JP2587307Y2 - ロボット搭載無人搬送車 - Google Patents
ロボット搭載無人搬送車Info
- Publication number
- JP2587307Y2 JP2587307Y2 JP1990043093U JP4309390U JP2587307Y2 JP 2587307 Y2 JP2587307 Y2 JP 2587307Y2 JP 1990043093 U JP1990043093 U JP 1990043093U JP 4309390 U JP4309390 U JP 4309390U JP 2587307 Y2 JP2587307 Y2 JP 2587307Y2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- robot
- guided vehicle
- carrier
- fluid bag
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000004973 liquid crystal related substance Substances 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000032258 transport Effects 0.000 description 3
- 230000003405 preventing effect Effects 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
Landscapes
- Vehicle Body Suspensions (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990043093U JP2587307Y2 (ja) | 1990-04-24 | 1990-04-24 | ロボット搭載無人搬送車 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990043093U JP2587307Y2 (ja) | 1990-04-24 | 1990-04-24 | ロボット搭載無人搬送車 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH042770U JPH042770U (enrdf_load_html_response) | 1992-01-10 |
JP2587307Y2 true JP2587307Y2 (ja) | 1998-12-16 |
Family
ID=31555215
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990043093U Expired - Lifetime JP2587307Y2 (ja) | 1990-04-24 | 1990-04-24 | ロボット搭載無人搬送車 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2587307Y2 (enrdf_load_html_response) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6225953U (enrdf_load_html_response) * | 1985-07-29 | 1987-02-17 |
-
1990
- 1990-04-24 JP JP1990043093U patent/JP2587307Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH042770U (enrdf_load_html_response) | 1992-01-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2011013338A1 (ja) | 搬送システム及びその設定方法 | |
JPH07228345A (ja) | トンネル搬送装置 | |
KR101760131B1 (ko) | 시소 구조의 구륜 유닛 및 이를 구비한 자동 이송 차량 | |
TW201810496A (zh) | 搬送系統 | |
US4903610A (en) | Railway carrier apparatus for semiconductor wafers | |
JP2587307Y2 (ja) | ロボット搭載無人搬送車 | |
US11735454B2 (en) | Transfer device and ceiling carrier | |
KR20020007484A (ko) | 운송장치용 웨이퍼카세트 지지장치 | |
JPH03248443A (ja) | 半導体ウェハー搬送装置 | |
CN116767772A (zh) | 高架输送车 | |
JP4314780B2 (ja) | 無人搬送車システム | |
JP3364294B2 (ja) | 搬送装置および搬送方法 | |
JP2001343621A (ja) | 液晶表示装置の搬送方法および搬送システム | |
JP4286210B2 (ja) | ガラス基板の搬送方法および搬送システム | |
JP2001298065A (ja) | 無人搬送車 | |
JPH036580Y2 (enrdf_load_html_response) | ||
JP2007245751A (ja) | 重量物搬送装置 | |
JPH05170102A (ja) | 搬送台車の懸架装置 | |
JP2024066221A (ja) | ガス供給システム | |
JPH0664748A (ja) | 磁気浮上真空搬送装置 | |
JP2882501B2 (ja) | 磁気浮上式搬送設備 | |
JPH05165524A (ja) | 無人搬送車の防振台における位置決め装置 | |
JP2951787B2 (ja) | ワーク搬送移載装置 | |
JPH07330115A (ja) | スタッカクレーン | |
JP3612774B2 (ja) | 自動搬送台車 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |