JP5239390A JP2664510B2 JP 2664510 B2 JP2664510 B2 JP 2664510B2 JP 2052393 A JP2052393 A JP 2052393A JP 5239390 A JP5239390 A JP 5239390A JP 2664510 B2 JP2664510 B2 JP 2664510B2
Authority
JP
Japan
Prior art keywords
light
photodetector
layer
wavelength
semiconductor layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2052393A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03227578A (ja
Inventor
安紀 徳田
紀昭 塚田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of JPH03227578A publication Critical patent/JPH03227578A/ja
Application granted granted Critical
Publication of JP2664510B2 publication Critical patent/JP2664510B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/017—Structures with periodic or quasi periodic potential variation, e.g. superlattices, quantum wells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F3/00—Optical logic elements; Optical bistable devices
    • G02F3/02—Optical bistable devices
    • G02F3/028—Optical bistable devices based on self electro-optic effect devices [SEED]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
    • H01L31/035236—Superlattices; Multiple quantum well structures
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/0155—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the optical absorption
    • G02F1/0157—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the optical absorption using electro-absorption effects, e.g. Franz-Keldysh [FK] effect or quantum confined stark effect [QCSE]

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Light Receiving Elements (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
JP2052393A 1989-03-03 1990-03-02 光検出装置，および光検出方法 Expired - Fee Related JP2664510B2 (ja)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP5265289 1989-03-03
JP5265189 1989-03-03
JP5549789 1989-03-08
JP5549889 1989-03-08
JP1-52652 1989-11-22
JP1-52651 1989-11-22
JP1-55497 1989-11-22
JP1-301935 1989-11-22
JP1-55498 1989-11-22
JP30193589 1989-11-22

Publications (2)

Publication Number Publication Date
JPH03227578A JPH03227578A (ja) 1991-10-08
JP2664510B2 true JP2664510B2 (ja) 1997-10-15

Family

ID=27523022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2052393A Expired - Fee Related JP2664510B2 (ja) 1989-03-03 1990-03-02 光検出装置，および光検出方法

Country Status (4)

Country Link
US (1) US5144397A (fr)
EP (1) EP0385803B1 (fr)
JP (1) JP2664510B2 (fr)
DE (1) DE69020189T2 (fr)

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AU649672B2 (en) * 1990-04-20 1994-06-02 Telstra Corporation Limited An electro-optic device
WO1991016729A1 (fr) * 1990-04-20 1991-10-31 Australian And Overseas Telecommunications Corporation Limited Dispositif electro-optique
JP2906713B2 (ja) * 1991-03-29 1999-06-21 三菱電機株式会社 光素子の多重安定性取得方法
JPH05264339A (ja) * 1992-03-17 1993-10-12 Hamamatsu Photonics Kk 光検出器
US5302838A (en) * 1992-06-09 1994-04-12 University Of Cincinnati Multi-quantum well injection mode device
US5508529A (en) * 1992-06-09 1996-04-16 University Of Cincinnati Multi-quantum well injection mode device and associated electronic neuron apparatus
US5329136A (en) * 1993-04-30 1994-07-12 At&T Bell Laboratories Voltage-tunable photodetector
US5382788A (en) * 1993-07-16 1995-01-17 The United States Of America As Represented By The Secretary Of The Army Monolithic photoconductive bipolar pulsar utilizing a radial transmission line
JP3009562B2 (ja) * 1993-07-30 2000-02-14 三菱電機株式会社 光スイッチング装置
US5488504A (en) * 1993-08-20 1996-01-30 Martin Marietta Corp. Hybridized asymmetric fabry-perot quantum well light modulator
US5552603A (en) * 1994-09-15 1996-09-03 Martin Marietta Corporation Bias and readout for multicolor quantum well detectors
US5615143A (en) * 1994-09-19 1997-03-25 Cornell Research Foundation, Inc. Optomechanical terabit data storage system
FR2756667B1 (fr) * 1996-12-04 1999-02-19 Thomson Csf Detecteur d'ondes electromagnetiques bispectral
KR19980050460A (ko) * 1996-12-20 1998-09-15 양승택 다중 파장 동시 인식을 위한 광검출기 구조 및 그를 이용한 광검출방법
US5949561A (en) * 1997-04-15 1999-09-07 Lucent Technologies Inc. Wavelength demultiplexing multiple quantum well photodetector
JP3455456B2 (ja) * 1998-01-09 2003-10-14 Ｋｄｄｉ株式会社 半導体記憶装置
JP2002033507A (ja) * 2000-07-18 2002-01-31 Nippon Sheet Glass Co Ltd 受光素子および光分波器
KR100444912B1 (ko) * 2002-01-21 2004-08-21 광주과학기술원 Ｗｄｍ 광통신 시스템에서 광채널의 파장/광출력 안정화방법 및 그 시스템
US7308202B2 (en) * 2002-02-01 2007-12-11 Cubic Corporation Secure covert combat identification friend-or-foe (IFF) system for the dismounted soldier
US7329895B2 (en) * 2002-02-22 2008-02-12 Honeywell International Inc. Dual wavelength detector
WO2009009765A1 (fr) * 2007-07-11 2009-01-15 Cubic Corporation Modulateur à puits quantiques sur puce de type “ flip-chip ”
US8027591B2 (en) * 2007-10-29 2011-09-27 Cubic Corporation Resonant quantum well modulator driver
US7859675B2 (en) * 2007-11-06 2010-12-28 Cubic Corporation Field test of a retro-reflector and detector assembly
JP5293257B2 (ja) * 2009-02-20 2013-09-18 富士通株式会社 イメージセンサ
EP2377607B1 (fr) * 2010-04-19 2018-05-30 Corning Incorporated Raccords fluides pour modules de microréacteur
US9726913B2 (en) * 2014-01-30 2017-08-08 Awenyx Inc. Semiconductor interferometric device
JP6909165B2 (ja) * 2018-01-15 2021-07-28 富士通株式会社 赤外線検出器、撮像素子、撮像システム、赤外線検出器の製造方法

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US4205331A (en) * 1978-06-09 1980-05-27 The United States Of America As Represented By The Secretary Of The Army Infrared optical devices of layered structure
JPS5516479A (en) * 1978-07-21 1980-02-05 Sumitomo Electric Ind Ltd Heterojunction light receiving diode
JPS5593275A (en) * 1979-01-09 1980-07-15 Nippon Telegr & Teleph Corp <Ntt> Semiconductor light wave separating detector
JPS5762573A (en) * 1980-10-03 1982-04-15 Fujitsu Ltd Multiple wavelength photoelectric converter
JPS5927581A (ja) * 1982-08-03 1984-02-14 Seisan Gijutsu Shinko Kyokai 光センサ
JPS6074569A (ja) * 1983-09-30 1985-04-26 Fujitsu Ltd イメ−ジセンサ
JPS61182273A (ja) * 1985-02-08 1986-08-14 Nippon Telegr & Teleph Corp <Ntt> 多波長受光素子
US4786951A (en) * 1985-02-12 1988-11-22 Mitsubishi Denki Kabushiki Kaisha Semiconductor optical element and a process for producing the same
JPH079996B2 (ja) * 1985-03-08 1995-02-01 日本電信電話株式会社 半導体受光装置
US4843439A (en) * 1985-08-28 1989-06-27 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Tailorable infrared sensing device with strain layer superlattice structure
JPH0728047B2 (ja) * 1986-02-17 1995-03-29 日本電気株式会社 光トランジスタ
US4711857A (en) * 1986-08-28 1987-12-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Tailorable infrared sensing device with strain layer superlattice structure
JPH0259625A (ja) * 1988-08-26 1990-02-28 Canon Inc 波長選択機能付光検出器
JPH02170581A (ja) * 1988-12-23 1990-07-02 Fujitsu Ltd 半導体受光装置
JPH02194655A (ja) * 1989-01-24 1990-08-01 Nippon Telegr & Teleph Corp <Ntt> 光検出用導波路型ｐｉｎフォトダイオード

Non-Patent Citations (1)

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Title
ＩＥＥＥ Ｊｏｕｒｎａｌ ｏｆ Ｑｕａｎｔｕｍ Ｅｌｅｃｔｒｏｎｉｃｓ，Ｖｏｌ．ＱＥ−２１，Ｎｏ．９，Ｐ．１４６２−１４７６（１９８５）

Also Published As

Publication number Publication date
DE69020189T2 (de) 1996-02-29
EP0385803A3 (fr) 1992-04-15
EP0385803A2 (fr) 1990-09-05
JPH03227578A (ja) 1991-10-08
US5144397A (en) 1992-09-01
DE69020189D1 (de) 1995-07-27
EP0385803B1 (fr) 1995-06-21

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Legal Events

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