JP2587307Y2 - ロボット搭載無人搬送車 - Google Patents

ロボット搭載無人搬送車

Info

Publication number
JP2587307Y2
JP2587307Y2 JP1990043093U JP4309390U JP2587307Y2 JP 2587307 Y2 JP2587307 Y2 JP 2587307Y2 JP 1990043093 U JP1990043093 U JP 1990043093U JP 4309390 U JP4309390 U JP 4309390U JP 2587307 Y2 JP2587307 Y2 JP 2587307Y2
Authority
JP
Japan
Prior art keywords
fluid
robot
guided vehicle
carrier
fluid bag
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990043093U
Other languages
English (en)
Japanese (ja)
Other versions
JPH042770U (enrdf_load_html_response
Inventor
正直 村田
Original Assignee
神鋼電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 神鋼電機株式会社 filed Critical 神鋼電機株式会社
Priority to JP1990043093U priority Critical patent/JP2587307Y2/ja
Publication of JPH042770U publication Critical patent/JPH042770U/ja
Application granted granted Critical
Publication of JP2587307Y2 publication Critical patent/JP2587307Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Vehicle Body Suspensions (AREA)
JP1990043093U 1990-04-24 1990-04-24 ロボット搭載無人搬送車 Expired - Lifetime JP2587307Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990043093U JP2587307Y2 (ja) 1990-04-24 1990-04-24 ロボット搭載無人搬送車

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990043093U JP2587307Y2 (ja) 1990-04-24 1990-04-24 ロボット搭載無人搬送車

Publications (2)

Publication Number Publication Date
JPH042770U JPH042770U (enrdf_load_html_response) 1992-01-10
JP2587307Y2 true JP2587307Y2 (ja) 1998-12-16

Family

ID=31555215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990043093U Expired - Lifetime JP2587307Y2 (ja) 1990-04-24 1990-04-24 ロボット搭載無人搬送車

Country Status (1)

Country Link
JP (1) JP2587307Y2 (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6225953U (enrdf_load_html_response) * 1985-07-29 1987-02-17

Also Published As

Publication number Publication date
JPH042770U (enrdf_load_html_response) 1992-01-10

Similar Documents

Publication Publication Date Title
WO2011013338A1 (ja) 搬送システム及びその設定方法
JPH07228345A (ja) トンネル搬送装置
KR101760131B1 (ko) 시소 구조의 구륜 유닛 및 이를 구비한 자동 이송 차량
TW201810496A (zh) 搬送系統
US4903610A (en) Railway carrier apparatus for semiconductor wafers
JP2587307Y2 (ja) ロボット搭載無人搬送車
US11735454B2 (en) Transfer device and ceiling carrier
KR20020007484A (ko) 운송장치용 웨이퍼카세트 지지장치
JPH03248443A (ja) 半導体ウェハー搬送装置
CN116767772A (zh) 高架输送车
JP4314780B2 (ja) 無人搬送車システム
JP3364294B2 (ja) 搬送装置および搬送方法
JP2001343621A (ja) 液晶表示装置の搬送方法および搬送システム
JP4286210B2 (ja) ガラス基板の搬送方法および搬送システム
JP2001298065A (ja) 無人搬送車
JPH036580Y2 (enrdf_load_html_response)
JP2007245751A (ja) 重量物搬送装置
JPH05170102A (ja) 搬送台車の懸架装置
JP2024066221A (ja) ガス供給システム
JPH0664748A (ja) 磁気浮上真空搬送装置
JP2882501B2 (ja) 磁気浮上式搬送設備
JPH05165524A (ja) 無人搬送車の防振台における位置決め装置
JP2951787B2 (ja) ワーク搬送移載装置
JPH07330115A (ja) スタッカクレーン
JP3612774B2 (ja) 自動搬送台車

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term